EP0243626A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method of making multilayered ceramic structures having an internal distribution of copper-based conductors
Assignee: International Business Machines Corp
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Filing: 1987-03-10
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Granted: —
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Expires: 2007-03-10
Abstract
Abstract The present invention provides a method for producing multilayered ceramic structures having copper-based conductors therein, wherein the onset of sintering of the copper-based conductor can be adjusted to approach or match that of the ceramic portion of the structure. In addition, methods are provided whereby the polymeric binder resin used in formation of the ceramic portion of the structure can be removed or burned-off, using oxygen-containing ambients, wherein the oxygen content is greater than 200 ppm, without oxidation of the copper-based conductors therein.
Inventors
- 👤 Herbert Rudolf Anderson, Jr.
- 👤 Renuka Shastri Divakaruni
- 👤 Joseph Michael Dynys
- 👤 Steven Michael Kandetzke
- 👤 Daniel Patrick Kirby
- 👤 Raj Navinchandra Master
- 👤 Jon Alfred Casey
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 13:22
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/098; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K1/09; H05K1/092; H05K3/00; H05K3/22; H05K3/28; H05K3/46; H05K3/4611; H05K3/4626; H05K3/4629
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
74 words
A method of producing a multilayered glass-ceramic or ceramic structure with at least one copper-based conductor therein, characterized in that the improvement comprises carrying out the ceramic green sheet binder burn-off in an ambient comprising molecular oxygen at concentrations greater than about 200 ppm but less than about 50.000 ppm and in that, subsequent to said binder burn-off, any copper oxides formed are reduced back to metallic copper by treatment in a reducing atmosphere.
Claim 2
Independent Claim
74 words
A method of producing a multilayered glass-ceramic or ceramic structure with at least one copper-based conductor therein, characterized in that the improvement comprises carrying out the ceramic green sheet binder burn-off in an ambient comprising molecular oxygen at concentrations greater than about 200 ppm but less than about 50.000 ppm and in that, subsequent to said binder burn-off, any copper oxides formed are reduced back to metallic copper by treatment in a reducing atmosphere.
Claim 3
Dependent Claim
53 words
The method of Claim 1, wherein said ceramic green sheet binder burn-off is conducted at temperatures up to about 600°C, and where molecular hydrogen is added to said burn-off ambient during the latter part of the burn-off step, the concentration of said molecular hydrogen being ranged between 0,5 and 5,0 % by volume.
Claim 4
Dependent Claim
31 words
The method of Claim 1 or 2, wherein said treatment in a reducing atmosphere is carried out in forming gas at temperatures ranging between about 300 °C and about 600 °C.
Claim 5
Independent Claim
58 words
A method of producing a multilayered glass-ceramic or ceramic structure with at least one copper-based conductor therein, characterized in that the improvement comprises use of a thermally stable polymeric material, or one which decomposes to provide a thermally stable decomposition products, in contact with at least a portion of the copper-based metallurgy precursor of said copper based conductor.
Claim 6
Independent Claim
58 words
A method of producing a multilayered glass-ceramic or ceramic structure with at least one copper-based conductor therein, characterized in that the improvement comprises use of a thermally stable polymeric material, or one which decomposes to provide a thermally stable decomposition products, in contact with at least a portion of the copper-based metallurgy precursor of said copper based conductor.
Claim 7
Dependent Claim
77 words
The method of Claim 4, wherein said thermally stable polymeric material or said thermally stable decomposition product provides a conformal coating, surrounding the copper surfaces of said copper-based metallurgy precursor, said conformal coating being used to protect said copper-based surfaces during at least the process step for removal of ceramic green sheet binder resin, and the thickness of said conformal coating on the surface of said copper being ranged from about 0,02 micrometers to about 0,10 micrometers.
Claim 8
Dependent Claim
38 words
The method of Claim 5, wherein said conformal coating is applied to the surface of copper particles, and wherein said conformal coating comprises from about 0,5 weight % to about 4,0 weight % of the coated copper particle.
Claim 9
Dependent Claim
64 words
The method of Claim 5 or 6, wherein said process step for removal of the ceramic binder resin comprises a binder burn-off in an oxidizing atmosphere, said binder burn-off step being carried out in an atmosphere comprising an oxygen concentration up to 100% by volume, and wherein said binder burn-off step is conducted at temperatures ranging between about 300 °C and about 700 °C.
Claim 10
Dependent Claim
117 words
The method of Claim 7 comprising the steps of: (a) forming a multilayered structure with at least one copper-based conductor metallurgy precursor therein, and comprising at least one glass ceramic green sheet comprising an organic binder resin, wherein the surfaces of copper-based particles contained in said copper-based conductor metallurgy precursor are surrounded by a polymeric material, wherein at least a portion of which decomposes at temperatures greater than the decomposition temperature of said ceramic green sheet binder resin or wherein said polymeric material decomposes to provide a thermally stable decomposition product; and (b) firing said multilayered structure in an oxidizing atmosphere at a temperature adequate for at least substantial decomposition of said ceramic green sheet binder resin.
Claim 11
Dependent Claim
41 words
The method of Claim 8 wherein said ceramic green sheet binder resin thermally decomposes by unzipping of said binder resin molecule and said polymeric material surrounding said at least one copper-based conductor thermally decomposes by unzipping of said polymeric material molecule.
Claim 12
Dependent Claim
47 words
The method of Claim 8, including the additional step: (c) firing said multilayered structure at a second temperature in an inert or reducing atmosphere, said second temperature being greater than or equal to the temperature at which the glass or ceramic components of the multilayer structure coalesce.
Claim 13
Independent Claim
44 words
A method of applying a polymeric coating to copper-based particles, wherein said coating is applied by precipitating a polymeric material from a solution of said polymeric material onto the surface of said copper-based particles suspended or dispersed in said solution of said polymeric material.
Claim 14
Independent Claim
44 words
A method of applying a polymeric coating to copper-based particles, wherein said coating is applied by precipitating a polymeric material from a solution of said polymeric material onto the surface of said copper-based particles suspended or dispersed in said solution of said polymeric material.
Claim 15
Dependent Claim
50 words
The method of Claim 11, wherein a non solvent for said polymeric material is added to said solution to cause said polymeric material to precipitate onto said copper-based particles, and said copper-based particles are treated with an adhesion promoter prior to precipitation of said polymeric material onto said copper-based particles.
Claim 16
Dependent Claim
36 words
The composition according to anyone of the preceding Claims, wherein said polymeric material is selected from the group consisting of polyimides, maleimides, polyquinoxalines, polyphenyls, acetylene-terminated polyimides, acetylene-terminated polyisoimides, copolymers comprising imide and siloxane moieties, and silicones.
References Cited (Backward Citations)
No citation records indexed.
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