Patent US5273616A successfully refreshed from Google Patents.
US5273616A
Expired / Lapsed
US
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Method of producing sheets of crystalline material and devices made therefrom
Assignee: Massachusetts Institute of Technology
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Filing: 1992-03-24
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Granted: 1993-12-28
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Expires: 2012-03-24
Abstract
Abstract A method of producing sheets of crystalline material is disclosed, as well as devices employing such sheets. In the method, a growth mask is formed upon a substrate and crystalline material is grown at areas of the substrate exposed through the mask and laterally over the surface of the mask to form a sheet of crystalline material. This sheet is optionally separated so that the substrate can be reused. The method has particular importance in forming sheets of crystalline semiconductor material for use in solid state devices.
Inventors
- 👤 Carl O. Bozler
- 👤 John C. C. Fan
- 👤 Robert W. McClelland
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 22:29
CPC Classifications
H; H10; H10F; H10F10/00; H10F10/10; H10F10/14; H10F10/142; C; C30; C30B; C30B25/00; C30B25/02; C30B25/04; C30B29/00; C30B29/60; C30B33/00; H10P; H10P14/00; H10P14/20; H10P14/27; H10P14/271; H10P14/276; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/2907; H10P14/2911; H10P14/2922; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/3414; H10P14/3418; H10P14/3421; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10P90/1914; H01; H01S; H01S5/00; H01S5/02; H01S5/0206; H01S5/0207; H01S5/0217; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/544; Y10; Y10S; Y10S117/00; Y10S117/915
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
160 words
A method of producing a sheet of crystalline material comprising the combination of steps of forming a mask on a crystallization substrate including a layer of a first material and a carbon containing layer of a second material that are heated to volatilize components of the carbon containing layer, the mask being subsequently partially removed to provide areas of said substrate which are exposed through the mask, removing any remaining material of the carbon containing layer, depositing a semiconductor material on the exposed areas, laterally forming a crystalline sheet of material over said mask, attaching a second substrate to the crystalline sheet and separating the second substrate and the sheet of crystalline material from the substrate, the mask being formed to have significantly better adhesion to the crystallization substrate than to the crystalline sheet formed thereon, or alternatively, the mask being formed such that the second substrate, the sheet of crystalline material and the mask are separated from the substrate.
Claim 2
Independent Claim
160 words
A method of producing a sheet of crystalline material comprising the combination of steps of forming a mask on a crystallization substrate including a layer of a first material and a carbon containing layer of a second material that are heated to volatilize components of the carbon containing layer, the mask being subsequently partially removed to provide areas of said substrate which are exposed through the mask, removing any remaining material of the carbon containing layer, depositing a semiconductor material on the exposed areas, laterally forming a crystalline sheet of material over said mask, attaching a second substrate to the crystalline sheet and separating the second substrate and the sheet of crystalline material from the substrate, the mask being formed to have significantly better adhesion to the crystallization substrate than to the crystalline sheet formed thereon, or alternatively, the mask being formed such that the second substrate, the sheet of crystalline material and the mask are separated from the substrate.
Claim 3
Dependent Claim
25 words
The method according to claim 1 wherein the crystalline film is separated from the substrate leaving a substantially complete growth mask retained on said substrate.
Claim 4
Dependent Claim
24 words
The method according to claim 2 wherein an adhesion-promoting layer is applied to the crystallization substrate prior to forming the crystal growth mask thereon.
Claim 5
Dependent Claim
22 words
The method according to claim 3 wherein areas of the substrate are exposed through both the adhesion-promoting layer and the growth mask.
Claim 6
Dependent Claim
30 words
The method according to claim 4 wherein the adhesion-promoting layer is etched underneath openings in the crystal growth mask to expose the substrate prior to deposition of the crystalline material.
Claim 7
Dependent Claim
26 words
The method according to claim 1 wherein the substrate is oriented to provide a natural cleavage plane between its surface and the crystalline sheet formed thereon.
Claim 8
Dependent Claim
37 words
The method according to claim 1 wherein a carbon-containing photo-resist is applied to the substrate and baked in air partially to oxidize and volatilize components of the photo-resist to leave a mask of carbon on the substrate.
Claim 9
Dependent Claim
22 words
A method according to claim 1 including an additional step of fabricating a device in or from the sheet of crystalline material.
