US3645581A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and method for handling and treating articles
Assignee: Industrial Modular Systems Corp
•
Filing: 1968-11-26
•
Granted: 1972-02-29
•
Expires: 1988-11-26
Abstract
Abstract Improved apparatus and method for transporting articles and for centering articles in sequence by means of fluid-bearing devices. The apparatus and method disclosed have particular utility in the handling and treatment of fragile articles, such as silicon wafers, but their utility is not restricted to such use. After centering, the articles are transferred by vacuum means to a spinning unit at which the articles are treated, as by coating the same with a liquid product, such as a photoresist material. Transfer from the spinning unit is by vacuum means. In a substantially continuous procedure, articles to be treated are withdrawn in sequence from a supply magazine by fluid-bearing structure, moved through the centering and treating steps, and deposited in a discharge magazine by fluid-bearing structure without manual handling during the procedure. The fluid-bearing structure of an alternative embodiment is provided with bidirectional capability.
Inventors
- 👤 Cecil A Lasch Jr
- 👤 George H Bingham
- 👤 Gerhard Berz
- 👤 Earl G Troyer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:50
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/36; H10P72/3604
Claims Analysis
Total Claims: 129
Claim 1
Independent Claim
246 words
In combination in an apparatus for handling and treating articles, such as silicon wafers, without manual handling, A. a supply magazine having a quantity of said articles spacedly positioned therein, B. means for withdrawing articles from said supply magazine, C. means for indexing said supply magazine sequentially to present articles therein to said withdrawing means for removal thereby in sequence, D. means at a station spaced from said supply magazine for accepting articles presented thereto in sequence, E. transfer means for moving articles in sequence to and from said station prior to and following acceptance of said articles thereat, F. a discharge magazine for receiving a quantity of said articles in spaced relationship therein following release thereof from said station, G. means for receiving articles in sequence from said transfer means and for introducing such articles in sequence into said discharge magazine, and H. means for indexing said discharge magazine sequentially to permit introduction of such articles thereinto in sequence, I. said means for withdrawing articles from said supply magazine and said means for introducing articles into said discharge magazine each comprising, 1. a fluid-bearing track structure positioned in close proximity to the respective supply and discharge magazines associated therewith, 2. a source of article supporting fluid in communication with said track structure, and 3. control structure for regulating introduction of supporting fluid into and through said track structure in accordance with sequential indexing of said magazines by said indexing means associated with the respective magazines.
Claim 2
Dependent Claim
246 words
In combination in an apparatus for handling and treating articles, such as silicon wafers, without manual handling, A. a supply magazine having a quantity of said articles spacedly positioned therein, B. means for withdrawing articles from said supply magazine, C. means for indexing said supply magazine sequentially to present articles therein to said withdrawing means for removal thereby in sequence, D. means at a station spaced from said supply magazine for accepting articles presented thereto in sequence, E. transfer means for moving articles in sequence to and from said station prior to and following acceptance of said articles thereat, F. a discharge magazine for receiving a quantity of said articles in spaced relationship therein following release thereof from said station, G. means for receiving articles in sequence from said transfer means and for introducing such articles in sequence into said discharge magazine, and H. means for indexing said discharge magazine sequentially to permit introduction of such articles thereinto in sequence, I. said means for withdrawing articles from said supply magazine and said means for introducing articles into said discharge magazine each comprising, 1. a fluid-bearing track structure positioned in close proximity to the respective supply and discharge magazines associated therewith, 2. a source of article supporting fluid in communication with said track structure, and 3. control structure for regulating introduction of supporting fluid into and through said track structure in accordance with sequential indexing of said magazines by said indexing means associated with the respective magazines.
Claim 3
Dependent Claim
13 words
a source of article supporting fluid in communication with said track structure, and
Claim 4
Dependent Claim
13 words
a source of article supporting fluid in communication with said track structure, and
Claim 5
Dependent Claim
6 words
guide structure foR said support base,
Claim 6
Dependent Claim
6 words
guide structure foR said support base,
Claim 7
Dependent Claim
16 words
a vacuum pickup arm mounted on said plate structure for movement therewith relative to said station,
Claim 8
Dependent Claim
16 words
a vacuum pickup arm mounted on said plate structure for movement therewith relative to said station,
Claim 9
Dependent Claim
14 words
a source of supply of article supporting fluid in communication with said passages, and
Claim 10
Dependent Claim
14 words
a source of supply of article supporting fluid in communication with said passages, and
Claim 11
Dependent Claim
20 words
a chamber formed in a lower surface of said retainer plate in communication with a source of article supporting fluid,
Claim 12
Dependent Claim
20 words
a chamber formed in a lower surface of said retainer plate in communication with a source of article supporting fluid,
Claim 13
Dependent Claim
53 words
a series of lips spaced one above the other in said body which are spaced from each other by open slots defined by adjacent pairs of said lips, a. each said slot opening toward said fluid-bearing means associated with said magazine for moving said articles relative to the interior of said magazine body.
