EP0346617A2
Expired / Lapsed
EP
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Formation of metallic interconnects by grit blasting
Assignee: International Business Machines Corp
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Filing: 1989-05-13
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Granted: —
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Expires: 2009-05-13
Abstract
Abstract This invention relates to a ceramic module and to methods for forming protruding, upstanding electrically conducting pins by the selective abrasion of a surface (18) of a multilayered ceramic module (10). An abrasive blasting device (40) is disposed adjacent to the surface (18) for directing a stream of abrasive particles (42) against the surface. The particles (42) strike both metallic conductors (20) and (22) and also the ceramic material of the layer (14). Inasmuch as the ceramic material is relatively hard and brittle as compared to the ductile metallic conductors the abrasive particles (42) abrade away the ceramic layer (14) at a faster rate than the ductile metallic material of the conductors (20) and (22). The abrasive particles (42) may be comprised of any suitable abrasive, such as Al₂O₃, SiC or WC. The module may be rotated beneath a nozzle of the grit blasting device, the nozzle being linearly translated above the surface being abraded.
Inventors
- 👤 Jungihl Kim
- 👤 Joseph C. Logue
- 👤 John J. Ritsko
- 👤 Robert R. Shaw
- 👤 George F. Walker
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 03:20
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/095; B; B24; B24C; B24C1/00; B24C1/04; B24C3/00; B24C3/32; B24C3/322; H05; H05K; H05K3/00; H05K3/0011; H05K3/0044; H10W99/00; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K2203/00; H05K2203/02; H05K2203/025; H05K3/46; H05K3/4611; H05K3/4626; H05K3/4629
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
102 words
A method of forming upstanding conductive terminals upon a surface of a ceramic structure, comprising the steps of: providing a ceramic structure (10) having at least one electrically conducting member (20, 22) contained within the structure, the member having a terminal portion (36, 38) proximally disposed to a surface (18) of the ceramic structure (10); directing a stream of abrasive particles (42) at the surface (18) of the ceramic structure (10); and abrading with the stream of abrasive particles (42) the surface (18) of the ceramic structure such that the conducting member (20, 22) is left protruding from the abraded surface (44).
Claim 2
Independent Claim
102 words
A method of forming upstanding conductive terminals upon a surface of a ceramic structure, comprising the steps of: providing a ceramic structure (10) having at least one electrically conducting member (20, 22) contained within the structure, the member having a terminal portion (36, 38) proximally disposed to a surface (18) of the ceramic structure (10); directing a stream of abrasive particles (42) at the surface (18) of the ceramic structure (10); and abrading with the stream of abrasive particles (42) the surface (18) of the ceramic structure such that the conducting member (20, 22) is left protruding from the abraded surface (44).
Claim 3
Dependent Claim
48 words
The method as defined in Claim 1 wherein the step of providing a ceramic structure (10) is accomplished by providing a multilayered ceramic structure (12, 14) having at least one elongated conducting member (20, 22) disposed within the structure in a substantially perpendicular manner to the surface (18).
Claim 4
Dependent Claim
30 words
The method as defined in claim 1 or 2 and further comprising a step of backfilling the abraded surface (44) of the module with a layer (46) of dielectric material.
Claim 5
Independent Claim
237 words
The method as defined in at least one of the claims 1 to 3 further comprising the steps of: providing a plurality of layers (12, 14) of greensheet material; making a plurality of openings through each of the sheets (12, 14) of greensheet material, selected ones of the openings defining a desired position of a conductive via through each of the layers; filling the openings with an electrically conductive material; laminating the sheets (12, 14) of greensheet material together to form a multilayered structure (10), certain of the openings in adjacent sheets of greensheet material being in registration one with another for defining conductive vias which extend through a plurality of layers (12, 14), at least some of the conductive vias which extend through a plurality of layers extending to an outer surface (18) of the multilayered structure (10); baking the multilayered structure (10) such that the greensheet layers (12, 14) are sintered into a multilayered ceramic module, the step of baking also converting the conductive material within certain of the openings into continuous conductors (20, 22) which extend through a plurality of layers of the module, at least some of the conductors extending to an outer surface of the module; and abrading away at least a portion of the outer surface (18) of the module such that terminal portions (36, 38) of the conductors (20, 22) protrude in an upstanding fashion above the abraded surface (44).
