Patent US4999280A successfully refreshed from Google Patents.
US4999280A
Expired / Lapsed
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Spray silylation of photoresist images
Assignee: International Business Machines Corp
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Filing: 1989-03-17
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Granted: 1991-03-12
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Expires: 2009-03-17
Abstract
Abstract Photoresist images are made resistant to reactive ion etching by treating them with a poly(dimethylsilazane).
Inventors
- 👤 Hiroyuki Hiraoka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 12:02
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/40; G03F7/405
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
38 words
A process for making a photoresist image resistant to reactive ion etching, said process comprising the steps of: i. coating the image with a poly(dimethylsilazane), ii. heating the coated image, and iii. rinsing the image with a solvent.
Claim 2
Dependent Claim
38 words
A process for making a photoresist image resistant to reactive ion etching, said process comprising the steps of: i. coating the image with a poly(dimethylsilazane), ii. heating the coated image, and iii. rinsing the image with a solvent.
Claim 3
Dependent Claim
14 words
A process as claimed in claim 1 wherein the coating is applied by spraying.
Claim 4
Dependent Claim
15 words
A process as claimed in claim 1 wherein the coating is applied in a solvent.
Claim 5
Dependent Claim
13 words
A process as claimed in claim 1 wherein the photoresist is phenolic resin.
Claim 6
Dependent Claim
14 words
A process as claimed in claim 4 wherein the photoresist is a novolac resin.
Claim 7
Dependent Claim
13 words
A process as claimed in claim 4 wherein the photoresist is a poly(p-hydroxystyrene).
Claim 8
Dependent Claim
14 words
A process as claimed in claim 1 wherein the poly(dimethylsilazane) is an oligomeric liquid.
Claim 9
Dependent Claim
12 words
A process as claimed in 5 wherein the poly(dimethylsilazane) is methoxy terminated.
Claim 10
Dependent Claim
20 words
A process as claimed in claim 1 wherein the heating is for about half an hour at about 95° C.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-03-11 | 1994-09-10 | 1995-03-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-03-11 | 1998-09-10 | 1999-03-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-03-11 | 2002-09-10 | 2003-03-12 | $7700.00 | Window Closed / Lapsed |