Claim 14
Dependent Claim
53 words
a series of lips spaced one above the other in said body which are spaced from each other by open slots defined by adjacent pairs of said lips, a. each said slot opening toward said fluid-bearing means associated with said magazine for moving said articles relative to the interior of said magazine body.
Claim 15
Dependent Claim
17 words
each said article causing said sensor to transmit an indexing control signal to said power source mechanism.
Claim 16
Dependent Claim
17 words
each said article causing said sensor to transmit an indexing control signal to said power source mechanism.
Claim 17
Dependent Claim
16 words
The apparatus of claim 1 in which each said supply magazine and said discharge magazine comprises,
Claim 18
Dependent Claim
52 words
a series of lips spaced one above the other in said body which are spaced from each other by open slots defined by adjacent pairs of said lips, a. each said slot opening toward the respective means associated therewith for withdrawing articles from such body and for introducing articles into such body.
Claim 19
Dependent Claim
52 words
a series of lips spaced one above the other in said body which are spaced from each other by open slots defined by adjacent pairs of said lips, a. each said slot opening toward the respective means associated therewith for withdrawing articles from such body and for introducing articles into such body.
Claim 20
Dependent Claim
52 words
a series of lips spaced one above the other in said body which are spaced from each other by open slots defined by adjacent pairs of said lips, a. each said slot opening toward the respective fluid-bearing means associated with the respective magazines for withdrawing articles therefrom and for introducing articles thereinto.
Claim 21
Dependent Claim
52 words
a series of lips spaced one above the other in said body which are spaced from each other by open slots defined by adjacent pairs of said lips, a. each said slot opening toward the respective fluid-bearing means associated with the respective magazines for withdrawing articles therefrom and for introducing articles thereinto.
Claim 22
Dependent Claim
7 words
guide structure for each said support base,
Claim 23
Dependent Claim
7 words
guide structure for each said support base,
Claim 24
Dependent Claim
51 words
each of said bars having a. a series of spaced grooves formed in a side face thereof which open onto the upper surface of said retainer plate, b. said grooves being formed to open onto said upper surface at a predetermined angular inclination relative to the longitudinal axis of such bar.
Claim 25
Dependent Claim
51 words
each of said bars having a. a series of spaced grooves formed in a side face thereof which open onto the upper surface of said retainer plate, b. said grooves being formed to open onto said upper surface at a predetermined angular inclination relative to the longitudinal axis of such bar.
Claim 26
Dependent Claim
18 words
each such article causing said sensor to transmit an indexing control signal to its associated power source mechanism.
Claim 27
Dependent Claim
18 words
each such article causing said sensor to transmit an indexing control signal to its associated power source mechanism.
Claim 28
Dependent Claim
66 words
a second series of directional fluid passages extending through said track structure each being generally arcuately curved in configuration from a lower end thereof toward the upper end thereof, 3. the passages of said second series opening onto said track structure upper surface in a direction which is generally opposite from the direction in which the passages of said first mentioned series open onto such surface,
Claim 29
Dependent Claim
66 words
a second series of directional fluid passages extending through said track structure each being generally arcuately curved in configuration from a lower end thereof toward the upper end thereof, 3. the passages of said second series opening onto said track structure upper surface in a direction which is generally opposite from the direction in which the passages of said first mentioned series open onto such surface,
Claim 30
Dependent Claim
54 words
a series of lips spaced one above the other in said body which are spaced from each other by open slots defined by adjacent pairs of said lips, each said slot opening toward said fluid-bearing means positioned adjacent said magazine for moving said articles in sequence relative to the interior of said magazine body.
Claim 31
Dependent Claim
54 words
a series of lips spaced one above the other in said body which are spaced from each other by open slots defined by adjacent pairs of said lips, each said slot opening toward said fluid-bearing means positioned adjacent said magazine for moving said articles in sequence relative to the interior of said magazine body.
