US5089426A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for manufacturing a semiconductor device free from electrical shortage due to pin-hole formation
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1990-01-16
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Granted: 1992-02-18
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Expires: 2010-01-16
Abstract
Abstract An improved semiconductor device is disclosed which is free from current leakage due to pin-holes or other gaps. Also an improved method for provessing a semiconductor device is shown. According to the invention, gaps produced in fabricating process of the semiconductor layer are filled with insulator in advance of deposition of electrodes. By virtue of this configuration, short current paths do not result even if transparent electrode is provided on the semiconductor layer.
Inventors
- 👤 Shunpei Yamazaki
- 👤 Kunio Suzuki
- 👤 Masato Susukida
- 👤 Mikio Kinka
- 👤 Takeshi Fukada
- 👤 Masayoshi Abe
- 👤 Ippei Kobayashi
- 👤 Katsuhiko Shibata
- 👤 Kaoru Koyanagi
- 👤 Susumu Nagayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 19:02
CPC Classifications
H; H10; H10F; H10F71/00; H10F71/135; H10F71/10; H10F19/00; H10F19/30; H10F19/31; H10F71/103; H10F71/134; H10F71/138; H10F77/00; H10F77/30; H10F77/306; H10F77/311; H10F77/95; H10F77/953; H10F77/955; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02P; Y02P70/00; Y02P70/50; Y10; Y10S; Y10S136/00; Y10S136/29; Y10S438/00; Y10S438/94
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
168 words
A method of producing a solar cell consisting of a plurality of photoconversion devices which are connected in series with each other, each device consisting of a lower electrode, an upper electrode and a photosensitive layer sandwiched therebetween, said method comprising the steps of: forming a lower electrode pattern on a substrate to provide a lower electrode for each device; forming a photosensitive semiconductor layer on said substrate over said lower electrode pattern; filling defects occurring in said semiconductor layer with an insulating material; patterning said semiconductor layer by means of laser scribing to form grooves through said semiconductor layer in order to provide access to said lower electrode pattern; removing residue of the laser scribing by etching with an etchant; rinsing the etchant to remove it from the patterned semiconductor layer; and forming an upper electrode pattern on said patterned semiconductor layer in order to provide an upper electrode of each photoelectric conversion device comprising said upper electrode, said lower electrode and the semiconductor layer located therebetween.
Claim 2
Independent Claim
168 words
A method of producing a solar cell consisting of a plurality of photoconversion devices which are connected in series with each other, each device consisting of a lower electrode, an upper electrode and a photosensitive layer sandwiched therebetween, said method comprising the steps of: forming a lower electrode pattern on a substrate to provide a lower electrode for each device; forming a photosensitive semiconductor layer on said substrate over said lower electrode pattern; filling defects occurring in said semiconductor layer with an insulating material; patterning said semiconductor layer by means of laser scribing to form grooves through said semiconductor layer in order to provide access to said lower electrode pattern; removing residue of the laser scribing by etching with an etchant; rinsing the etchant to remove it from the patterned semiconductor layer; and forming an upper electrode pattern on said patterned semiconductor layer in order to provide an upper electrode of each photoelectric conversion device comprising said upper electrode, said lower electrode and the semiconductor layer located therebetween.
Claim 3
Dependent Claim
11 words
The method of claim 1 wherein said etchant is an acid.
Claim 4
Dependent Claim
11 words
The method of claim 2 wherein said acid is HF solution.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-02-17 | 1995-08-19 | 1996-02-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-02-17 | 1999-08-19 | 2000-02-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-02-17 | 2003-08-19 | 2004-02-18 | $7700.00 | Window Closed / Lapsed |