US5246526A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Surface treatment apparatus
Assignee: Hitachi Ltd
•
Filing: 1992-07-02
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Granted: 1993-09-21
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Expires: 2012-07-02
Abstract
Abstract In a surface treatment apparatus, an organic substance is removed through ashing by ultraviolet rays and ozone at atmospheric pressure. A transparent partition plate is provided in closely spaced, opposed relation to a material to be treated, and at least one gas outlet is open to that surface of the partition plate opposed to the material to be treated. With this arrangement, the gas can be directly collected via the gas outlet during the treatment, and the end point of the organic substance removal treatment can be detected by analyzing the collected gas.
Inventors
- 👤 Sumio Yamaguchi
- 👤 Akio Inada
- 👤 Kenichi Kawasumi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:08
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0432; H10P72/0402; H10P72/0406
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
174 words
An apparatus for removing an organic substance from a substance to be treated, comprising: stage means for supporting a substrate to be treated, said substrate having an organic substance on one side thereof; partition plate means for forming a space of a predetermined distance between said partition plate means and said stage means; means for supplying to said space a gas containing ozone; a treatment chamber having said stage means and said partition plate means located therein, said treatment chamber being internally exposed to atmospheric pressure; means for discharging production gas from said space from a relatively outer periphery thereof, the production gas being produced in said space by reaction of the ozone of the ozone-containing gas with the organic substance; and means for detecting a substantial end point of organic substance removal based upon concentration of the production gas, said detecting means including means for collecting production gas removed from said space at an inner portion thereof relative to said outer periphery, and means for detecting and concentration of the collected production gas.
Claim 2
Independent Claim
174 words
An apparatus for removing an organic substance from a substance to be treated, comprising: stage means for supporting a substrate to be treated, said substrate having an organic substance on one side thereof; partition plate means for forming a space of a predetermined distance between said partition plate means and said stage means; means for supplying to said space a gas containing ozone; a treatment chamber having said stage means and said partition plate means located therein, said treatment chamber being internally exposed to atmospheric pressure; means for discharging production gas from said space from a relatively outer periphery thereof, the production gas being produced in said space by reaction of the ozone of the ozone-containing gas with the organic substance; and means for detecting a substantial end point of organic substance removal based upon concentration of the production gas, said detecting means including means for collecting production gas removed from said space at an inner portion thereof relative to said outer periphery, and means for detecting and concentration of the collected production gas.
Claim 3
Dependent Claim
33 words
The apparatus according to claim 1, further comprising an ultraviolet ray source provided opposite to said stage means with said partition plate means interposed between said ultraviolet ray source and said stage means.
Claim 4
Dependent Claim
17 words
The apparatus according to claim 2, wherein said ultraviolet ray source comprises at least one ultraviolet lamp.
Claim 5
Dependent Claim
21 words
The apparatus according to claim 1, further comprising means provided in said stage means for heating the material to be treated.
Claim 6
Dependent Claim
30 words
The apparatus according to claim 4, wherein said heating means includes means for controlling heating to the material to be treated within a range of 150° C. to 300° C.
Claim 7
Dependent Claim
33 words
The apparatus according to claim 1, wherein said production gas concentration detecting means comprises means for detecting decrement of concentration of CO 2 in the production gas to less than a predetermined level.
Claim 8
Dependent Claim
35 words
The apparatus according to claim 1, wherein said end point detecting means includes at least one pipe through which the production gas in said space is collected and introduced to said gas concentration detecting means.
Claim 9
Dependent Claim
21 words
The apparatus according to claim 7, further comprising means provided in said pipe for controlling flow rate of the production gas.
Claim 10
Dependent Claim
19 words
The apparatus according to claim 1, wherein the predetermined distance is less than or equal to substantially 0.5 mm.
Claim 11
Dependent Claim
37 words
The apparatus according to claim 1, wherein said treatment chamber is a non-airtight structure for allowing ambient air to enter said treatment chamber from outside the treatment chamber during reaction of the ozone with the organic substance.