Claim 32
Dependent Claim
25 words
a plurality of fluid passages extending through said dish surrounding the center thereof operatively connected with a source of supply of a supporting fluid, and
Claim 33
Dependent Claim
25 words
a plurality of fluid passages extending through said dish surrounding the center thereof operatively connected with a source of supply of a supporting fluid, and
Claim 34
Dependent Claim
80 words
mechanism for pulsing supporting fluid from said source through said passages to effect generally reciprocating movement of an article on said surface until such article is positioned with its center overlying the center of said dish, B. transfer means, for picking up and moving articles in sequence fRom said centering means and for presenting such articles to a station spaced from said centering means while retaining the centered orientation thereof, and for subsequently moving articles in sequence from said station.
Claim 35
Dependent Claim
80 words
mechanism for pulsing supporting fluid from said source through said passages to effect generally reciprocating movement of an article on said surface until such article is positioned with its center overlying the center of said dish, B. transfer means, for picking up and moving articles in sequence fRom said centering means and for presenting such articles to a station spaced from said centering means while retaining the centered orientation thereof, and for subsequently moving articles in sequence from said station.
Claim 36
Dependent Claim
27 words
a drive rod engaged with each said support base which is actuatable in predetermined sequential increments determined by the spacing between adjacent articles in such magazine, and
Claim 37
Dependent Claim
27 words
a drive rod engaged with each said support base which is actuatable in predetermined sequential increments determined by the spacing between adjacent articles in such magazine, and
Claim 38
Dependent Claim
21 words
The apparatus of claim 1 in which each of said means for indexing said supply magazine and said discharge magazine comprises,
Claim 39
Dependent Claim
22 words
openings extending through said retainer plate between said chamber and said slots through which such fluid may pass into said slots, and
Claim 40
Dependent Claim
22 words
openings extending through said retainer plate between said chamber and said slots through which such fluid may pass into said slots, and
Claim 41
Dependent Claim
23 words
control structure for regulating introduction of supporting fluid into said passages in accordance with sequential indexing of said magazine by said indexing means.
Claim 42
Dependent Claim
23 words
control structure for regulating introduction of supporting fluid into said passages in accordance with sequential indexing of said magazine by said indexing means.
Claim 43
Dependent Claim
19 words
vacuum structure for maintaining an article on said pickup arm when said arm is presented to such article, and
Claim 44
Dependent Claim
19 words
vacuum structure for maintaining an article on said pickup arm when said arm is presented to such article, and
Claim 45
Dependent Claim
26 words
a drive rod engaged with such support base which is actuatable in predetermined sequential increments determined by the spacing between adjacent articles in such magazine, and
Claim 46
Dependent Claim
26 words
a drive rod engaged with such support base which is actuatable in predetermined sequential increments determined by the spacing between adjacent articles in such magazine, and
Claim 47
Dependent Claim
31 words
control structure for regulating introduction of supporting fluid into and through said track structure in accordance with sequential indexing of said magazines by said indexing means associated with the respective magazines.
Claim 48
Dependent Claim
31 words
control structure for regulating introduction of supporting fluid into and through said track structure in accordance with sequential indexing of said magazines by said indexing means associated with the respective magazines.
Claim 49
Dependent Claim
20 words
power source mechanism for sequentially actuating said rod to effect incremental movement of said rod and such support base therewith.
Claim 50
Dependent Claim
20 words
power source mechanism for sequentially actuating said rod to effect incremental movement of said rod and such support base therewith.
Claim 51
Dependent Claim
52 words
The apparatus of claim 3 in which the respective movable rods engaged with the respective supply and discharge magazine support bases are movable by their associated power source mechanisms in opposite directions so that one of said magazines is indexed sequentially upwardly and the other of said magazines is indexed sequentially downwardly.
Claim 52
Dependent Claim
26 words
means for moving said plate structure and said arm therewith sequentially toward and away from said station during picking up and transfer of articles relative thereto.
Claim 53
Dependent Claim
26 words
means for moving said plate structure and said arm therewith sequentially toward and away from said station during picking up and transfer of articles relative thereto.
Claim 54
Dependent Claim
11 words
a series of bars received in and substantially filling said slots,
Claim 55
Dependent Claim
11 words
a series of bars received in and substantially filling said slots,
Claim 56
Dependent Claim
22 words
power source mechanism for sequentially actuating each said rod to effect incremental movement of such rod and its associated support base therewith.
