US3566960A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cooling apparatus for vacuum chamber
Assignee: Individual
•
Filing: 1969-08-18
•
Granted: 1971-03-02
•
Expires: 1989-08-18
Abstract
Abstract An apparatus for cooling a workpiece within a vacuum chamber consisting of a housing within said chamber, said workpiece overlying an opening into said housing, a cooling medium within said housing having direct contact with said workpiece, means cooling said cooling medium, and a diaphragm equalizing pressure between said vacuum chamber and the chamber within said housing.
Inventors
- 👤 Robley V Stuart
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 00:22
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/541; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J7/00; H01J7/24
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
77 words
A cooling apparatus for a workpiece within a vacuum chamber, having in combination: a housing within said vacuum chamber having a chamber therein, and said housing having an opening therein into said vacuum chamber; holding means in connection with said opening securing said workpiece thereover; means substantially equalizing pressure between said vacuum chamber and said housing chamber; a cooling medium within said chamber of said housing; and means in connection with said housing cooling said cooling medium.
Claim 2
Dependent Claim
77 words
A cooling apparatus for a workpiece within a vacuum chamber, having in combination: a housing within said vacuum chamber having a chamber therein, and said housing having an opening therein into said vacuum chamber; holding means in connection with said opening securing said workpiece thereover; means substantially equalizing pressure between said vacuum chamber and said housing chamber; a cooling medium within said chamber of said housing; and means in connection with said housing cooling said cooling medium.
Claim 3
Dependent Claim
17 words
The structure set forth in claim 1, wherein said last mentioned means comprises a heat exchange member.
Claim 4
Dependent Claim
43 words
The structure set forth in claim 1, wherein said last mentioned means comprises: a reservoir for said cooling medium; a heat exchange member in connection with said cooling medium; and means for passage of said cooling medium between said reservoir and said housing.
Claim 5
Dependent Claim
57 words
The structure set forth in claim 1, wherein said last mentioned means comprises: a reservoir for said cooling medium; means placing said cooling medium within said reservoir under controlled pressure; means for passage of said cooling medium between said reservoir and said chamber within said housing; and a heat exchange member in connection with said cooling medium.
Claim 6
Dependent Claim
20 words
The structure set forth in claim 1, wherein said second mentioned means comprises a diaphragm in connection with said housing.
Claim 7
Dependent Claim
21 words
The structure set forth in claim 1, wherein said second mentioned means comprises a diaphragm forming a portion of said housing.
Claim 8
Dependent Claim
58 words
The structure set forth in claim 1, wherein said last mentioned means comprises: a reservoir for said cooling medium; means in connection with said reservoir controlling the pressure upon said cooling medium; a heat exchange member; a pump; and means for passage of said cooling medium between said reservoir, said heat exchange member, said pump and said housing.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-03-01 | 1974-08-31 | 1975-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-03-01 | 1978-08-31 | 1979-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-03-01 | 1982-08-31 | 1983-03-02 | $7700.00 | Window Closed / Lapsed |