US5128784A — Active matrix liquid crystal display device and m…

Claim 1

Independent Claim 201 words

An active matrix liquid crystal display device, comprising: (a) a first active substrate with a plurality of spaced apart row electrodes disposed on the first substrate; (b) a second substrate with a plurality of column electrodes disposed on a second opposed substrate spaced apart from the first substrate to form a space therebetween, wherein the column electrodes oppose the row electrodes and are perpendicular thereto with a plurality of picture elements arranged in a matrix-like pattern of columns and rows at the intersections of the electrodes; (c) a plurality of non-linear resistor switching elements, one disposed on one of the substrates adjacent to each picture element electrode and electrically connecting the picture element electrodes to the electrodes; and (d) a liquid crystal material located in the space between the first and second substrates; wherein the non-linear resistor switching elements are metal-insulator-metal two-terminal elements having an insulation layer disposed between two metal layers, the relative dielectric constant of the insulation layer is less than 30, and the capacitance C CF of the second substrate, the capacitance C LC of the liquid crystal material, and the capacitance C MIM of the metal-insulator-metal elements is governed by the relationship: C.sub.CF ×C.sub.LC /[(C.sub.CF +C.sub.LC)×C.sub.MIM ]>2.

Claim 2

Dependent Claim 201 words

An active matrix liquid crystal display device, comprising: (a) a first active substrate with a plurality of spaced apart row electrodes disposed on the first substrate; (b) a second substrate with a plurality of column electrodes disposed on a second opposed substrate spaced apart from the first substrate to form a space therebetween, wherein the column electrodes oppose the row electrodes and are perpendicular thereto with a plurality of picture elements arranged in a matrix-like pattern of columns and rows at the intersections of the electrodes; (c) a plurality of non-linear resistor switching elements, one disposed on one of the substrates adjacent to each picture element electrode and electrically connecting the picture element electrodes to the electrodes; and (d) a liquid crystal material located in the space between the first and second substrates; wherein the non-linear resistor switching elements are metal-insulator-metal two-terminal elements having an insulation layer disposed between two metal layers, the relative dielectric constant of the insulation layer is less than 30, and the capacitance C CF of the second substrate, the capacitance C LC of the liquid crystal material, and the capacitance C MIM of the metal-insulator-metal elements is governed by the relationship: C.sub.CF ×C.sub.LC /[(C.sub.CF +C.sub.LC)×C.sub.MIM ]>2.

Claim 3

Dependent Claim 40 words

The active matrix liquid crystal display device of claim 1, further including a color filter layer disposed on the column electrodes on the second substrate and wherein C CF is the same as the capacitance of the color filter layer.

Claim 4

Dependent Claim 50 words

The active matrix liquid crystal display device of claim 1, further including a color filter layer disposed on the second substrate, the column electrodes on the color filter layer, and wherein the C CF is the same as capacitance of the color filter layer which approaches a value of ∞.

Claim 5

Dependent Claim 35 words

The active matrix liquid crystal display device of claim 1, further including driving means for driving the active matrix liquid crystal display device in a normally black display mode or a normally white display mode.

Claim 6

Dependent Claim 25 words

The active matrix liquid crystal display device of claim 1, wherein the concentration of water in the liquid crystal material is less than 100 ppm.

Claim 7

Dependent Claim 41 words

The active matrix liquid crystal display device of claim 1, wherein the metal-insulator-metal two-terminal elements include a first metal layer on the substrate, an insulation layer formed on the first metal layer and a second metal layer on the insulating layer.

Claim 8

Dependent Claim 74 words

The active matrix liquid crystal display device of claim 6, wherein the first metal layer is Ta, the insulation layer is A-TaO x with x being any number which forms a stable oxide of Ta, and A is at least one additional component which is capable of lowering the relative dielectric constant of the insulation layer to less than the relative dielectric constant of TaO x , and the second metal layer is Cr.