Claim 57
Dependent Claim
22 words
power source mechanism for sequentially actuating each said rod to effect incremental movement of such rod and its associated support base therewith.
Claim 58
Dependent Claim
25 words
The passages of said second series being connected with said structure for introducing fluid, whereby bidirectional article moving capability is imparted to said track structure.
Claim 59
Dependent Claim
25 words
The passages of said second series being connected with said structure for introducing fluid, whereby bidirectional article moving capability is imparted to said track structure.
Claim 60
Dependent Claim
32 words
the upper surfaces of said bars lying generally in alignment with said upper surface of said retainer plate and joining therewith in defining a bearing surface over which said articles are passable,
Claim 61
Dependent Claim
32 words
the upper surfaces of said bars lying generally in alignment with said upper surface of said retainer plate and joining therewith in defining a bearing surface over which said articles are passable,
Claim 62
Dependent Claim
26 words
structure mounting said pickup arm for selective up and down movement relative to said plate to facilitate pickup and discharge of articles by said arm, and
Claim 63
Dependent Claim
26 words
structure mounting said pickup arm for selective up and down movement relative to said plate to facilitate pickup and discharge of articles by said arm, and
Claim 64
Dependent Claim
12 words
The apparatus of claim 1 in which each said transfer means comprises
Claim 65
Dependent Claim
22 words
mechanism for actuating said mounting structure in predetermined timed sequence to elevate and retract said pickup arm during article pickup and discharge.
Claim 66
Dependent Claim
22 words
mechanism for actuating said mounting structure in predetermined timed sequence to elevate and retract said pickup arm during article pickup and discharge.
Claim 67
Dependent Claim
12 words
The apparatus of claim 5 in which said transfer means further includes
Claim 68
Dependent Claim
37 words
each of said bars having a. a series of spaced grooves formed in a side face thereof, b. said grooves being formed to extend at a predetermined angular inclination relative to the longitudinal axis of such bar.
Claim 69
Dependent Claim
37 words
each of said bars having a. a series of spaced grooves formed in a side face thereof, b. said grooves being formed to extend at a predetermined angular inclination relative to the longitudinal axis of such bar.
Claim 70
Dependent Claim
26 words
In combination in an apparatus for handling articles, such as silicon wafers, A. a magazine for receiving a quantity of said articles therein in stacked relationship,
Claim 71
Dependent Claim
26 words
In combination in an apparatus for handling articles, such as silicon wafers, A. a magazine for receiving a quantity of said articles therein in stacked relationship,
Claim 72
Dependent Claim
11 words
The apparatus of claim 7 in which said fluid-bearing means comprises,
Claim 73
Dependent Claim
29 words
The apparatus of claim 8 in which said passages in said track structure are directionally oriented to move articles inwardly into said magazine when fluid passes through said passages.
Claim 74
Dependent Claim
29 words
The apparatus of claim 8 in which said passages in said track structure are directionally oriented to move articles outwardly from said magazine when fluid passes through said passages.
Claim 75
Dependent Claim
101 words
The apparatus of claim 8 in which said track structure further comprises c. at least two series of said directional fluid passages, d. one of said series of passages being directionally oriented to move articles in a first direction relative to said mAgazine, e. the other of said series of passages being directionally oriented to move articles in another direction relative to said magazine, and in which said control structure for regulating introduction of supporting fluid into said passages comprises a. structure permitting introduction of said supporting fluid selectively into a predetermined one or the other of said series of passages.
Claim 76
Dependent Claim
37 words
The apparatus of claim 8 in which each of said passages is generally arcuately curved in configuration from the lower end thereof toward the upper end thereof which opens to the upper surface of said track structures.
Claim 77
Dependent Claim
31 words
The apparatus of claim 12 in which each of said passages is larger at the lower end thereof than the upper end thereof, whereby a curved nozzle configuration is imparted thereto.
Claim 78
Dependent Claim
16 words
The apparatus of claim 7 in which said fluid-bearing means comprises a track structure which includes
Claim 79
Dependent Claim
52 words
The apparatus of claim 14 in which each of said bars further comprises c. another series of spaced grooves formed in the other side face of said bar, d. said other series of grooves also being formed to extend at a predetermined angular inclination relative to the longitudinal axis of said bar.
