US4534623A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Horizontally-stacked metal-insulator-metal element for electro-optical device and method for manufacture
Assignee: Suwa Seikosha KK
•
Filing: 1984-01-17
•
Granted: 1985-08-13
•
Expires: 2004-01-17
Abstract
Abstract The invention is directed to an electro-optical device. The device incorporates a liquid crystal display panel wherein each display cell utilizes a non-linear metal insulator metal element. The layers of the metal insulator metal element are formed in a horizontal direction to provide an MIM which is smaller in size and inexpensive to manufacture. It also allows a liquid crystal display to be formed which is capable of high resolution image display.
Inventors
- 👤 Ryosuke Araki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 18:05
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/1365; H; H10; H10N; H10N70/00; Y; Y10; Y10S; Y10S359/00; Y10S359/90
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
139 words
A metal-insulator-metal device formed on a substrate, comprising: a substrate; a first metal film selectively patterned on the substrate and having a top surface and at least two side-edge surfaces; a first insulating film formed on the top surface and at least a portion of the two side-edge surfaces of the first metal film; a second insulating thick film formed on the top planar surface of the first insulating thin film; and a metal conductor formed on a portion of one side-edge surface of the second insulating thick film and on one side-edge of the first insulating thin film and a portion of the substrate for forming a non-linear metal-insulator-metal element between the side-edge surface of the first metal film and the metal conductor and whereby the metal conductor may be electrically coupled to a liquid crystal driving electrode.
Claim 2
Dependent Claim
139 words
A metal-insulator-metal device formed on a substrate, comprising: a substrate; a first metal film selectively patterned on the substrate and having a top surface and at least two side-edge surfaces; a first insulating film formed on the top surface and at least a portion of the two side-edge surfaces of the first metal film; a second insulating thick film formed on the top planar surface of the first insulating thin film; and a metal conductor formed on a portion of one side-edge surface of the second insulating thick film and on one side-edge of the first insulating thin film and a portion of the substrate for forming a non-linear metal-insulator-metal element between the side-edge surface of the first metal film and the metal conductor and whereby the metal conductor may be electrically coupled to a liquid crystal driving electrode.
Claim 3
Dependent Claim
20 words
The metal-insulator-metal device of claim 1, wherein the first insulating thin film is an oxide of the first metal film.
Claim 4
Dependent Claim
11 words
The metal-insulator-metal device of claim 1, wherein the substrate is transparent.
Claim 5
Dependent Claim
11 words
The metal-insulator-metal device of claim 3, wherein the substrate is glass.
Claim 6
Dependent Claim
24 words
The metal-insulator-metal device of claim 1, wherein the first metal film is tantalum and the first insulating film is a tantalum oxide thin film.
Claim 7
Dependent Claim
12 words
The metal-insulator-metal device of claim 1, wherein the metal conductor is chromium.
Claim 8
Dependent Claim
40 words
The metal-insulator-metal device of claim 1, wherein the first metal film is tantalum and the second insulating film is selected from the group consisting of SiO 2 , Si 3 N 4 , Al 2 O 3 and organic insulators.
Claim 9
Dependent Claim
214 words
A liquid crystal display device having a matrix of liquid crystal picture elements arranged in columns and rows with a column or row separated by a plurality of spaced parallel signal lines with each picture element electrically coupled to an associated signal line by a metal-insulator-metal device, comprising: a first substrate; a first metal film patterned to form a signal line and having a top planar surface and two opposite side-edge surfaces; a first insulating thin film formed on the top surface and two side-edge surfaces of the signal line; a second insulating thick film formed on the top planar surface of the first insulating thin film; a plurality of transparent liquid crystal driving electrode formed on the first substrate in a line adjacent to an associated signal line and spaced apart from each other and from the signal lines; a metal conductor formed on a portion of the side-edge surface of the second insulating thick film and the side-edge surface of the first insulating thin film and a portion of the substrate between the signal line and each liquid crystal driving electrode and a portion of the top of the liquid crystal driving electrode, whereby the metal-insulator-metal device is formed between the side-edge surface of the first metal film and the metal conductor.
