US5187602A
Expired / Lapsed
US
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Liquid crystal display apparatus
Assignee: Toshiba Corp
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Filing: 1991-07-10
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Granted: 1993-02-16
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Expires: 2011-07-10
Abstract
Abstract An object is to provide an active matrix type liquid crystal display apparatus with a substrate for a liquid crystal driving semiconductor device which is free from point defects, rise of production costs, and shortcircuit in a storage capacitance portion. The liquid crystal display apparatus has a substrate for a liquid crystal driving semiconductor device with a display picture element group consisting of driving semiconductor devices 15 and storage capacitances, the display picture element group being disposed on one major surface of a transparent substrate 13, wherein the storage capacitance is formed by disposing an anodic oxide film 18 between a display electrode 16 and a storage capacitance metallic line 1b made of TaN, for example, and disposed on the one major surface of the transparent substrate 13.
Inventors
- 👤 Mitsushi Ikeda
- 👤 Michio Murooka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 14:54
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/136213; H; H10; H10D; H10D30/00; H10D30/60; H10D30/67; H10D30/6729; H10D30/673
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
116 words
A liquid crystal display apparatus comprising: a transparent substrate; driving thin film transistors disposed on said transparent substrate; display picture elements, each connected to a respective one of said driving thin film transistors; and storage capacitance devices, each connected in parallel with a corresponding one of said display picture elements, wherein each of said storage capacitance devices includes a storage capacitance metallic line made of a metal containing Ta and N, said storage capacitance metallic line being disposed on said transparent substrate, and a metal oxide film formed by anodically oxidizing the surface of said storage capacitance metallic line, and wherein the corresponding one of said display picture elements is disposed on said metal oxide film.
Claim 2
Dependent Claim
116 words
A liquid crystal display apparatus comprising: a transparent substrate; driving thin film transistors disposed on said transparent substrate; display picture elements, each connected to a respective one of said driving thin film transistors; and storage capacitance devices, each connected in parallel with a corresponding one of said display picture elements, wherein each of said storage capacitance devices includes a storage capacitance metallic line made of a metal containing Ta and N, said storage capacitance metallic line being disposed on said transparent substrate, and a metal oxide film formed by anodically oxidizing the surface of said storage capacitance metallic line, and wherein the corresponding one of said display picture elements is disposed on said metal oxide film.
Claim 3
Dependent Claim
39 words
The liquid crystal display apparatus as set forth in claim 1, wherein the metal containing Ta and N, contains at least one metal selected from a group of Ta--N, Mo--Ta--N, W--Ta--N, Nb--Ta--N, Al--W--Ta--N, Al--Nb--Ta--N, Ti--W--Ta--N, Ti--Nb--Ta--N, Zr--W--Ta--N, and Zr--Nb--Ta--N.
Claim 4
Dependent Claim
25 words
The liquid crystal display apparatus as set forth in claim 1, wherein the metal containing Ta and N is Ta 0 .8 N 0 .2.
Claim 5
Dependent Claim
25 words
The liquid crystal display apparatus as set forth in claim 1, wherein the metal containing Ta and N is Ta 0 .85 N 0 .15.
Claim 6
Dependent Claim
32 words
The liquid crystal display apparatus as set froth in claim 1, wherein the metal containing Ta and N is laminated with one or more layers of Ta--N, Nb--Ta--N, Ta--Mo--N, Ta--W--N, or Ta--Nb--N.
Claim 7
Dependent Claim
29 words
The liquid crystal display apparatus as set forth in claim 1, wherein the content of N of the metal containing Ta and N, is 45 atomic % or less.
Claim 8
Dependent Claim
38 words
The liquid crystal display apparatus as set forth in claim 1, wherein a metal layer selected from a group of Al, Cu, Au, and Pt is formed as a bottom layer of the metal containing Ta and N.
Claim 9
Dependent Claim
34 words
The liquid crystal display apparatus as set forth in claim 1, wherein said metal oxide film contains a metal selected from a group of Ta, Al, Mo--Ta, W--Ta, Nb--Ta, Al--W--Ta, Ti--W--Ta, Zr--W--Ta, and Zr--Nb--Ta.