Claim 80
Dependent Claim
54 words
The apparatus of claim 15 in which e. the series of grooves along said one side face of said bar extend in an inclination which is generally opposite to the inclination at which the series of grooves extend along said other side face, whereby bidirectional article movement capability is imparted to said fluid-bearing means.
Claim 81
Dependent Claim
10 words
The apparatus of claim 7 in which said magazine comprises,
Claim 82
Dependent Claim
75 words
The apparatus of claim 7 in which said means for indexing said magazine comprises, a. guide structure for said magazine support base, b. a drive rod engaged with said support base which is actuatable in predetermined sequential increments determined by the spacing between adjacent slots in which articles are positioned in said magazine, and c. power source mechanism for sequentially actuating said rod to effect incremental movement of said rod and said support base therewith.
Claim 83
Dependent Claim
66 words
The apparatus of claim 18 in which said drive rod is threadedly engaged with said support base, and in which said power source mechanism comprises, i. a drive motor for rotating sad rod a predetermined amount following movement of each article relative to said magazine so that said rod will index said support base one position to present another article receiving slot to said fluid-bearing means.
Claim 84
Dependent Claim
20 words
The apparatus of claim 18 which further includes E. control means for regulating operation of said power source mechanism comprising,
Claim 85
Dependent Claim
104 words
In combination in an apparatus for handling and treating articles, A. a supply magazine for a quantity of said articles, B. fluid-bearing means for withdrawing articles individually from said supply magazine, C. means for treating articles presented thereto in sequence, D. transfer means for receiving articles with drawn from said magazine to move the same in sequence to said treating means and from said treating means following treatment thereof, E. a discharge magazine for receiving a quantity of treated articles, and F. fluid-bearing means for receiving articles in sequence from said transfer means and for introducing such articles in sequence into said discharge magazine.
Claim 86
Dependent Claim
104 words
In combination in an apparatus for handling and treating articles, A. a supply magazine for a quantity of said articles, B. fluid-bearing means for withdrawing articles individually from said supply magazine, C. means for treating articles presented thereto in sequence, D. transfer means for receiving articles with drawn from said magazine to move the same in sequence to said treating means and from said treating means following treatment thereof, E. a discharge magazine for receiving a quantity of treated articles, and F. fluid-bearing means for receiving articles in sequence from said transfer means and for introducing such articles in sequence into said discharge magazine.
Claim 87
Dependent Claim
46 words
The combination of claim 21 which further includes G. means cooperable with said first and second mentioned fluid-bearing means for sequentially indexing said supply magazine and said discharge magazine in response to movement of said articles sequentially from said supply magazine and into said discharge magazine.
Claim 88
Dependent Claim
16 words
The apparatus of claim 21 in which each said supply magazine and said discharge magazine comprises,
Claim 89
Dependent Claim
21 words
The apparatus of claim 21 in which each of sad means for indexing said supply magazine and said discharge magazine comprises,
Claim 90
Dependent Claim
53 words
The apparatus of claim 24 in which the respective movable drive rods engaged with the respective supply and discharge magazine support bases are movable by their associated power source mechanisms in opposite directions so that one of said magazines is indexable sequentially upwardly and the other of said magazines is indexable sequentially downwardly.
Claim 91
Dependent Claim
28 words
The apparatus of claim 24 in which each said drive rod is threadedly engaged with its associated support base, and in which each said power source mechanism comprises,
Claim 92
Dependent Claim
21 words
The apparatus of claim 24 which further includes G. control means for regulating operation of each said power source mechanism comprising,
Claim 93
Dependent Claim
17 words
Fluid-bearing means for transporting articles from one station to another comprising A. a track structure which includes
Claim 94
Dependent Claim
17 words
Fluid-bearing means for transporting articles from one station to another comprising A. a track structure which includes
Claim 95
Dependent Claim
17 words
The fluid-bearing means of claim 28 in which said structure for introducing fluid into said passages includes
Claim 96
Dependent Claim
13 words
The fluid-bearing means of claim 28 in which said track structure further includes
Claim 97
Dependent Claim
39 words
The fluid-bearing means of claim 28 in which each of said passages is defined by a curved tapered groove the lower end of which is larger than the upper end thereof, whereby a curved nozzle configuration is imparted thereto.
