Multilayered ceramic substrates and method for manufacturing the same
Abstract
Abstract Multilayered ceramic substrates having Cu electrode patterns in or on ceramic-glass insulating layers which consist essentially of Al 2 O 3 , SiO 2 , B 2 O 3 , Na 2 O, K 2 O, CaO, MgO and PbO. The methods for manufacturing the substrate comprises thermally treating a laminate of alternately superimposing ceramic-glass insulating layers and CuO-based electrode layers of desired patterns in air or in a molecular oxygen-containing atmosphere to eliminate organic binders from the laminates by burning out, reducing the CuO into metallic Cu at low temperatures in an atmosphere containing hydrogen, and firing the thus reduced laminate in an inert gas such as nitrogen. The firing is effected at 850° to 950° C. The multilayered ceramic substrate may also be obtained by forming ceramic-glass insulating layers and CuO-based electrode layers alternately on a sintered ceramic support, followed by the thermal treatment, reduction and firing set forth above.
Inventors
- 👤 Seiichi Nakatani
- 👤 Satoru Yuhaku
- 👤 Tsutomu Nishimura
- 👤 Yukio Terada
- 👤 Yasuyuki Baba
Bibliographic Details
Claims Analysis
Total Claims: 6References Cited (Backward Citations)
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