US4552833A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Radiation sensitive and oxygen plasma developable resist
Assignee: International Business Machines Corp
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Filing: 1984-05-14
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Granted: 1985-11-12
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Expires: 2004-05-14
Abstract
Abstract A negative tone resist image is achieved by (1) coating a substrate with a film of a polymer containing a masked, reactive functionality; (2) imagewise exposing the film to radiation in a fashion such that the masked functionality is liberated; (3) contacting the film with an organometallic reagent; (4) developing the relief image by the oxygen plasma etching.
Inventors
- 👤 Hiroshi Ito
- 👤 Scott A. MacDonald
- 👤 Robert D. Miller
- 👤 Carlton G. Willson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 10:30
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/26; G03F7/265; G03F7/36
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
74 words
A process for generating a negative tone resist image comprising the steps of: (1) coating a substrate with a film of a polymer that contains a masked reactive functionality; (2) imagewise exposing said film to radiation under conditions that cause unmasking of the reactive functionality in the exposed regions of the film; (3) treating the exposed film with a reactive organometallic reagent; and (4) developing the relief image by treatment with an oxygen plasma.
Claim 2
Dependent Claim
74 words
A process for generating a negative tone resist image comprising the steps of: (1) coating a substrate with a film of a polymer that contains a masked reactive functionality; (2) imagewise exposing said film to radiation under conditions that cause unmasking of the reactive functionality in the exposed regions of the film; (3) treating the exposed film with a reactive organometallic reagent; and (4) developing the relief image by treatment with an oxygen plasma.
Claim 3
Dependent Claim
18 words
A process as claimed in claim 1 wherein the masking group is removed directly by exposure to radiation.
Claim 4
Dependent Claim
32 words
A process as claimed in claim 1 wherein the polymer contains an acid labile group pendant from the polymer backbone, and the film contains a monomeric species that liberates acid upon exposure.
Claim 5
Dependent Claim
12 words
A process as claimed in claim 2 wherein the polymer is poly(p-formyloxystyrene).
Claim 6
Dependent Claim
12 words
A process as claimed in claim 3 wherein the polymer is poly(t-butylmethacrylate).
Claim 7
Dependent Claim
13 words
A process as claimed in claim 3 wherein the polymer is poly(t-butyloxycarbonyloxy styrene).
Claim 8
Dependent Claim
15 words
A process as claimed in claim 3 wherein the monomeric species is an onium salt.
Claim 9
Dependent Claim
13 words
A process as in claim 3 wherein the monomeric species is triphenylsulfonium hexafluoroarsenate.
Claim 10
Dependent Claim
14 words
A process as claimed in claim 3 wherein the monomeric species is triphenylsulfonium hexafluoroantimonate.
Claim 11
Dependent Claim
14 words
A process as claimed in claim 1 wherein the organometallic reagent is an organosilane.
Claim 12
Dependent Claim
14 words
A process as claimed in claim 1 wherein the organometallic reagent is an organostannane.
Claim 13
Dependent Claim
13 words
A process as claimed in claim 1 wherein the organometallic reagent is hexamethyldisilazane.
Claim 14
Dependent Claim
15 words
A process as claimed in claim 1 wherein the organometallic reagent is trimethyl silyl chloride.
Claim 15
Dependent Claim
29 words
A process as claimed in claim 1 wherein a thick film of unsensitized polymer is positioned between the substrate and the film of polymer containing a masked reactive functionality.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-11-11 | 1989-05-13 | 1989-11-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-11-11 | 1993-05-13 | 1993-11-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-11-11 | 1997-05-13 | 1997-11-12 | $7700.00 | Window Closed / Lapsed |