Claim 98
Dependent Claim
85 words
Fluid-bearing track structure for transporting articles from one station to another comprising A. a retainer plate having a series of generally parallel slots formed in an upper surface thereof, B. a chamber formed in a lower surface of said retainer plate in communication with a source of article supporting fluid, C. openings extending through said retainer plate between said chamber and said slots through which such fluid may pass into said slots, and D. a series of bars received in and substantially filling said slots,
Claim 99
Dependent Claim
85 words
Fluid-bearing track structure for transporting articles from one station to another comprising A. a retainer plate having a series of generally parallel slots formed in an upper surface thereof, B. a chamber formed in a lower surface of said retainer plate in communication with a source of article supporting fluid, C. openings extending through said retainer plate between said chamber and said slots through which such fluid may pass into said slots, and D. a series of bars received in and substantially filling said slots,
Claim 100
Dependent Claim
57 words
The track structure of claim 32 in which each of said bars further includes c. another series of spaced grooves formed in the other side face of said bar, d. said other series of grooves also being formed to open onto said upper surface at a predetermined angular inclination relative to the longitudinal axis of said bar.
Claim 101
Dependent Claim
55 words
The track structure of claim 33 in which e. the series of grooves along said one side face of said bar extends at an inclination which is generally opposite to the inclination at which the series of grooves extend along said other side face, whereby bidirectional article movement capability is imparted to said track structure.
Claim 102
Dependent Claim
46 words
The track structure of claim 32 in which each of said grooves is formed with a curved tapered nozzle shaped configuration which is deeper and wider at the lower end thereof that at its upper end which opens onto the upper surface of said retainer plate.
Claim 103
Dependent Claim
107 words
Means for orienting the center of a generally flat article comprising A. a shallow dish having a concave upper surface onto which an article to be centered is deposited, B. a plurality of fluid passages extending through said dish and surrounding the center of said upper surface, C. structure connecting said passages with a source of supply of article supporting fluid, and D. mechanism for effecting intermittent pulsating flow of said fluid inTo and through said passages onto said dish upper surface to produce generally reciprocating movement of an article on said surface until such article is positioned with its center overlying said center of said surface.
Claim 104
Dependent Claim
107 words
Means for orienting the center of a generally flat article comprising A. a shallow dish having a concave upper surface onto which an article to be centered is deposited, B. a plurality of fluid passages extending through said dish and surrounding the center of said upper surface, C. structure connecting said passages with a source of supply of article supporting fluid, and D. mechanism for effecting intermittent pulsating flow of said fluid inTo and through said passages onto said dish upper surface to produce generally reciprocating movement of an article on said surface until such article is positioned with its center overlying said center of said surface.
Claim 105
Dependent Claim
15 words
The means of claim 36 which further comprises E. a bore extending through said dish,
Claim 106
Dependent Claim
37 words
The means of claim 37 which further includes H. vacuum structure in conjunction with said centering pin for maintaining an article thereon as said pin is elevated to present such article to such pickup and transfer means.
Claim 107
Independent Claim
108 words
A method of handling articles, such as generally flat silicon wafers, to orient their centers in a predetermined location comprising, A. providing a centering dish having a shallow concave upper surface and air passages extending therethrough opening onto said upper surface, B. positioning an article to be centered on said upper surface, C. introducing a supporting fluid through said passages into contact with said article on said upper surface, and D. causing the flow of said supporting fluid to pulse as it passes into said upper surface to intermittently raise and lower said article and in so doing to move said article toward the center of said surface.
Claim 108
Independent Claim
108 words
A method of handling articles, such as generally flat silicon wafers, to orient their centers in a predetermined location comprising, A. providing a centering dish having a shallow concave upper surface and air passages extending therethrough opening onto said upper surface, B. positioning an article to be centered on said upper surface, C. introducing a supporting fluid through said passages into contact with said article on said upper surface, and D. causing the flow of said supporting fluid to pulse as it passes into said upper surface to intermittently raise and lower said article and in so doing to move said article toward the center of said surface.
Claim 109
Dependent Claim
56 words
The method of claim 39 which further includes E. elevating said article above said upper surface after the center of said article has been aligned with the center of said surface, and F. retaining the centered orientation of said article during such elevation until the article is engaged for transfer to another station for subsequent treatment.
Claim 110
Independent Claim
116 words
A method of withdrawing articles in sequence from a supply magazine in which a plurality of such articles are positioned comprising A. providing a fluid-bearing track structure adjacent said magazine having a portion thereof which extends in underlying relationship relative to the articles in said magazine, B. indexing said magazine to bring successive articles into a withdrawing position which is generally in alignment with said portion of said track structure, C. introducing article supporting fluid through said track structure into engagement with each successive article located in said withdrawing position, and D. imparting outward directional flow to said fluid with said track structure to cause said fluid to move each said successive article from said magazine.
