US5040484A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for retaining wafers
Assignee: Varian Semiconductor Equipment Associates Inc
•
Filing: 1990-03-02
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Granted: 1991-08-20
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Expires: 2010-03-02
Abstract
Abstract A device for releaseably holding a workpiece includes a resilient collet which is attached to a base by an elastomeric member. Typically, the collet is an annular ring. Several fingers for holding the workpiece extend from the collet. The fingers are pivoted by actuating a member which elastically deforms the collet and causes the fingers to pivot from a position for engaging the workpiece to a position for releasing the workpiece and vice-versa. In one application, the base is a platen for supporting a wafer in a semiconductor processing system, and a plurality of the holding devices are arranged around the periphery of a rotating disk. A counterweight ring is attached to the collet to counterbalance the moment generated by the centrifugal force of the wafer pressing against the fingers as the disk is rotated.
Inventors
- 👤 Eric L. Mears
- 👤 Richard J. Hertel
- 👤 Robert V. Brick
- 👤 Carl J. Holt, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:57
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7608; H10P72/7618; H10P72/7621; Y; Y10; Y10T; Y10T279/00; Y10T279/31
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
78 words
A device for releaseably holding a workpiece, comprising: a base; a resilient member having a plurality of finger members extending therefrom, said resilient member extending between and connected to said finger members; means for attaching said resilient member to said base, including elastomeric means attached to said resilient member; and means for elastically deforming said resilient member and said elastomeric means to pivot said finger members from a first position for holding said workpiece to a second position.
Claim 2
Independent Claim
78 words
A device for releaseably holding a workpiece, comprising: a base; a resilient member having a plurality of finger members extending therefrom, said resilient member extending between and connected to said finger members; means for attaching said resilient member to said base, including elastomeric means attached to said resilient member; and means for elastically deforming said resilient member and said elastomeric means to pivot said finger members from a first position for holding said workpiece to a second position.
Claim 3
Dependent Claim
20 words
A device as defined in claim 1 wherein said elastomeric means is positioned between said resilient member and said base.
Claim 4
Dependent Claim
33 words
A device as defined in claim 1 further including an elastomeric bumper attached to said resilient member for preventing contact between said resilient member and said base as said resilient member is deformed.
Claim 5
Dependent Claim
57 words
A device as defined in claim 1 wherein said resilient member comprises an annular ring having an inner periphery and an outer periphery, said finger members being spaced apart along said outer periphery, and wherein said elastomeric means comprises a plurality of elastomeric members attached to the outer periphery of said annular ring between said finger members.
Claim 6
Dependent Claim
37 words
A device as defined in claim 4 further including an elastomeric bumper attached to the inner periphery of said annular ring for preventing contact between said resilient member and said base as said resilient member is deformed.
Claim 7
Dependent Claim
25 words
A device as defined in claim 4 wherein said elastomeric members are molded to the outer periphery of said annular ring between said finger members.
Claim 8
Independent Claim
87 words
A device for releaseably holding a semiconductor wafer, comprising: a platen; a resilient member having a plurality of finger members extending therefrom, said resilient member extending between and connected to said finger members; elastomeric means for attaching said resilient member to said base; an actuating member for elastically deforming said resilient member and said elastomeric means to pivot said finger members from a first position for holding said workpiece to a second position; and means coupled to said platen for retaining said actuating member in said device.
Claim 9
Independent Claim
87 words
A device for releaseably holding a semiconductor wafer, comprising: a platen; a resilient member having a plurality of finger members extending therefrom, said resilient member extending between and connected to said finger members; elastomeric means for attaching said resilient member to said base; an actuating member for elastically deforming said resilient member and said elastomeric means to pivot said finger members from a first position for holding said workpiece to a second position; and means coupled to said platen for retaining said actuating member in said device.
Claim 10
Dependent Claim
26 words
A device as defined in claim 7 wherein said retaining means comprises a plurality of retainers each held by friction in a slot in said platen.