Claim 6
Dependent Claim
40 words
The method as defined in claim 4 wherein the step of filling the openings further comprises a step of forming conductive pathways (28) between selected ones (24, 26) of the openings on selected ones of the sheets of greensheet material.
Claim 7
Independent Claim
24 words
The method as defined in one or more of claims 1 to 5, wherein said conductor (20, 22) is comprised of a ductile metal.
Claim 8
Dependent Claim
26 words
The method as defined in claim 6, wherein said metal includes metals selected from the group consisting of molybdenum, gold, silver, copper, nickel and combinations thereof.
Claim 9
Independent Claim
71 words
The method as defined in anyone of the claims 1 to 7 wherein the step of directing comprises the steps of: positioning a grit blasting device (40) a predetermined distance away from the surface (18) of the ceramic structure (10); activating the grit blasting device to direct a stream of grit (42) against the surface (18) of the structure; and operating the grit blasting device for a predetermined interval of time.
Claim 10
Dependent Claim
102 words
The method as defined in claim 8 wherein the ceramic structure (10) comprises alumina, wherein the conducting member comprises molybdenum, and wherein the step of directing comprises the steps of: positioning a grit blasting device (40) approximately three inches away from the ceramic surface; activating the grit blasting device with approximately 50 psi of air pressure to direct a stream of #240 mesh grit SiC against the surface of the structure; and operating the grit blasting device for 20 to 200 seconds such that terminal portions of the metallic member protrude about 0.5 mils to about 5.0 mils above the abraded surface.
Claim 11
Dependent Claim
106 words
The method as defined in claim 8 or 9 comprising the steps (Fig. 3a, 3b): rotating a ceramic structure about an axis of rotation thereof, the axis of rotation being substantially perpendicular to a major surface of the structure, the structure having internal electrical conductors disposed substantially adjacent to the major surface; linearly translating a nozzle means along an axis above and substantially parallel to the major surface; and directing a stream of abrasive particles from the nozzle means onto the major surface, the abrasive particles abrading away the major surface such that a portion the electrical conductors are left protruding above the abraded major surface.
Claim 12
Dependent Claim
28 words
The method as defined in claim 10 wherein the step of rotating is accomplished by rotating the structure within a range of about 50 to about 300 RPM.
Claim 13
Independent Claim
42 words
The method as defined in claims 9 or 10 wherein the step of linearly translating is accomplished by linearly translating the nozzle means at a linear velocity within a range of about six inches per minute to about 45 feet per minute.
Claim 14
Independent Claim
56 words
The method as defined in anyone of the claims 10 - 13 wherein the nozzle means passes through the axis of rotation during the linear translation of the nozzle means and wherein the linear velocity of the nozzle means is varied as a function of the angular velocity of a point upon the underlying major surface.
Claim 15
Independent Claim
64 words
The method as defined in anyone of the claims 10 - 13 wherein the nozzle means passes through the axis of rotation during the linear translation of the nozzle means and wherein the rotational rate of the structure is varied as a function of the linear velocity of the nozzle means relative to the angular velocity of a point on the underlying major surface.
Claim 16
Dependent Claim
95 words
The method as defined in claim 8 comprising the steps of: directing a first stream of abrasive grit against the surface of the module, the first stream of grit comprising particles having a first diameter; selectively abrading away the surface of the module such that terminal portions of the electrical conductors are exposed in an upstanding manner relative to the abraded surface of the module; and directing a second stream of abrasive grit against the abraded surface, the second stream of grit comprising particles having a second diameter which is less than the first diameter.
Claim 17
Dependent Claim
27 words
The method as defined in claim 15 wherein the first diameter is approximately 60 to 70 microns and the second diameter is approximately 12 to 20 microns.
Claim 18
Independent Claim
39 words
The method as defined in anyone of the claims 1 to 16 further comprising a step of electrically coupling at least one integrated circuit to a surface of the module opposite the surface having the upstanding conductors (20, 22).
References Cited (Backward Citations)
No citation records indexed.
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