Claim 111
Independent Claim
116 words
A method of withdrawing articles in sequence from a supply magazine in which a plurality of such articles are positioned comprising A. providing a fluid-bearing track structure adjacent said magazine having a portion thereof which extends in underlying relationship relative to the articles in said magazine, B. indexing said magazine to bring successive articles into a withdrawing position which is generally in alignment with said portion of said track structure, C. introducing article supporting fluid through said track structure into engagement with each successive article located in said withdrawing position, and D. imparting outward directional flow to said fluid with said track structure to cause said fluid to move each said successive article from said magazine.
Claim 112
Independent Claim
108 words
A method of inserting a plurality of articles in sequence into a magazine comprising A. providing a fluid-bearing track structure adjacent sad magazine having a portion thereof which extends in underlying relationship relative to said magazine, B. positioning articles in sequence upon said track structure, C. introducing article supporting fluid upwardly through said track structure into engagement with each successive article positioned thereon, D. imparting inward directional flow to said fluid with said track structure to cause said fluid to move each said successive article into said magazine, and E. indexing said magazine following insertion of an article thereinto to prepare said magazine to receive a subsequent article.
Claim 113
Independent Claim
108 words
A method of inserting a plurality of articles in sequence into a magazine comprising A. providing a fluid-bearing track structure adjacent sad magazine having a portion thereof which extends in underlying relationship relative to said magazine, B. positioning articles in sequence upon said track structure, C. introducing article supporting fluid upwardly through said track structure into engagement with each successive article positioned thereon, D. imparting inward directional flow to said fluid with said track structure to cause said fluid to move each said successive article into said magazine, and E. indexing said magazine following insertion of an article thereinto to prepare said magazine to receive a subsequent article.
Claim 114
Independent Claim
110 words
A method of handling articles for movement between two stations comprising A. providing a fluid-bearing track structure which extends between said stations, B. placing an article on said track structure, C. introducing article supporting fluid through said track structure into engagement with said article, D. imparting directional flow to said fluid with said track strucTure to cause said fluid to move said article from one of said stations to the other, and E. following treatment of said article at said other station imparting reverse directional flow to said fluid with said track structure to cause said fluid to move said article back from said other station to said one station.
Claim 115
Independent Claim
110 words
A method of handling articles for movement between two stations comprising A. providing a fluid-bearing track structure which extends between said stations, B. placing an article on said track structure, C. introducing article supporting fluid through said track structure into engagement with said article, D. imparting directional flow to said fluid with said track strucTure to cause said fluid to move said article from one of said stations to the other, and E. following treatment of said article at said other station imparting reverse directional flow to said fluid with said track structure to cause said fluid to move said article back from said other station to said one station.
Claim 116
Dependent Claim
28 words
In combination in an apparatus for handling articles, such as silicon wafers, A. an indexable magazine for receiving a quantity of said articles therein in stacked spaced relationship,
Claim 117
Dependent Claim
28 words
In combination in an apparatus for handling articles, such as silicon wafers, A. an indexable magazine for receiving a quantity of said articles therein in stacked spaced relationship,
Claim 118
Dependent Claim
10 words
The apparatus of claim 44 in which said magazine comprises,
Claim 119
Dependent Claim
76 words
The apparatus of claim 44 in which said means for indexing said magazine comprises, a. guide structure for said magazine support base, b. a drive rod engaged with said support base which is actuatable in a predetermined sequential increments determined by the spacing between adjacent slots in which articles are positioned in said magazine, and c. power source mechanism for sequentially actuating said rod to effect incremental movement of said rod and said support base therewith.
Claim 120
Dependent Claim
25 words
The apparatus of claim 46 in which said drive rod is threadedly engaged with said support base, and in which said power source mechanism comprises,
Claim 121
Dependent Claim
58 words
The apparatus of claim 46 in which said indexing means further includes d. control means for regulating operation of said power source mechanism comprising i. a sensor past which each article passes as it is moved relative to said magazine, ii. each such article causing said sensor to transmit an indexing control signal to said power source mechanism.
