US4068814A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor body holder
Assignee: General Electric Co
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Filing: 1976-10-18
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Granted: 1978-01-17
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Expires: 1996-10-18
Abstract
Abstract A semiconductor body holder includes a rigid refractory base having a plurality of flexible refractory arms extending from one end thereof. Each arm includes a finger extending therefrom, the fingers in cooperation with the arms, serving to resiliently hold a body of semiconductor material during processing. The holder of the present invention is particularly useful in the practice of temperature gradient zone melting on the semiconductor body.
Inventors
- 👤 Thomas R. Anthony
- 👤 Harvey E. Cline
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 20:25
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7608; H10P72/7624; Y; Y10; Y10S; Y10S117/00; Y10S117/90; Y10T; Y10T117/00; Y10T117/10; Y10T117/1024; Y10T117/1076
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
179 words
A semiconductor body holder comprising: a base comprising a rigid refractory member comprising a quartz rod and having first and second ends, said first end being adapted to support said holder and three flexible refractory arms, of quartz each of said arms including distal and proximal ends, the proximal end of each arm being fixed to said second end of said base, said arms forming an obtuse angle of quartz with said base and each of said arms including a refractory finger fixed to the distal end thereof, each of said fingers extending generally toward the central axis of said base, the orientation of said fingers, said arms and said base with each other minimizing any shadowing effect of the arms upon radiation emitted by a wafer supported by the holder as well as minimizing the inducement of undesirable thermal gradients in said wafer, each of said fingers being capable of engaging only a minimal outermost peripheral surface area of a wafer and each arm being capable of only contacting a minimal portion of an edge of a wafer.
Claim 2
Dependent Claim
179 words
A semiconductor body holder comprising: a base comprising a rigid refractory member comprising a quartz rod and having first and second ends, said first end being adapted to support said holder and three flexible refractory arms, of quartz each of said arms including distal and proximal ends, the proximal end of each arm being fixed to said second end of said base, said arms forming an obtuse angle of quartz with said base and each of said arms including a refractory finger fixed to the distal end thereof, each of said fingers extending generally toward the central axis of said base, the orientation of said fingers, said arms and said base with each other minimizing any shadowing effect of the arms upon radiation emitted by a wafer supported by the holder as well as minimizing the inducement of undesirable thermal gradients in said wafer, each of said fingers being capable of engaging only a minimal outermost peripheral surface area of a wafer and each arm being capable of only contacting a minimal portion of an edge of a wafer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-01-16 | 1981-07-18 | 1982-01-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-01-16 | 1985-07-18 | 1986-01-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-01-16 | 1989-07-18 | 1990-01-17 | $7700.00 | Window Closed / Lapsed |