US5178914A
Expired / Lapsed
US
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Means of seeding and metallizing polymide
Assignee: International Business Machines Corp
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Filing: 1990-10-30
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Granted: 1993-01-12
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Expires: 2010-10-30
Abstract
Abstract A method for seeding the surface of a polyimide film which has been generated from a precursor polyamic acid film comprising the steps of: generating a film of polyamic acid on a substance (which may be done by conventional spin coating or by other solution coating techniques well known in the art); then either exposing the polyamic acid film to a solution containing palladium cations; heat-treating the palladium-treated film in a time/temperature schedule that causes imidization of the polymer to occur; exposing the seeded film to an electroless plating bath which causes the deposition of blanket metal film on the surface of the polymer film; or curing the film to the polyimide form; mechanically abrading the film surface, exposing the film to a solution containing palladium cations; exposing the seeded film to an electroless plating bath which causes the deposition of blanket metal film on the surface of the polymer film.
Inventors
- 👤 Ronald D. Goldblatt
- 👤 Caroline A. Kovac
- 👤 Domenico Tortorella
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 01:09
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/10; H05K3/18; H05K3/181; C; C23; C23C; C23C18/00; C23C18/16; C23C18/18; C23C18/20; C23C18/28; C23C18/30; H05K1/00; H05K1/02; H05K1/03; H05K1/0313; H05K1/032; H05K1/0346; H05K3/38; H05K3/381
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
89 words
The method of seeding the surface of a polyimide film to render it suitable for electroless metal deposition thereon comprising: a) generating a film of polyamic acid on a substrate; b) contacting said polyamic acid film with a solution containing palladium cations; c) exposing said palladium treated polyamic film to a temperature for a time sufficient to cause imidization of said polyamic acid to occur; and d) exposing the resulting polyimide film containing said palladium to an electroless plating bath to obtain deposition of a blanket metal film thereon.
Claim 2
Independent Claim
89 words
The method of seeding the surface of a polyimide film to render it suitable for electroless metal deposition thereon comprising: a) generating a film of polyamic acid on a substrate; b) contacting said polyamic acid film with a solution containing palladium cations; c) exposing said palladium treated polyamic film to a temperature for a time sufficient to cause imidization of said polyamic acid to occur; and d) exposing the resulting polyimide film containing said palladium to an electroless plating bath to obtain deposition of a blanket metal film thereon.
Claim 3
Independent Claim
96 words
The method of seeding the surface of a polyimide film to render it suitable for electroless metal deposition thereon comprising: a) generating a film of polyamic acid on a substrate; b) exposing said polyamic acid film to a temperature for a time sufficient to cause imidization of said polyamic acid to occur; c) mechanically abrading the surface of the resulting polyimide film; d) contacting said polyimide film with a solution containing palladium cations; and e) exposing the polyimide film containing said palladium to an electroless plating bath to obtain deposition of a blanket metal film thereon.
Claim 4
Independent Claim
96 words
The method of seeding the surface of a polyimide film to render it suitable for electroless metal deposition thereon comprising: a) generating a film of polyamic acid on a substrate; b) exposing said polyamic acid film to a temperature for a time sufficient to cause imidization of said polyamic acid to occur; c) mechanically abrading the surface of the resulting polyimide film; d) contacting said polyimide film with a solution containing palladium cations; and e) exposing the polyimide film containing said palladium to an electroless plating bath to obtain deposition of a blanket metal film thereon.
Claim 5
Dependent Claim
138 words
The method defined in claim 1 or 2 wherein the polyimide includes the following recurring unit: ##STR5## wherein n is an integer representing the number of repeating unit to provide a molecular weight in the range of about 10,000 to about 100,000, R is at least one tetravalent organic radical selected from the consisting of: ##STR6## R 2 being selected from the group consisting of divalent aliphatic hydrocarbon radicals having from 1 to 4 carbon atoms and carbonyl, oxy, sulfo, sulfide, ether, siloxane, phosphine oxide, hexafluoroisopropylidene and sulfonyl radicals and in which R 1 is at least one divalent radical selected from the group consisting of an aliphatic organic radical or from the group shown: ##STR7## in which R 3 is a divalent organic radical selected from the group consisting of R 2 , silicon, and amino radicals.
Claim 6
Dependent Claim
18 words
The method defined in claim 1 wherein said polyimide is formed based upon pyromellitic dianhydride and oxydianiline monomers.
Claim 7
Dependent Claim
19 words
The method defined in claim 1 wherein said polyimide is formed based upon benzophenonetetracarboxylic dianhydride and oxydianiline and monomers.
Claim 8
Dependent Claim
20 words
The method defined in claim 1 wherein said polyimide is formed based upon benzophenonetetracarboxylic dianhydride and oxydianiline and 1,3-phenylenediamine monomers.
Claim 9
Dependent Claim
18 words
The method defined in claim 1 wherein said polyimide is formed based upon benzophenonetetracarboxylic dianhydride and 1,3'-biphenylenediamine monomers.
Claim 10
Dependent Claim
20 words
The method defined in claim 1 wherein said polyimide is formed based upon benzophenonetetracarboxylic dianhydride and polymer of 3,3' biphenylenediamine.