Claim 11
Dependent Claim
28 words
A device as defined in claim 8 wherein each of said retainers is generally flat with a raised dimple for frictional contact with the slot in said platen.
Claim 12
Independent Claim
95 words
A device for releaseably holding a workpiece, comprising: a base; a resilient member having a plurality of finger members extending therefrom, said resilient member extending between and connected to said finger members; elastomeric means for attaching said resilient member to said base; means for elastically deforming said resilient member and said elastomeric means to pivot said finger members from a closed position for holding said workpiece to an open position; and an elastomeric bumper attached to said resilient member for preventing contact between said resilient member and said base as said resilient member is deformed.
Claim 13
Independent Claim
95 words
A device for releaseably holding a workpiece, comprising: a base; a resilient member having a plurality of finger members extending therefrom, said resilient member extending between and connected to said finger members; elastomeric means for attaching said resilient member to said base; means for elastically deforming said resilient member and said elastomeric means to pivot said finger members from a closed position for holding said workpiece to an open position; and an elastomeric bumper attached to said resilient member for preventing contact between said resilient member and said base as said resilient member is deformed.
Claim 14
Dependent Claim
51 words
A device as defined in claim 10 wherein said resilient member comprises an annular ring having an inner periphery and an outer periphery, said finger members being spaced apart along said outer periphery, and wherein said elastomeric bumper comprises an elastomeric ring attached to the inner periphery of said resilient member.
Claim 15
Dependent Claim
38 words
A device as defined in claim 11 wherein said means for deforming said resilient member comprises an actuating member and wherein said actuating member is coupled to said resilient member by elastomeric pins integral to said elastomeric ring.
Claim 16
Dependent Claim
21 words
A device as defined in claim 11 wherein said elastomeric bumper is molded to the inner periphery of said annular ring.
Claim 17
Independent Claim
166 words
A device for holding a semiconductor wafer for processing, comprising: a platen having a clamping surface for receiving a semiconductor wafer; a clamping member comprising a resilient annular ring having an inner periphery and an outer periphery and a plurality of finger members attached to and spaced apart on the outer periphery of said annular ring; elastomeric means for attaching said clamping member to said platen, said elastomeric means comprising a plurality of elastomeric members attached to the outer periphery of said annular ring between said finger members, said clamping member being attached to said platen such that said finger members are spaced around the periphery of said clamping surface and extend at least slightly above said clamping surface; and means for deforming said annular ring such that said finger members are moved between a closed position in contact with an edge of said semiconductor wafer for holding said semiconductor wafer against said clamping surface and an open position in which said semiconductor wafer is released.
Claim 18
Independent Claim
166 words
A device for holding a semiconductor wafer for processing, comprising: a platen having a clamping surface for receiving a semiconductor wafer; a clamping member comprising a resilient annular ring having an inner periphery and an outer periphery and a plurality of finger members attached to and spaced apart on the outer periphery of said annular ring; elastomeric means for attaching said clamping member to said platen, said elastomeric means comprising a plurality of elastomeric members attached to the outer periphery of said annular ring between said finger members, said clamping member being attached to said platen such that said finger members are spaced around the periphery of said clamping surface and extend at least slightly above said clamping surface; and means for deforming said annular ring such that said finger members are moved between a closed position in contact with an edge of said semiconductor wafer for holding said semiconductor wafer against said clamping surface and an open position in which said semiconductor wafer is released.
Claim 19
Dependent Claim
33 words
A device as defined in claim 14 further including an elastomeric bumper attached to said annular ring for preventing contact between said annular ring and said platen as said annular ring is deformed.
Claim 20
Dependent Claim
38 words
A device as defined in claim 15 wherein said means for deforming said annular ring comprises an actuating member and wherein said actuating member is coupled to said annular ring by elastomeric pins integral to said elastomeric bumper.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-08-19 | 1995-02-18 | 1995-08-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-08-19 | 1999-02-18 | 1999-08-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-08-19 | 2003-02-18 | 2003-08-20 | $7700.00 | Window Closed / Lapsed |