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US5230184A
Expired / Lapsed
US
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Distributed polishing head
Assignee: NXP USA Inc
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Filing: 1991-07-05
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Granted: 1993-07-27
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Expires: 2011-07-05
Abstract
Abstract A distributed polishing head assembly (17) has a flexible membrane (14), and a plurality of periodic polishing pads (12) that are attached to the flexible membrane (14). The polishing pads (12) are made from a flat semiconductor wafer that has been sawed into small pieces. The polishing head is rubbed against a semiconductor wafer (10) in order to planarize the wafer (10).
Inventors
- 👤 Yefim Bukhman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 09:39
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/11; B24B37/27; B24B37/30; B24B41/00; B24B41/06; B24B41/068
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
71 words
A distributed polishing head comprising: a flexible membrane; a plurality of flat polishing pads that are attached to the flexible membrane; and a pressurized cavity, wherein the flexible membrane attaches and detaches from the pressurized cavity by applying a negative and a positive pressure, respectively, at peripheral edges of the flexible membrane, and wherein the flexible membrane extends across the pressurized cavity with the polishing pads facing away from the cavity.
Claim 2
Dependent Claim
71 words
A distributed polishing head comprising: a flexible membrane; a plurality of flat polishing pads that are attached to the flexible membrane; and a pressurized cavity, wherein the flexible membrane attaches and detaches from the pressurized cavity by applying a negative and a positive pressure, respectively, at peripheral edges of the flexible membrane, and wherein the flexible membrane extends across the pressurized cavity with the polishing pads facing away from the cavity.
Claim 3
Dependent Claim
17 words
The distributed polishing head of claim 1 wherein the plurality of polishing pads are comprised of silicon.
Claim 4
Dependent Claim
23 words
The distributed polishing head of claim 1 wherein the plurality of polishing pads are coated with a selected material having a characteristic hardness.
Claim 5
Dependent Claim
133 words
A distributed polishing head comprising: an edge ring; a flexible membrane, wherein the flexible membrane stretches across the edge ring, thus supplying support to the flexible membrane along peripheral edges where the flexible membrane and the edge ring meet; a plurality of flat silicon polishing pads, each sized approximately to an individual VLSI die that is to be polished and, wherein the plurality of silicon pads are attached to the flexible membrane; and a means to distribute equal pressure across the flexible membrane, thereby distributing the equal pressure to each of the plurality of flat silicon polishing pads attached on the flexible membrane, wherein the flexible membrane attaches and detaches from the means to distribute equal pressure by applying a negative and a positive pressure, respectively, at peripheral edges of the flexible membrane.
Claim 6
Dependent Claim
133 words
A distributed polishing head comprising: an edge ring; a flexible membrane, wherein the flexible membrane stretches across the edge ring, thus supplying support to the flexible membrane along peripheral edges where the flexible membrane and the edge ring meet; a plurality of flat silicon polishing pads, each sized approximately to an individual VLSI die that is to be polished and, wherein the plurality of silicon pads are attached to the flexible membrane; and a means to distribute equal pressure across the flexible membrane, thereby distributing the equal pressure to each of the plurality of flat silicon polishing pads attached on the flexible membrane, wherein the flexible membrane attaches and detaches from the means to distribute equal pressure by applying a negative and a positive pressure, respectively, at peripheral edges of the flexible membrane.
Claim 7
Dependent Claim
15 words
The distributed polishing head of claim 4 wherein the flexible membrane is an organic membrane.
Claim 8
Dependent Claim
28 words
The distributed polishing head of claim 4 further comprising having the flat polishing pads coated with a material that is selected from the group comprising diamond or nitride.
Claim 9
Dependent Claim
132 words
A distributed polishing head assembly for planarizing a semiconductor substrate comprising: an edge ring; a flexible membrane; a multitude of silicon flat polishing pads made from a flat silicon wafer that are attached to the flexible membrane; a means to deliver equal pressure to each individual silicon flat polishing pad across the flexible membrane; a substrate chuck having a semiconductor substrate with a multitude of VLSI dies placed and held on the substrate chuck, whereby the multitude of VLSI dies and the multitude of silicon flat polishing pads are pressed together so that the multitude of VLSI dies and the multitude of flat polishing pads are in contact; and a means for providing motion to the substrate that is held on the substrate chuck against the multitude of silicon flat polishing pads.
Claim 10
Dependent Claim
132 words
A distributed polishing head assembly for planarizing a semiconductor substrate comprising: an edge ring; a flexible membrane; a multitude of silicon flat polishing pads made from a flat silicon wafer that are attached to the flexible membrane; a means to deliver equal pressure to each individual silicon flat polishing pad across the flexible membrane; a substrate chuck having a semiconductor substrate with a multitude of VLSI dies placed and held on the substrate chuck, whereby the multitude of VLSI dies and the multitude of silicon flat polishing pads are pressed together so that the multitude of VLSI dies and the multitude of flat polishing pads are in contact; and a means for providing motion to the substrate that is held on the substrate chuck against the multitude of silicon flat polishing pads.
Claim 11
Dependent Claim
13 words
A distributed polishing head assembly of claim 7 wherein the motion is vertical.
Claim 12
Dependent Claim
13 words
A distributed polishing head assembly of claim 7 wherein the motion is horizontal.
Claim 13
Dependent Claim
13 words
A distributed polishing head assembly of claim 7 wherein the motion is rotational.