Claim 122
Dependent Claim
43 words
In combination in an apparatus for handling and treating generally flat articles, such as silicon wafers, without manual handling, A. centering means to which articles are presented in sequence for orienting each article presented thereto with its center in a predetermined location comprising,
Claim 123
Dependent Claim
43 words
In combination in an apparatus for handling and treating generally flat articles, such as silicon wafers, without manual handling, A. centering means to which articles are presented in sequence for orienting each article presented thereto with its center in a predetermined location comprising,
Claim 124
Independent Claim
138 words
A method of handling and treating articles, such as silicon wafers, without manual handling, comprising A. providing a supply of articles at a feed station, B. sequentially withdrawing individual articles from said supply and placing the same in sequence on a fluid-bearing track structure adjacent said supply, C. moving such withdrawn articles in sequence to a centering station on said fluid-bearing track structure, D. locating the centers of such withdrawn articles in sequence at said centering station, E. transferring such centered articles in sequence to a treating station, F. positioning said centered articles in sequence at said treating station in a predetermined orientation for treatment at such station, and G. placing such articles following treatment thereof in sequence on a fluid-bearing track structure and transferring such articles on said last mentioned fluid-bearing track structure to a discharge station.
Claim 125
Independent Claim
138 words
A method of handling and treating articles, such as silicon wafers, without manual handling, comprising A. providing a supply of articles at a feed station, B. sequentially withdrawing individual articles from said supply and placing the same in sequence on a fluid-bearing track structure adjacent said supply, C. moving such withdrawn articles in sequence to a centering station on said fluid-bearing track structure, D. locating the centers of such withdrawn articles in sequence at said centering station, E. transferring such centered articles in sequence to a treating station, F. positioning said centered articles in sequence at said treating station in a predetermined orientation for treatment at such station, and G. placing such articles following treatment thereof in sequence on a fluid-bearing track structure and transferring such articles on said last mentioned fluid-bearing track structure to a discharge station.
Claim 126
Independent Claim
122 words
A method of withdrawing articles in sequence from a supply magazine in which a plurality of such articles are positioned comprising A. providing a fluid-bearing track structure adjacent said magazine having a portion thereof adjacent to the articles in said magazine, B. indexing said magazine to bring successive articles into a withdrawing position which is generally in alignment with said track structure, C. withdrawing articles in sequence from said magazine and placing the same on said track structure, D. introducing article supporting fluid through said track structure into engagement with each successive article located thereon, and E. imparting outward directional flow to said fluid with said track structure to cause said fluid to move each said successive article away from said magazine.
Claim 127
Independent Claim
122 words
A method of withdrawing articles in sequence from a supply magazine in which a plurality of such articles are positioned comprising A. providing a fluid-bearing track structure adjacent said magazine having a portion thereof adjacent to the articles in said magazine, B. indexing said magazine to bring successive articles into a withdrawing position which is generally in alignment with said track structure, C. withdrawing articles in sequence from said magazine and placing the same on said track structure, D. introducing article supporting fluid through said track structure into engagement with each successive article located thereon, and E. imparting outward directional flow to said fluid with said track structure to cause said fluid to move each said successive article away from said magazine.
Claim 128
Independent Claim
123 words
A method of inserting a plurality of articles in sequence into a magazine comprising A. providing a fluid-bearing track structure adjacent said magazine having a portion thereof adjacent to said magazine, B. positioning articles in sequence upon said track structure, C. introducing article supporting fluid upwardly through said track structure into engagement with each successive article positioned thereon, D. indexing said magazine to position the same to receive an article therein from said track structure, E. imparting inward directional flow to said fluid with said track structure to cause said fluid to move each said successive article placed thereon into said magazine, and F. indexing said magazine following insertion of an article thereinto to prepare said magazine to receive therein a subsequent article.
Claim 129
Independent Claim
123 words
A method of inserting a plurality of articles in sequence into a magazine comprising A. providing a fluid-bearing track structure adjacent said magazine having a portion thereof adjacent to said magazine, B. positioning articles in sequence upon said track structure, C. introducing article supporting fluid upwardly through said track structure into engagement with each successive article positioned thereon, D. indexing said magazine to position the same to receive an article therein from said track structure, E. imparting inward directional flow to said fluid with said track structure to cause said fluid to move each said successive article placed thereon into said magazine, and F. indexing said magazine following insertion of an article thereinto to prepare said magazine to receive therein a subsequent article.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-02-28 | 1975-08-30 | 1976-02-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-02-28 | 1979-08-30 | 1980-02-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-02-28 | 1983-08-30 | 1984-02-29 | $7700.00 | Window Closed / Lapsed |