Claim 10
Dependent Claim
214 words
A liquid crystal display device having a matrix of liquid crystal picture elements arranged in columns and rows with a column or row separated by a plurality of spaced parallel signal lines with each picture element electrically coupled to an associated signal line by a metal-insulator-metal device, comprising: a first substrate; a first metal film patterned to form a signal line and having a top planar surface and two opposite side-edge surfaces; a first insulating thin film formed on the top surface and two side-edge surfaces of the signal line; a second insulating thick film formed on the top planar surface of the first insulating thin film; a plurality of transparent liquid crystal driving electrode formed on the first substrate in a line adjacent to an associated signal line and spaced apart from each other and from the signal lines; a metal conductor formed on a portion of the side-edge surface of the second insulating thick film and the side-edge surface of the first insulating thin film and a portion of the substrate between the signal line and each liquid crystal driving electrode and a portion of the top of the liquid crystal driving electrode, whereby the metal-insulator-metal device is formed between the side-edge surface of the first metal film and the metal conductor.
Claim 11
Dependent Claim
22 words
The liquid crystal display device of claim 8, wherein the first insulating thin film is an oxide of the first metal film.
Claim 12
Dependent Claim
26 words
The liquid crystal display device of claim 9, wherein the first metal film is tantalum and the first insulating film is a tantalum oxide thin film.
Claim 13
Dependent Claim
14 words
The liquid crystal display device of claim 9, wherein the metal conductor is chromium.
Claim 14
Dependent Claim
42 words
The liquid crystal display device of claim 9, wherein the first metal film is tantalum and the second insulating film is selected from the group consisting of SiO 2 , Si 3 N 4 , Al 2 O 3 and organic insulators.
Claim 15
Dependent Claim
13 words
The liquid crystal display device of claim 8, wherein the substrate is transparent.
Claim 16
Dependent Claim
14 words
The liquid crystal display device of claim 13, wherein the first substrate is glass.
Claim 17
Dependent Claim
148 words
A process for preparing a metal-insulator-metal device on a substrate, comprising: providing a transparent substrate; forming a first metal film on the substrate and selectively patterning the film on the substrate to a pattern and having a top surface and at least two side-edge surfaces; forming a first insulating film on the top surface and at least a portion of the two side-edge surfaces of the first metal film; depositing a second insulating thick film on the top planar surface of the first insulating thin film; and forming a metal conductor on the side-edge surface of the first insulating thin film and second insulating thick film and a portion of the substrate and reducing the overlap portion of the conductor on the planar surface of the second insulating thick film for forming the metal-insulator-metal element between the side-edge surface of the first metal film and the metal conductor.
Claim 18
Dependent Claim
148 words
A process for preparing a metal-insulator-metal device on a substrate, comprising: providing a transparent substrate; forming a first metal film on the substrate and selectively patterning the film on the substrate to a pattern and having a top surface and at least two side-edge surfaces; forming a first insulating film on the top surface and at least a portion of the two side-edge surfaces of the first metal film; depositing a second insulating thick film on the top planar surface of the first insulating thin film; and forming a metal conductor on the side-edge surface of the first insulating thin film and second insulating thick film and a portion of the substrate and reducing the overlap portion of the conductor on the planar surface of the second insulating thick film for forming the metal-insulator-metal element between the side-edge surface of the first metal film and the metal conductor.
Claim 19
Dependent Claim
30 words
The process of claim 15, wherein the first metal film is a tantalum film and the first insulating film is a tantalum oxide formed by anodizing the first tantalum film.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-08-12 | 1989-02-11 | 1989-08-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-08-12 | 1993-02-11 | 1993-08-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-08-12 | 1997-02-11 | 1997-08-13 | $7700.00 | Window Closed / Lapsed |