Patent JPS57136382A successfully refreshed from Google Patents.
Patent US4999082A successfully refreshed from Google Patents.
US4999082A
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US
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Process for producing monocrystalline group II-IV or group III-V compounds and products thereof
Assignee: Crystal Specialties Inc
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Filing: 1989-09-14
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Granted: 1991-03-12
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Expires: 2009-09-14
Abstract
Abstract This disclosure relates to a process for producing monocrystalline Group II-IV or Group III-V compounds from the polycrystalline form of said Group II-IV or Group III-V compound, said process comprising coating the interior surface of a crucible with a powdered solid having a melting point higher than the polycrystalline form of the compound, placing an amount of polycrystalline compound into the coated crucible, heating the crucible to produce a melt while maintaining the powder in solid form and cooling the crucible to produce a solid compound. The preferred powdered solid is pyrolitic boron nitride. The process may be used to produce, inter alia, semi-insulating gallium arsenide having a neutral EL2 concentration greater than or equal to about 0.85×10 16 cm -3 and a dislocation density between about 500 cm -2 and 7,800 cm -2 .
Inventors
- 👤 Russell E. Kremer
- 👤 David M. Francomano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 23:31
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/10; C30B29/46; C30B29/48; C30B11/00; C30B11/002; C30B29/40; C30B29/42; Y; Y10; Y10S; Y10S117/00; Y10S117/90
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
125 words
A process for producing monocrystalline Group II-VI or Group III-V compound from the polycrystalline form of said Group II-VI or Group III-V compound, said process comprising: (a) coating the interior surface of a crucible with a powdered solid, said powdered solid having a melting point higher than the melting point of said polycrystalline form of said compound, (b) placing an amount of Group II-VI or Group III-V polycrystalline compound into said coated crucible, (c) placing said coated crucible containing said compound into a heating means, (d) heating said coated crucible containing said compound to produce a melt of said compound within said crucible while maintaining said powdered solid in solid powered form, and (e) cooling said crucible and said compound to produce a monocrystalline compound.
Claim 2
Dependent Claim
125 words
A process for producing monocrystalline Group II-VI or Group III-V compound from the polycrystalline form of said Group II-VI or Group III-V compound, said process comprising: (a) coating the interior surface of a crucible with a powdered solid, said powdered solid having a melting point higher than the melting point of said polycrystalline form of said compound, (b) placing an amount of Group II-VI or Group III-V polycrystalline compound into said coated crucible, (c) placing said coated crucible containing said compound into a heating means, (d) heating said coated crucible containing said compound to produce a melt of said compound within said crucible while maintaining said powdered solid in solid powered form, and (e) cooling said crucible and said compound to produce a monocrystalline compound.
Claim 3
Dependent Claim
12 words
The process of claim 1 wherein said powdered solid is boron nitride.
Claim 4
Dependent Claim
56 words
The process of claim 1 wherein said coating step (a) further comprises (1) forming a slurry of said powdered solid and a liquid, (2) applying said slurry to the interior surfaces of said crucible, and (3) allowing said liquid to evaporate and thereby leave a deposit of powdered solid on the interior surfaces of said crucible.
Claim 5
Dependent Claim
16 words
The process of claim 1 wherein said Group II-VI or Group III-V compound is gallium arsenide.
Claim 6
Dependent Claim
41 words
A semi-insulating material comprised of a monocrystalline gallium arsenide having a neutral EL2 concentration between about 0.85×10 16 cm -3 and about 1.1×10 16 cm -3 and a dislocation density between about 500 cm -2 and about 7,800 cm -2 .
Claim 7
Dependent Claim
41 words
A semi-insulating material comprised of a monocrystalline gallium arsenide having a neutral EL2 concentration between about 0.85×10 16 cm -3 and about 1.1×10 16 cm -3 and a dislocation density between about 500 cm -2 and about 7,800 cm -2 .