Claim 12
Dependent Claim
15 words
The apparatus according to claim 1, wherein said partition plate means includes a quartz material.
Claim 13
Dependent Claim
16 words
The apparatus according to claim 1, wherein said gas supplying means comprises at least one pipe.
Claim 14
Dependent Claim
21 words
The apparatus according to claim 12, further comprising means provided in said pipe for controlling flow rate of the reactive gas.
Claim 15
Independent Claim
179 words
An apparatus for removing an organic substance from a substance to be treated, comprising: stage means for supporting a substrate to be treated, said substrate having an organic substance on one side thereof; partition plate means for forming a space of a predetermined distance between said partition plate means and said stage means; means for supplying to said space a gas containing ozone; means for discharging production gas from said space from a relatively outer periphery thereof, the production gas being produced in said space by reaction of the ozone of the ozone-containing gas with the organic substance; and means for detecting a substantial end point of organic substance removal based upon concentration of the production gas, said detecting means including means for collecting production gas removed from said space at an inner portion thereof relative to said outer periphery, and means for detecting and concentration of the collected production gas, said end point detecting means being arranged to receive the production gas out of said space from at least one upper portion thereof separately from said discharging means.
Claim 16
Independent Claim
179 words
An apparatus for removing an organic substance from a substance to be treated, comprising: stage means for supporting a substrate to be treated, said substrate having an organic substance on one side thereof; partition plate means for forming a space of a predetermined distance between said partition plate means and said stage means; means for supplying to said space a gas containing ozone; means for discharging production gas from said space from a relatively outer periphery thereof, the production gas being produced in said space by reaction of the ozone of the ozone-containing gas with the organic substance; and means for detecting a substantial end point of organic substance removal based upon concentration of the production gas, said detecting means including means for collecting production gas removed from said space at an inner portion thereof relative to said outer periphery, and means for detecting and concentration of the collected production gas, said end point detecting means being arranged to receive the production gas out of said space from at least one upper portion thereof separately from said discharging means.
Claim 17
Dependent Claim
33 words
The apparatus according to claim 14, further comprising an ultraviolet ray source provided opposite to said stage means with said partition plate means interposed between said ultraviolet ray source and said stage means.
Claim 18
Dependent Claim
17 words
The apparatus according to claim 15, wherein said ultraviolet ray source comprises at least one ultraviolet lamp.
Claim 19
Dependent Claim
16 words
The apparatus according to claim 14, wherein said gas supplying means comprises at least one pipe.
Claim 20
Dependent Claim
21 words
The apparatus according to claim 17, further comprising means provided in said pipe for controlling flow rate of the reactive gas.
Claim 21
Dependent Claim
32 words
The apparatus according to claim 14, wherein said gas concentration detecting means comprises means for detecting decrement of concentration of CO 2 in the production gas to less than a predetermined level.
Claim 22
Dependent Claim
15 words
The apparatus according to claim 14, wherein said partition plate means includes a quartz material.
Claim 23
Dependent Claim
18 words
The apparatus according to claim 14, wherein the predetermined distance is less than or equal to 0.5 mm.
Claim 24
Dependent Claim
27 words
The apparatus according to claim 14, wherein said end point detecting means includes at least one pipe through which the production gas in said space is received.
Claim 25
Dependent Claim
21 words
The apparatus according to claim 22, further comprising means provided in said pipe for controlling flow rate of the production gas.
Claim 26
Dependent Claim
21 words
The apparatus according to claim 14, further comprising means provided in said stage means for heating the material to be treated.
Claim 27
Dependent Claim
30 words
The apparatus according to claim 24, wherein said heating means includes means for controlling heating of the material to be treated within a range of 150° C. to 300° C.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-09-20 | 1997-03-22 | 1997-09-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-09-20 | 2001-03-22 | 2001-09-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-09-20 | 2005-03-22 | 2005-09-21 | $7700.00 | Window Closed / Lapsed |