Claim 10
Dependent Claim
20 words
The liquid crystal display apparatus as set forth in claim 8, wherein said metal oxide film is Ta--O or Ta--N--O.
Claim 11
Dependent Claim
27 words
The liquid crystal display apparatus as set forth in claim 8, wherein said metal oxide film is (Ta 0 .8 N 0 .2) x O Y .
Claim 12
Dependent Claim
35 words
The liquid crystal display apparatus as set forth in claim 1, wherein the metal containing Ta and N has a dielectric constant ε s and a resistivity ρ which satisfy the following relationship: ε.sub.s ×ρ≧1.9×10.sup.12.
Claim 13
Dependent Claim
146 words
A liquid crystal display apparatus comprising: a transparent substrate; driving thin film transistors disposed on said transparent substrate; a plurality of display picture elements, each display picture element being connected to and driven by a corresponding driving thin film transistor; and storage capacitance devices, each connected in parallel with a corresponding one of said plurality of display picture elements, wherein each of said storage capacitance devices includes a storage capacitance metallic line made of a metal containing Ta and N, said storage capacitance metallic line being disposed on said transparent substrate, and a metal oxide film formed by anodically oxidizing the surface of said storage capacitance metallic line, and wherein the corresponding display picture element is disposed on said metal oxide film, and wherein the metal containing Ta and N has a dielectric constant ε s and a resistivity ρ which satisfy the following relationship: εs×ρ>1.9×10.sup.12.
Claim 14
Dependent Claim
146 words
A liquid crystal display apparatus comprising: a transparent substrate; driving thin film transistors disposed on said transparent substrate; a plurality of display picture elements, each display picture element being connected to and driven by a corresponding driving thin film transistor; and storage capacitance devices, each connected in parallel with a corresponding one of said plurality of display picture elements, wherein each of said storage capacitance devices includes a storage capacitance metallic line made of a metal containing Ta and N, said storage capacitance metallic line being disposed on said transparent substrate, and a metal oxide film formed by anodically oxidizing the surface of said storage capacitance metallic line, and wherein the corresponding display picture element is disposed on said metal oxide film, and wherein the metal containing Ta and N has a dielectric constant ε s and a resistivity ρ which satisfy the following relationship: εs×ρ>1.9×10.sup.12.
Claim 15
Dependent Claim
22 words
The liquid crystal display apparatus as set forth in claim 12, wherein said metal oxide of a metal contains Ta and N.
Claim 16
Dependent Claim
134 words
A liquid crystal display apparatus comprising: a transparent substrate; driving thin film transistors disposed on said transparent substrate; display picture elements, each connected to a respective one of said driving thin film transistors; and storage capacitance devices, each connected in parallel with a corresponding one of said display picture elements, wherein each of said storage capacitance devices includes a storage capacitance metallic line made of metal layers containing Ta and N selected from Ta--N, Nb--Ta--N, Ta--Mo--N, and Ta--W--N, the metal layers laminating a Ta layer as an intermediate layer, said storage capacitance metallic line being disposed on said transparent substrate, and a metal oxide film formed by anodically oxidizing the surface of said storage capacitance metallic line, and wherein the corresponding one of said display picture elements is disposed on said metal oxide film.
Claim 17
Dependent Claim
134 words
A liquid crystal display apparatus comprising: a transparent substrate; driving thin film transistors disposed on said transparent substrate; display picture elements, each connected to a respective one of said driving thin film transistors; and storage capacitance devices, each connected in parallel with a corresponding one of said display picture elements, wherein each of said storage capacitance devices includes a storage capacitance metallic line made of metal layers containing Ta and N selected from Ta--N, Nb--Ta--N, Ta--Mo--N, and Ta--W--N, the metal layers laminating a Ta layer as an intermediate layer, said storage capacitance metallic line being disposed on said transparent substrate, and a metal oxide film formed by anodically oxidizing the surface of said storage capacitance metallic line, and wherein the corresponding one of said display picture elements is disposed on said metal oxide film.
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