Claim 14
Dependent Claim
13 words
A distributed polishing head assembly of claim 7 wherein the motion is vibrational.
Claim 15
Dependent Claim
124 words
A distributed polishing head assembly for planarizing a semiconductor substrate comprising: a flexible membrane; a multitude of silicon polishing pads made from a flat silicon wafer that are attached to the flexible membrane; a means to deliver equal pressure to each individual polishing pad across the flexible membrane; a substrate chuck having a semiconductor substrate with a multitude of dies placed and held on the substrate chuck, whereby the multitude of dies and the multitude of polishing pads are pressed together so that the multitude of dies contacts the multitude of polishing pads; and a means for providing motion to the substrate that is held on the substrate chuck against the multitude of silicon polishing pads, wherein the individual silicon polishing pad is grooved.
Claim 16
Dependent Claim
124 words
A distributed polishing head assembly for planarizing a semiconductor substrate comprising: a flexible membrane; a multitude of silicon polishing pads made from a flat silicon wafer that are attached to the flexible membrane; a means to deliver equal pressure to each individual polishing pad across the flexible membrane; a substrate chuck having a semiconductor substrate with a multitude of dies placed and held on the substrate chuck, whereby the multitude of dies and the multitude of polishing pads are pressed together so that the multitude of dies contacts the multitude of polishing pads; and a means for providing motion to the substrate that is held on the substrate chuck against the multitude of silicon polishing pads, wherein the individual silicon polishing pad is grooved.
Claim 17
Independent Claim
142 words
A method for planarizing a semiconductor substrate comprising: providing a semiconductor substrate having a plurality of VLSI dies that are delineated by scribe grids, the plurality of VLSI dies further including features on each of the plurality of VLSI dies; providing a distributed polishing head with a plurality of flat polishing pads in which each of the plurality of flat polishing pads are sized on approximately each of the plurality of VLSI dies; pressing the plurality of VLSI dies and the plurality of flat polishing pads together in such a manner that features associated with an individual VLSI dies are in contact with an individual flat polishing pad, thereby providing individual polishing pads for each individual VLSI dies; and rubbing features associated with the individual VLSI dies and the individual flat polishing pad together, thereby planarizing features on the individual VLSI dies.
Claim 18
Independent Claim
142 words
A method for planarizing a semiconductor substrate comprising: providing a semiconductor substrate having a plurality of VLSI dies that are delineated by scribe grids, the plurality of VLSI dies further including features on each of the plurality of VLSI dies; providing a distributed polishing head with a plurality of flat polishing pads in which each of the plurality of flat polishing pads are sized on approximately each of the plurality of VLSI dies; pressing the plurality of VLSI dies and the plurality of flat polishing pads together in such a manner that features associated with an individual VLSI dies are in contact with an individual flat polishing pad, thereby providing individual polishing pads for each individual VLSI dies; and rubbing features associated with the individual VLSI dies and the individual flat polishing pad together, thereby planarizing features on the individual VLSI dies.
Claim 19
Dependent Claim
20 words
The method of claim 13 further comprising rubbing the substrate and plurality of polishing pads together by a vibrational means.
Claim 20
Independent Claim
219 words
A method for globally planarizing a semiconductor wafer comprising: providing a semiconductor wafer with a surface having a plurality of dies that are delineated by scribe grids, the plurality of dies further including features on each of the plurality of dies, the surface of the semiconductor wafer being non-planar, thus making the plurality of dies on the surface of the semiconductor wafer non-planar; providing a vacuum chuck and placing the semiconductor wafer on the vacuum chuck; providing a distributed polishing head with a plurality of flat polishing pads in which each of the plurality of flat polishing pads are sized approximately to each of the plurality of dies; pressing the plurality of dies on the semiconductor wafer and the plurality of flat polishing pads of the distributed polishing head together, so that features associated with an individual die are in contact with an individual flat polishing pad which allows each individual flat polishing pad to conform to a top surface of features on each individual die in which the semiconductor wafer is non-planar; and rubbing the plurality of polishing pads and the semiconductor wafer together that are conformed to the top surface of features on each individual die, thereby planarizing each individual die on the non-planar surface of the semiconductor wafer to produce global planarization across the semiconductor wafer.
Claim 21
Independent Claim
219 words
A method for globally planarizing a semiconductor wafer comprising: providing a semiconductor wafer with a surface having a plurality of dies that are delineated by scribe grids, the plurality of dies further including features on each of the plurality of dies, the surface of the semiconductor wafer being non-planar, thus making the plurality of dies on the surface of the semiconductor wafer non-planar; providing a vacuum chuck and placing the semiconductor wafer on the vacuum chuck; providing a distributed polishing head with a plurality of flat polishing pads in which each of the plurality of flat polishing pads are sized approximately to each of the plurality of dies; pressing the plurality of dies on the semiconductor wafer and the plurality of flat polishing pads of the distributed polishing head together, so that features associated with an individual die are in contact with an individual flat polishing pad which allows each individual flat polishing pad to conform to a top surface of features on each individual die in which the semiconductor wafer is non-planar; and rubbing the plurality of polishing pads and the semiconductor wafer together that are conformed to the top surface of features on each individual die, thereby planarizing each individual die on the non-planar surface of the semiconductor wafer to produce global planarization across the semiconductor wafer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-26 | 1997-01-25 | 1997-07-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-26 | 2001-01-25 | 2001-07-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-26 | 2005-01-25 | 2005-07-27 | $7700.00 | Window Closed / Lapsed |