Claim 10
Dependent Claim
29 words
A method according to claim 1 wherein the crystalline material is deposited in the presence of selected impurity dopants to form layers of different conductivity type in the sheet.
Claim 11
Dependent Claim
41 words
A method according to claim 1 wherein plural sheets of crystalline material are formed and are bonded together by an electrically insulating or electrically conducting layer to form a device in which the sheets are electrically decoupled or electrically connected, respectively.
Claim 12
Dependent Claim
59 words
The method of producing a sheet of crystalline material of claim 1 wherein the substrate or the crystal growth mask is formed to provide significantly weakened bonding of atoms of the crystalline material thereto to facilitate separation of the sheet of crystalline material from the substrate along a desired plane and thereby minimize wandering of the plane of separation.
Claim 13
Dependent Claim
39 words
The method according to claim 11 wherein the crystal growth mask or the substrate is provided with a surface configuration which encourages the development of voids between the growing sheet of crystalline material and the mask or the substrate.
Claim 14
Dependent Claim
26 words
The method according to claim 12 wherein the crystal growth mask is formed from a material which promotes the creation of voids under the crystalline sheet.
Claim 15
Dependent Claim
40 words
The method according to claim 12 wherein the crystal growth mask is formed on the substrate scalloping the surface of the substrate and the growth mask is formed so as to cover the scalloped surface except for the peaks thereof.
Claim 16
Dependent Claim
14 words
The method according to claim 11 wherein the growth mask is formed of carbon.
Claim 17
Dependent Claim
22 words
The method according to claim 11 wherein the growth mask is formed from a powdery film such as fine grained silica powder.
Claim 18
Dependent Claim
62 words
The method according to claim 6 wherein the mask comprises silica powder and is formed by adding finely divided fused silica to a photo-resist, applying the silica-containing photo-resist to the substrate by photo-lithographic procedures and baking the photo-resist at an elevated temperature sufficient to burn away the photo-resist and leave a growth mask containing of fused silica powder adhered to the substrate.
Claim 19
Dependent Claim
15 words
The method according to claim 13 wherein the growth mask is made of fritted glass.
Claim 20
Dependent Claim
22 words
The method according to claim 11 including the additional step of fabricating a device in or from the sheet of crystalline material.
Claim 21
Independent Claim
131 words
A method of producing thin films of crystalline material comprising the steps of: forming a mask on a crystalline substrate including a silicon dioxide layer and a carbon containing layer; heating the mask to volatilize components of the carbon containing layer to leave a carbon layer over the crystalline substrate; partially removing the mask to expose an area of the crystalline substrate; removing the remaining carbon layer; forming a thin film of single crystal semiconductor material over the mask such that the mask preferentially adheres to the crystalline substrate or the single crystal semiconductor material; providing a second substrate that is attached to the thin film of semiconductor material; and separating the second substrate, the thin film of single crystal semiconductor material and the silicon dioxide layer from the crystalline substrate.
Claim 22
Independent Claim
131 words
A method of producing thin films of crystalline material comprising the steps of: forming a mask on a crystalline substrate including a silicon dioxide layer and a carbon containing layer; heating the mask to volatilize components of the carbon containing layer to leave a carbon layer over the crystalline substrate; partially removing the mask to expose an area of the crystalline substrate; removing the remaining carbon layer; forming a thin film of single crystal semiconductor material over the mask such that the mask preferentially adheres to the crystalline substrate or the single crystal semiconductor material; providing a second substrate that is attached to the thin film of semiconductor material; and separating the second substrate, the thin film of single crystal semiconductor material and the silicon dioxide layer from the crystalline substrate.
Claim 23
Dependent Claim
22 words
The method of claim 20 wherein the mask forming step further comprises forming a carbon containing photoresist layer on the crystallization substrate.
Claim 24
Dependent Claim
31 words
The method of claim 20 wherein the separating step comprises introducing an etchant to remove material and thereby to separate the thin film of single crystal semiconductor material from the substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-12-27 | 1997-06-28 | 1997-12-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-12-27 | 2001-06-28 | 2001-12-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-12-27 | 2005-06-28 | 2005-12-28 | $7700.00 | Window Closed / Lapsed |