EP0198215A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
A process for rendering a polymeric material resistant to an oxygen-containing plasma
Assignee: International Business Machines Corp
•
Filing: 1986-03-11
•
Granted: —
•
Expires: 2006-03-11
Abstract
Abstract Polymeric material containing reactive hydrogen functional groups is rendered resistant to an oxygen-containing plasma by reacting the polymeric material with a multifunctional organometallic material such as hexamethylcyclotrisilazane containing at least two functional groups which are reactive with the reactive hydrogen functional groups of the polymeric material.
Inventors
- 👤 Edward Darko Babich
- 👤 Michael Hatzakis
- 👤 Scott Laurence Jacobs
- 👤 Juri Rostyslav Parasczcak
- 👤 Jane Margaret Shaw
- 👤 David Frank Witman
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-03 06:12
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/26; G03F7/265
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
55 words
A process for rendering a polymeric material containing reactive hydrogen functional groups or reactive hydrogen functional precursor groups re- sistarit to an oxygen-containing plasma, the process comprising reacting the polymeric material with a multifunctional organometallic material containing at least two functional groups which are reactive with the reactive hydrogen functional groups of the polymeric material.
Claim 2
Dependent Claim
55 words
A process for rendering a polymeric material containing reactive hydrogen functional groups or reactive hydrogen functional precursor groups re- sistarit to an oxygen-containing plasma, the process comprising reacting the polymeric material with a multifunctional organometallic material containing at least two functional groups which are reactive with the reactive hydrogen functional groups of the polymeric material.
Claim 3
Dependent Claim
38 words
A process as claimed in claim 1, wherein, after the reaction, the reacted polymeric material contains at least about 1 part by weight of the metallic component of the organometallic material per 20 parts of the polymeric material.
Claim 4
Dependent Claim
36 words
A process as claimed in claim 2, wherein the reacted polymeric material contains up to 1 part by weight of the metallic component of the organometallic material per 2 parts by weight of the polymeric material.
Claim 5
Dependent Claim
39 words
A process as claimed in claim 2, wherein the reacted polymeric material contains the metallic component of the organometallic material in a ratio of the metallic component to the polymeric material of about 1:15 to about 1:4, by weight.
Claim 6
Dependent Claim
16 words
A process as claimed in any preceding claim, wherein the organometallic material is cyclic organometallic material.
Claim 7
Dependent Claim
21 words
A process as claimed in claim 5, wherein the cyclic organometallic material has 4, 5 or 6 atoms in the ring.
Claim 8
Dependent Claim
15 words
A process as claimed in claim 5, wherein the organometallic material is an organosilicon material.
Claim 9
Dependent Claim
14 words
A process as claimed in claim 7, wherein the organometallic material - is hexamethylcyclotrisilazane.
Claim 10
Dependent Claim
16 words
A process as claimed in any preceding claim, wherein the polymeric material is a phenolic-formaldehyde polymer.
Claim 11
Dependent Claim
25 words
A process as claimed in any preceding claim, wherein the multifunctional organometallic material is dissolved in a solvent which is nonreactive with the organometallic material.
Claim 12
Dependent Claim
43 words
A process as claimed in claim 10, in which the solvent is a mixture containing a component which is a solvent for the polymeric material in an amount effective to decrease the reaction time between the multifunctional organometallic material and the polymeric material.
Claim 13
Dependent Claim
32 words
A process as claimed in claim 11, wherein the said component is present in an amount of about 0.01 to about 25% by volume based on the total amount of the solvent.
Claim 14
Dependent Claim
31 words
A process as claimed in claim 12, wherein the said component is present in an amount of about 025 to about 5% by volume based upon the total amount of solvent.
Claim 15
Dependent Claim
22 words
A process as claimed in any of claims 10 to 13, wherein the solvent comprises an aromatic hydrocarbon or substituted aromatic hydrocarbon.
Claim 16
Dependent Claim
31 words
A process as claimed in claim 14 when appendant to claim 8, in which the solvent comprises xylene containing a component for the polymeric material consisting of N-methylpyrrolidone or -r butyrolactone.
Claim 17
Dependent Claim
19 words
A process as claimed in any preceding claim, wherein the polymeric material is in the form of a layer.
Claim 18
Dependent Claim
21 words
A process as claimed in of claim 16, wherein the layer of polymeric material is about 0.3 to 25 microns thick.
Claim 19
Dependent Claim
21 words
A process as claimed in claim 17, wherein the layer of polymeric material is about 0.4 to about 10 microns thick.
Claim 20
Dependent Claim
21 words
A process as claimed in claim 18, wherein the layer of polymeric material is about 0.5 to about 5 microns thick.
Claim 21
Dependent Claim
31 words
A process as claimed in any of claims 16 to 19, wherein at least about 25% of the thickness of the layer of polymeric material is reacted with the organometallic material.
Claim 22
Dependent Claim
27 words
A process as claimed in claim 20, wherein at least about 50% of the thickness of the layer of polymeric material is reacted with the organometallic material.
Claim 23
Dependent Claim
29 words
A process as claimed in any of claims 16 to 19, wherein substantially the entire thickness of the layer of polymeric material is reacted with the . organometallic material.
Claim 24
Dependent Claim
20 words
A process as claimed in claim 16 to 22, wherein the layer of polymeric material is prebaked prior to reacting.
Claim 25
Dependent Claim
37 words
A process as claimed in any preceding claim, wherein the reacted polymeric material is at least about 20 times more resistant to an oxygen-containing plasma than the polymeric material is before the reaction with the organometallic material.
Claim 26
Dependent Claim
37 words
A process as claimed in claim 24, wherein the resistance of the reacted polymeric material to an oxygen-containing plasma is about 50 times more than that of the polymeric material before the reaction with the organometallic material.
Claim 27
Dependent Claim
39 words
A process as claimed in claim 24, wherein the resistance of the reacted polymeric material to an oxygen-containing plasma is at least about 100 times more than that of the polymeric material before the reaction with the organometallic material.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.