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US5207865A
Expired / Lapsed
US
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Multilayer structure and method for fabricating the same
Assignee: Fujitsu Ltd
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Filing: 1991-03-08
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Granted: 1993-05-04
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Expires: 2011-03-08
Abstract
Abstract A multilayer structure is fabricated by forming a conductive layer on an insulative substrate. A first conductive pattern is formed on the first conductive layer and a resist layer having a via hole therethrough is formed on the first pattern. A via lead is formed in the via hole by electrically plating a metal therein utilizing the first layer as a lead for the plating process. The resist and the exposed part of the first layer ar removed and a polyimide layer having a thermal expansion coefficient that is equal to that of the via lead is formed over the substrate. The surface of the polyimide layer is etched until the via lead top segment protrudes to a predetermined height above the surface of the etched polyimide layer. A second pattern is formed on the polyimide layer and the exposed lead segment by a plating process.
Inventors
- 👤 Kazuaki Satoh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 17:37
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/46; H05K3/4644; H05K3/4647; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/095; H05K2203/00; H05K2203/07; H05K2203/0703; H05K2203/0733; H05K3/0011; H05K3/0017; H05K3/002; H05K3/0041; H05K3/10; H05K3/108; H05K3/22; H05K3/24; H05K3/243; H10W72/00; H10W72/01; H10W72/012; H10W72/01251; H10W72/01255; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155; Y10T29/49165; Y10T29/49204; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
186 words
A method of fabricating a multilayer structure, comprising the steps of: forming a first electrically conductive layer on an insulative substrate; forming a first electrically conductive pattern on said first layer; forming a resist layer over said first layer and said first pattern, said resist layer having a via hole therethrough communicating with said first pattern; forming a conductive via lead in said via hole by electrically plating a metal therein utilizing said first layer as an electroplating lead during said plating operation, said conductive via lead thereby being formed in electrical contact with said first pattern; removing said resist layer; removing a predetermined portion of said first layer; coating an insulative resin layer over said substrate, said first pattern and said via lead; etching the surface of said resin layer at a location adjacent said via lead to selectively remove the resin layer until a top segment of said via lead protrudes to a predetermined height above the etched surface of said resin layer; and forming a second electrically conductive pattern over said resin layer and over the protruding top segment of said via lead.
Claim 2
Independent Claim
186 words
A method of fabricating a multilayer structure, comprising the steps of: forming a first electrically conductive layer on an insulative substrate; forming a first electrically conductive pattern on said first layer; forming a resist layer over said first layer and said first pattern, said resist layer having a via hole therethrough communicating with said first pattern; forming a conductive via lead in said via hole by electrically plating a metal therein utilizing said first layer as an electroplating lead during said plating operation, said conductive via lead thereby being formed in electrical contact with said first pattern; removing said resist layer; removing a predetermined portion of said first layer; coating an insulative resin layer over said substrate, said first pattern and said via lead; etching the surface of said resin layer at a location adjacent said via lead to selectively remove the resin layer until a top segment of said via lead protrudes to a predetermined height above the etched surface of said resin layer; and forming a second electrically conductive pattern over said resin layer and over the protruding top segment of said via lead.
Claim 3
Dependent Claim
24 words
A method of fabricating a multilayer structure as set forth in claim 1, wherein said insulative resin layer is formed from a non-photosensitive material.
Claim 4
Dependent Claim
24 words
A method of fabricating a multilayer structure as set forth in claim 1, wherein said insulative layer is formed from a polyimide resin material.
Claim 5
Dependent Claim
41 words
A method of fabricating a multilayer structure as set forth in claim 1, wherein said insulative layer has a thermal expansion coefficient that is substantially equal to the thermal expansion coefficient of the metal from which said via lead is formed.
Claim 6
Dependent Claim
46 words
A method of fabricating a multilayer structure as set forth in claim 1, wherein during said coating step said insulative layer is formed so that it is substantially thinner on top of said top segment of said via lead than at other portions of the structure.
Claim 7
Dependent Claim
26 words
A method of fabricating a multilayer structure as set forth in claim 1, wherein during said etching step said insulative resin is removed by chemical etching.
Claim 8
Dependent Claim
24 words
A method of fabricating a multilayer structure as set forth in claim 6, wherein said chemical etching comprises reactive ion etching or ion milling.
Claim 9
Dependent Claim
24 words
A method of fabricating a multilayer structure as set forth in claim 1, wherein said second electrically conductive pattern is formed by electrical plating.
Claim 10
Independent Claim
192 words
A method of fabricating a multilayer structure, comprising the steps of: forming a first electrically conductive pattern on an insulative substrate having a first electrically conductive via lead extending therethrough for electrically connecting components on opposite sides of said substrate; forming a resist layer over said substrate and said first pattern, said resist layer having a via hole therethrough communicating with said first pattern; forming a second electrically conductive via lead in said via hole by electrically plating a metal therein utilizing said first via lead as an electroplating lead during said plating operation, said second via lead being formed in electrical contact with said first pattern; removing said resist layer; coating an insulative resin layer over said substrate, said first pattern and said second via lead; etching the surface of said resin layer at a location adjacent said second via lead to selectively remove the resin layer until a top segment of said second via lead protrudes to a predetermined height above the etched surface of said resin layer; and forming a second electrically conductive pattern over said resin layer and over the protruding top segment of said second via lead.
