US4936940A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Equipment for surface treatment
Assignee: Hitachi Ltd
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Filing: 1989-10-26
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Granted: 1990-06-26
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Expires: 2009-10-26
Abstract
Abstract An equipment for surface treatment according to the present invention comprises a chamber capable of exhausting gas, a revolving stage disposed in said chamber for placing a material to be treated thereon, a quartz plate serving as a gap controlling means spaced from the material to be treated such that a gap between said revolving stage and said material to be treated is provided not to exceed 0.5 mm for forming a space of treatment, the quartz plate being provided with a gas supplying means for supplying a reactive gas containing oxygen into the space of treatment, and a gas exciting means provided on the a side of said quartz plate opposite that on which the material to be treated is located for exciting the oxygen contained in said reactive gas into metastable oxygen atoms.
Inventors
- 👤 Ken-ichi Kawasumi
- 👤 Akio Funagoshi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:10
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; B; B08; B08B; B08B7/00; B08B7/0035; H10P72/0431; H10P72/70; H10P72/76; H10P72/7604; H10P72/7618
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
146 words
An equipment for surface treatment which comprises a chamber capable of exhausting gas, a revolving stage having an axis of revolution disposed in said chamber for placing a material to be treated thereon, a quartz plate spaced from said material provided on said revolving stage such that a gap between said quartz plate and said material to be treated is provided not to exceed 0.5 mm for forming a space of treatment, said quartz plate being provided with gas supplying means which is spaced a predetermined distance from said axis of revolution of said revolving stage for supplying a reactive gas containing oxygen into the space of treatment, and a gas exciting means provided on a side of said quartz plate opposite the side on which said material to be treated is located for exciting the oxygen contained in said reactive gas into metastable oxygen atoms.
Claim 2
Dependent Claim
146 words
An equipment for surface treatment which comprises a chamber capable of exhausting gas, a revolving stage having an axis of revolution disposed in said chamber for placing a material to be treated thereon, a quartz plate spaced from said material provided on said revolving stage such that a gap between said quartz plate and said material to be treated is provided not to exceed 0.5 mm for forming a space of treatment, said quartz plate being provided with gas supplying means which is spaced a predetermined distance from said axis of revolution of said revolving stage for supplying a reactive gas containing oxygen into the space of treatment, and a gas exciting means provided on a side of said quartz plate opposite the side on which said material to be treated is located for exciting the oxygen contained in said reactive gas into metastable oxygen atoms.
Claim 3
Dependent Claim
27 words
An equipment for surface treatment according to claim 1, wherein said gas exciting means is at least one selected from a heat source and a light source.
Claim 4
Dependent Claim
16 words
An equipment for surface treatment according to claim 1, wherein said revolving stage involves a heater.
Claim 5
Dependent Claim
15 words
An equipment for surface treatment according to claim 1, wherein said reactive gas contains ozone.
Claim 6
Dependent Claim
19 words
An equipment for surface treatment according to claim 1, wherein said gas exciting means is an ultraviolet ray source.
Claim 7
Dependent Claim
137 words
An equipment for surface treatment which comprises a chamber capable of exhausting gas, a revolving stage having an axis of revolution disposed in said chamber and or placing a material to be treated thereon, a quartz plate spaced from said material to be treated such that a gap between said revolving stage and said material to be treated is provided not to exceed 0.5 mm for forming a space of treatment, said quartz plate being provided with gas supplying means which is spaced a predetermined distance from said axis of revolution of said revolving stage for supplying a reactive gas containing ozone into the space of treatment, and an ultraviolet ray source provided on a side of said quartz plate opposite the side on which said material to be treated is located for exciting said reactive gas.
Claim 8
Dependent Claim
137 words
An equipment for surface treatment which comprises a chamber capable of exhausting gas, a revolving stage having an axis of revolution disposed in said chamber and or placing a material to be treated thereon, a quartz plate spaced from said material to be treated such that a gap between said revolving stage and said material to be treated is provided not to exceed 0.5 mm for forming a space of treatment, said quartz plate being provided with gas supplying means which is spaced a predetermined distance from said axis of revolution of said revolving stage for supplying a reactive gas containing ozone into the space of treatment, and an ultraviolet ray source provided on a side of said quartz plate opposite the side on which said material to be treated is located for exciting said reactive gas.
Claim 9
Dependent Claim
16 words
An equipment for surface treatment according to claim 6, wherein said revolving stage involves a heater.
Claim 10
Dependent Claim
18 words
An equipment for surface treatment according to claim 2, wherein said gas exciting means is a heat source.
Claim 11
Dependent Claim
18 words
An equipment for surface treatment according to claim 2, wherein said gas exciting means is a light source.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-06-25 | 1993-12-25 | 1994-06-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-06-25 | 1997-12-25 | 1998-06-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-06-25 | 2001-12-25 | 2002-06-26 | $7700.00 | Window Closed / Lapsed |