Claim 8
Independent Claim
202 words
A method for producing in a vertically-oriented crucible a monocrystalline Group II-VI or Group III-V material from the polycrystalline precursor of said monocrystalline material, said method comprised of: (a) coating the interior surfaces of said crucible with a powdered solid having a melting point higher than the melting point of said polycrystalline precursor, (b) placing a monocrystalline seed in the bottom of said crucible, (c) loading the remainder of said crucible with said polycrystalline precursor, (d) placing said crucible in a vertically-oriented furnace, said furnace capable of producing an upper hot zone and a lower cool zone; (e) adjusting said furnace position and said upper hot zone temperature to enable heating of said polycrystalline material to form a melt while about the lower half of said monocrystalline seed remains in solid form; (f) setting the temperature in said lower cool zone below the melting point of said monocrystalline material while maintaining the temperature in the upper hot zone above said melting point to establish a solid-liquid interface, and (g) moving said furnace and said solid-liquid interface upward while substantially maintaining the temperature settings of step (f) to produce a solid monocrystalline material as said furnace and said solid-liquid interface move vertically upward.
Claim 9
Independent Claim
202 words
A method for producing in a vertically-oriented crucible a monocrystalline Group II-VI or Group III-V material from the polycrystalline precursor of said monocrystalline material, said method comprised of: (a) coating the interior surfaces of said crucible with a powdered solid having a melting point higher than the melting point of said polycrystalline precursor, (b) placing a monocrystalline seed in the bottom of said crucible, (c) loading the remainder of said crucible with said polycrystalline precursor, (d) placing said crucible in a vertically-oriented furnace, said furnace capable of producing an upper hot zone and a lower cool zone; (e) adjusting said furnace position and said upper hot zone temperature to enable heating of said polycrystalline material to form a melt while about the lower half of said monocrystalline seed remains in solid form; (f) setting the temperature in said lower cool zone below the melting point of said monocrystalline material while maintaining the temperature in the upper hot zone above said melting point to establish a solid-liquid interface, and (g) moving said furnace and said solid-liquid interface upward while substantially maintaining the temperature settings of step (f) to produce a solid monocrystalline material as said furnace and said solid-liquid interface move vertically upward.
Claim 10
Dependent Claim
17 words
The method of claim 6 wherein said monocrystalline Group II-VI or Group III-V material is gallium arsenide.
Claim 11
Dependent Claim
13 words
The method of claim 6 wherein said powdered solid is powdered boron nitride.
Claim 12
Dependent Claim
33 words
The method of claim 6 further comprising placing, prior to step (e), a carbon source inside said furnace yet outside said crucible, said carbon source being in fluid communication with said polycrystalline precursor.
Claim 13
Dependent Claim
127 words
A process for producing carbon-doped monocrystalline Group II-VI or Group III-V compound from the polycrystalline form of said Group II-VI or Group III-V compound, said process comprising: (a) placing an amount of polycrystalline compound into a crucible, said polycrystalline compound selected from the group consisting of Group II-VI compounds and Group III-V compounds, (b) placing said crucible containing polycrystalline compound into a furnace, (c) placing a carbon source inside said furnace and outside said crucible, said carbon source being in fluid communication with said polycrystalline compound, (d) supplying heat from said furnace to said crucible and said polycrystalline compound to produce a melt of said compound within said crucible, and (e) reducing the temperature of said furnace to cool said crucible to produce a carbon-doped monocrystalline compound.
Claim 14
Dependent Claim
127 words
A process for producing carbon-doped monocrystalline Group II-VI or Group III-V compound from the polycrystalline form of said Group II-VI or Group III-V compound, said process comprising: (a) placing an amount of polycrystalline compound into a crucible, said polycrystalline compound selected from the group consisting of Group II-VI compounds and Group III-V compounds, (b) placing said crucible containing polycrystalline compound into a furnace, (c) placing a carbon source inside said furnace and outside said crucible, said carbon source being in fluid communication with said polycrystalline compound, (d) supplying heat from said furnace to said crucible and said polycrystalline compound to produce a melt of said compound within said crucible, and (e) reducing the temperature of said furnace to cool said crucible to produce a carbon-doped monocrystalline compound.
Claim 15
Dependent Claim
39 words
The method of claim 10 further comprising, prior to step (a), coating the interior surfaces of the crucible with a powdered solid having a melting point higher than the melting point of said Group II-VI or Group III-V compound.