Claim 11
Dependent Claim
33 words
The method defined in claim 3 wherein the reaction to form the polyamic acid is carried out in a polar solvent selected from the group consisting of N,N-dimethylacetamide, N,N-dimethylformamide, dimethyl sulfoxide or N-methyl-2-pyrrolidone.
Claim 12
Dependent Claim
25 words
The method defined in claim 9 wherein said polyamic acid is cyclized in the solid state into said polyimide at temperatures of 150° and above.
Claim 13
Dependent Claim
16 words
The method defined in claim 10 wherein said polyamic acid is deposited on suitable metal substrate.
Claim 14
Dependent Claim
11 words
The method defined in claim 11 wherein said metal is copper.
Claim 15
Dependent Claim
40 words
The method defined in claim 12 wherein said polymer is dried at a temperature between about 50° C. and 150° C. to a weight percent solids in the range of about 20% to 100% at 10% to 100% amic acid.
Claim 16
Dependent Claim
40 words
The method defined in claim 13 wherein the solution containing a palladium compound is a palladium nitrate at a concentration range of 0.001 to 10 mg/ml for a period of time ranging from about 30 seconds to about 45 minutes.
Claim 17
Dependent Claim
26 words
The method defined in claim 14 wherein said film treated with said palladium nitrate is washed with water for a period up to about 60 minutes.
Claim 18
Dependent Claim
34 words
The method defined in claim 15 wherein imidization is induced by heating said polyamic acid to a temperature of from about 180° to about 225° C. for between about 5 minutes and 1 hour.
Claim 19
Dependent Claim
15 words
The method defined in claim 16 wherein said heating is done for about 15 minutes.
Claim 20
Dependent Claim
20 words
The method defined in claim 17 wherein the electroless plating is conducted for between about 30 seconds and 5 minutes.
Claim 21
Dependent Claim
16 words
The method defined in claim 18 wherein the electroless plating is conducted for about 2 minutes.
Claim 22
Dependent Claim
51 words
The method defined in claim 19 wherein the electrolessly plated product is rinsed with flowing water for a period of from about 1 minute to about 60 minutes and thereafter dried for a period of about 30 minutes to 24 hours at a temperature between about 85° C. and 100° C.
Claim 23
Dependent Claim
27 words
The method defined in claim 2 wherein said mechanical abrasion is sufficient to allow formation of surface chemical species that will complex metal ions when exposed thereto.
Claim 24
Dependent Claim
18 words
The method defined in claim 21 wherein said polyimide is formed, based upon pyromellitic dianhydride and oxydianiline monomers.
Claim 25
Dependent Claim
19 words
The method defined in claim 21 wherein said polyimide is formed, based upon benzophenonetetracarboxylic dianhydride and oxydianiline and monomers.
Claim 26
Dependent Claim
20 words
The method defined in claim 21 wherein said polyimide is formed, based upon benzophenonetetracarboxylic dianhydride and oxydianiline and 1,3-phenylenediamine monomers.
Claim 27
Dependent Claim
18 words
The method defined in claim 21 wherein said polyimide is formed, based upon benzophenonetetracarboxylic dianhydride and 1,3-phenylenediamine monomers.
Claim 28
Dependent Claim
21 words
The method defined in claim 21 wherein said polyimide is formed, based upon benzophenonetetracarboxylic dianhydride and the polymer of 3,3' diphenylenediamine.
Claim 29
Dependent Claim
13 words
The method defined in claim 21 wherein said abrasion is conducted with sandpaper.
Claim 30
Dependent Claim
15 words
The method defined in claim 27 wherein the abraded polymer surface is washed with water.
Claim 31
Dependent Claim
18 words
The method defined in claim 28 wherein said washing step is carried out in an ultrasonic water tank.
Claim 32
Dependent Claim
15 words
The method defined in claim 28 wherein said polyamic acid is deposited on metal substrate.
Claim 33
Dependent Claim
11 words
The method defined in claim 30 wherein said metal is copper.
Claim 34
Dependent Claim
50 words
The method defined in claim 30 wherein the solution containing a palladium compound is a palladium nitrate solution having a concentration range of from about 0.001 to 10 mg/ml and is held in contact with said film form a period of time ranging from about 30 seconds to 45 minutes.
Claim 35
Dependent Claim
25 words
The method defined of claim 32 wherein said film treated with said palladium nitrate is washed with water for a period up to 5 minutes.
Claim 36
Dependent Claim
23 words
The method defined in claim 33 wherein the electroless plating is conducted for a period of between about 30 seconds and 5 minutes.
Claim 37
Dependent Claim
16 words
The method defined in claim 34 wherein the electroless plating is conducted for about 2 minutes.
Claim 38
Dependent Claim
47 words
The method defined in claim 35 wherein the electrolessly plated product is rinsed with water for a period of from about 1 to 60 minutes and thereafter dried for a period of about 30 minutes to 24 hours at temperatures between about 85° C. and 100° C.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-01-12 | 1996-07-13 | 1997-01-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-01-12 | 2000-07-13 | 2001-01-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-01-12 | 2004-07-13 | 2005-01-12 | $7700.00 | Window Closed / Lapsed |