Claim 11
Independent Claim
192 words
A method of fabricating a multilayer structure, comprising the steps of: forming a first electrically conductive pattern on an insulative substrate having a first electrically conductive via lead extending therethrough for electrically connecting components on opposite sides of said substrate; forming a resist layer over said substrate and said first pattern, said resist layer having a via hole therethrough communicating with said first pattern; forming a second electrically conductive via lead in said via hole by electrically plating a metal therein utilizing said first via lead as an electroplating lead during said plating operation, said second via lead being formed in electrical contact with said first pattern; removing said resist layer; coating an insulative resin layer over said substrate, said first pattern and said second via lead; etching the surface of said resin layer at a location adjacent said second via lead to selectively remove the resin layer until a top segment of said second via lead protrudes to a predetermined height above the etched surface of said resin layer; and forming a second electrically conductive pattern over said resin layer and over the protruding top segment of said second via lead.
Claim 12
Independent Claim
187 words
A method of fabricating a multilayer structure, comprising the steps of: forming a first electrically conductive pattern on an insulative substrate; forming a first electrically conductive layer on said first pattern; forming a resist layer over said first layer, said resist layer having a via hole therethrough communicating with said first layer; forming a conductive via lead in said via hole by electrically plating a metal therein utilizing said first layer as an electroplating lead during said plating operation, said conductive via lead thereby being formed in electrical contact with said first layer; removing said resist layer; removing a predetermined portion of said first layer; coating an insulative resin layer over said substrate, a residual portion of said first layer and said via lead; etching the surface of said resin layer at a location adjacent said via lead to selectively remove the resin layer until a top segment of said via lead protrudes to a predetermined height above the etched surface of said resin layer; and forming a second electrically conductive pattern over said resin layer and over the protruding top segment of said first via lead.
Claim 13
Independent Claim
187 words
A method of fabricating a multilayer structure, comprising the steps of: forming a first electrically conductive pattern on an insulative substrate; forming a first electrically conductive layer on said first pattern; forming a resist layer over said first layer, said resist layer having a via hole therethrough communicating with said first layer; forming a conductive via lead in said via hole by electrically plating a metal therein utilizing said first layer as an electroplating lead during said plating operation, said conductive via lead thereby being formed in electrical contact with said first layer; removing said resist layer; removing a predetermined portion of said first layer; coating an insulative resin layer over said substrate, a residual portion of said first layer and said via lead; etching the surface of said resin layer at a location adjacent said via lead to selectively remove the resin layer until a top segment of said via lead protrudes to a predetermined height above the etched surface of said resin layer; and forming a second electrically conductive pattern over said resin layer and over the protruding top segment of said first via lead.
Claim 14
Independent Claim
154 words
A method of fabricating a multilayer structure, comprising the steps of: forming a first electrically conductive pattern on an insulative substrate; forming a resist layer over said substrate and over said first pattern, said resist layer having a via hole therethrough communicating with said first pattern; forming a conductive via lead in said via hole by electrically plating a metal therein, said conductive via lead being formed in electrical contact with said first pattern; removing said resist layer; forming an insulative resin layer over said substrate, said first pattern and said via lead; etching the surface of said resin layer at a location adjacent said via lead to selectively remove the resin layer until a top segment of said via lead protrudes to a predetermined height above the etched surface of said resin layer; and forming a second electrically conductive pattern over said resin layer and over the protruding segment of said via lead.
Claim 15
Independent Claim
154 words
A method of fabricating a multilayer structure, comprising the steps of: forming a first electrically conductive pattern on an insulative substrate; forming a resist layer over said substrate and over said first pattern, said resist layer having a via hole therethrough communicating with said first pattern; forming a conductive via lead in said via hole by electrically plating a metal therein, said conductive via lead being formed in electrical contact with said first pattern; removing said resist layer; forming an insulative resin layer over said substrate, said first pattern and said via lead; etching the surface of said resin layer at a location adjacent said via lead to selectively remove the resin layer until a top segment of said via lead protrudes to a predetermined height above the etched surface of said resin layer; and forming a second electrically conductive pattern over said resin layer and over the protruding segment of said via lead.
Claim 16
Dependent Claim
197 words
A method of fabricating a multilayer structure as set forth in claim 11, further comprising the steps of: forming a second insulative resin layer over said second pattern and said first mentioned resin layer; forming a second electrically conductive pattern on said second insulative resin layer; forming a second resist layer over said second layer and over said second pattern, said second resist layer having a second via hole therethrough communicating with said second pattern; forming a second conductive via lead in said second via hole by electrically plating a metal therein, said second conductive via lead being formed in electrical contact with said second pattern; removing said second resist layer; forming a third insulative resin layer over said second layer, said second pattern and said second via lead; etching the surface of said third resin layer at a location adjacent said second via lead to selectively remove the third resin layer until a top segment of said second via lead protrudes to a predetermined height above the etched surface of said third resin layer; and forming a third electrically conductive pattern over said third resin layer and over the protruding segment of said second via lead.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-05-03 | 1996-11-02 | 1997-05-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-05-03 | 2000-11-02 | 2001-05-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-05-03 | 2004-11-02 | 2005-05-04 | $7700.00 | Window Closed / Lapsed |