Claim 9

Dependent Claim 21 words

The active matrix liquid crystal display device of claim 7, wherein the relative dielectric constant of the insulation layer is ≦22.

Claim 10

Dependent Claim 21 words

The active matrix liquid crystal display device of claim 7, wherein the relative dielectric constant of the insulation layer is ≦10.

Claim 11

Dependent Claim 22 words

The active matrix liquid crystal display device of claim 7, wherein the additional component in the insulation layer is N or Si.

Claim 12

Dependent Claim 22 words

The active matrix liquid crystal display device of claim 10, wherein the insulating layer further includes an oxidated Ta and N derivative.

Claim 13

Dependent Claim 26 words

The active matrix liquid crystal display device of claim 7, wherein the additional component in the insulation layer is an oxide, nitride or oxynitride of Ta.

Claim 14

Dependent Claim 22 words

The active matrix liquid crystal display device of claim 7, wherein the crystal structure of the Ta first metal layer is α-Ta.

Claim 15

Dependent Claim 26 words

The active matrix liquid crystal display device of claim 7, wherein the additional component is N in a molar concentration of between about 5 and 25%.

Claim 16

Dependent Claim 46 words

The active matrix liquid crystal display device of claim 7, wherein each picture element electrode at the intersection of the row and column electrodes is divided into at least sections, and wherein a metal-insulator-metal two-terminal element couples each picture element electrode section to the line electrode.

Claim 17

Dependent Claim 26 words

The active matrix liquid crystal display device of claim 15, wherein the additional component in the insulation layer of the metal-insulator-metal element is N or Si.

Claim 18

Dependent Claim 28 words

The active matrix liquid crystal display device of claim 7, wherein the Ta first metal layer includes nitrogen at a molar concentration of between about 5 and 45%.

Claim 19

Dependent Claim 29 words

The active matrix liquid crystal display device of claim 17, wherein the crystal structure of the Ta first metal layer is a mixture of α-Ta and Ta 2 N.

Claim 20

Dependent Claim 26 words

The active matrix liquid crystal display device of claim 17, wherein the specific resistivity of the Ta first metal layer is between 60 and 300 μohm·cm.

Claim 21

Dependent Claim 34 words

The active matrix liquid crystal display device of claim 6, including an insulation film of oxide, nitride or oxynitride formed on the first active substrate, the metal-insulator-metal two-terminal element formed on the insulation film.

Claim 22

Dependent Claim 21 words

The active matrix liquid crystal display device of claim 20, wherein the oxynitride film formed on the substrate is Ta oxynitride.

Claim 23

Dependent Claim 82 words

A metal-insulator-metal element in an active matrix substrate, comprising: a substrate; an insulating underlying film including N-TaO x on the substrate, wherein x is any number such that TaO x is a stable oxide of Ta; a first metal film of one of Ta and N-Ta on the underlying film; an element insulation layer on the first metal film, the insulation layer including N-TaO x having 5 to 25 atomic % N; and a second metal film on the element insulation layer.

Claim 24

Dependent Claim 82 words

A metal-insulator-metal element in an active matrix substrate, comprising: a substrate; an insulating underlying film including N-TaO x on the substrate, wherein x is any number such that TaO x is a stable oxide of Ta; a first metal film of one of Ta and N-Ta on the underlying film; an element insulation layer on the first metal film, the insulation layer including N-TaO x having 5 to 25 atomic % N; and a second metal film on the element insulation layer.

Claim 25

Dependent Claim 21 words

The metal-insulator-metal element of claim 22, wherein the first metal film includes N-Ta including about 5 to 45 atomic percent N.

Claim 26

Dependent Claim 13 words

The metal-insulator-metal element of claim 23, wherein the second metal film includes Cr.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1995-07-07	1996-01-06	1996-07-07	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1999-07-07	2000-01-06	2000-07-07	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2003-07-07	2004-01-06	2004-07-07	$7700.00	Window Closed / Lapsed

Active matrix liquid crystal display device and method for production thereof

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