Claim 16
Dependent Claim
13 words
The method of claim 11 wherein said powdered solid is powdered boron nitride.
Claim 17
Dependent Claim
16 words
The process of claim 10 wherein said Group II-VI or Group III-V compound is gallium arsenide.
Claim 18
Dependent Claim
11 words
A carbon-doped monocrystalline compound produced by the process of claim 11.
Claim 19
Dependent Claim
140 words
A process for producing carbon-doped monocrystalline Group II-VI or Group III-V compound from the polycrystalline form of said Group II-VI or Group III-V compound, said process comprising: (a) placing a monocrystalline seed into a crucible, (b) placing an amount of polycrystalline compound into the crucible, said polycrystalline compound selected from the group consisting of Group II-VI compounds and Group III-V compounds, (c) placing said crucible containing polycrystalline compound into a quartz ampoule, (d) placing a carbon source inside said ampoule yet outside said crucible, said carbon source being in fluid communication with said polycrystalline compound, (e) sealing said ampoule, (f) placing said sealed ampoule into a furnace, (g) increasing the temperature of said furnace to produce a melt of said polycrystalline compound, and (h) decreasing the temperature of said furnace to cool said melt and produce a carbon-doped monocrystalline compound.
Claim 20
Dependent Claim
140 words
A process for producing carbon-doped monocrystalline Group II-VI or Group III-V compound from the polycrystalline form of said Group II-VI or Group III-V compound, said process comprising: (a) placing a monocrystalline seed into a crucible, (b) placing an amount of polycrystalline compound into the crucible, said polycrystalline compound selected from the group consisting of Group II-VI compounds and Group III-V compounds, (c) placing said crucible containing polycrystalline compound into a quartz ampoule, (d) placing a carbon source inside said ampoule yet outside said crucible, said carbon source being in fluid communication with said polycrystalline compound, (e) sealing said ampoule, (f) placing said sealed ampoule into a furnace, (g) increasing the temperature of said furnace to produce a melt of said polycrystalline compound, and (h) decreasing the temperature of said furnace to cool said melt and produce a carbon-doped monocrystalline compound.
Claim 21
Dependent Claim
39 words
The process of claim 15 further comprising, prior to step (a), coating the interior surfaces of the crucible with a powdered solid having a melting point higher than the melting point of said Group II-VI or Group III-V compound.
Claim 22
Dependent Claim
13 words
The process of claim 11 wherein said powdered solid is powdered boron nitride.
Claim 23
Dependent Claim
16 words
The process of claim 17 wherein said Group II-VI or Group III-V compound is gallium arsenide.
Claim 24
Dependent Claim
16 words
A carbon-doped monocrystalline Group II-VI or Group III-V compound produced by the process of claim 15.
Claim 25
Dependent Claim
39 words
A semi-insulating material comprised of a monocrystalline gallium arsenide having a neutral EL2 concentration between about 0.85×10 16 cm -3 and 1.5×10 16 cm -3 and a dislocation density between about 500 cm -2 and 7,800 cm -2 .
Claim 26
Dependent Claim
39 words
A semi-insulating material comprised of a monocrystalline gallium arsenide having a neutral EL2 concentration between about 0.85×10 16 cm -3 and 1.5×10 16 cm -3 and a dislocation density between about 500 cm -2 and 7,800 cm -2 .
Claim 27
Dependent Claim
39 words
A semi-insulating material comprised of a monocrystalline gallium arsenide having a neutral EL2 concentration between about 0.85×10 16 cm -3 and 1.2×10 16 cm -3 and a dislocation density between about 500 cm -2 and 7,800 cm -2 .
Claim 28
Dependent Claim
39 words
A semi-insulating material comprised of a monocrystalline gallium arsenide having a neutral EL2 concentration between about 0.85×10 16 cm -3 and 1.2×10 16 cm -3 and a dislocation density between about 500 cm -2 and 7,800 cm -2 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-03-11 | 1994-09-10 | 1995-03-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-03-11 | 1998-09-10 | 1999-03-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-03-11 | 2002-09-10 | 2003-03-12 | $7700.00 | Window Closed / Lapsed |