US4996627A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High sensitivity miniature pressure transducer
Assignee: Ashcroft Nagano Inc
•
Filing: 1989-01-30
•
Granted: 1991-02-26
•
Expires: 2009-01-30
Abstract
Abstract A miniature transducer having an ultrathin tensioned silicon diaphragm so as to be responsive to extremely small changes in pressure. A silicon wafer is masked to define diaphragm areas, and etched to form a setback or capacitor gap a predefined depth. The mask is removed, and the entire silicon wafer is etched a second time to achieve the desired diaphragm thickness. The first and second etches are carried out independently, and thus the capacitor gap and diaphragm thickness can be independently formed. Mask and metallizing steps are carried out on glass wafers, and sandwiched around the processed semiconductor wafer, whereupon a large number of the miniature transducers are fabricated simultaneously. Unique patterning, etching and metallizing steps carried out on the sandwich structure allow a number of quadrature unit cells to be formed, thereby maximizing the area of the semiconductor and glass structures. By proper selection of materials, the diaphragm is tensioned during the fabrication of the transducer structures.
Inventors
- 👤 Arthur R. Zias
- 👤 Barry Block
- 👤 Kenneth W. Mapes
- 👤 Norman L. Nystrom
- 👤 Robert M. Cadwell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 12:11
CPC Classifications
G; G01; G01L; G01L9/00; G01L9/0041; G01L9/0072; G01L9/0073; G01L9/0042
Claims Analysis
Total Claims: 334
Claim 1
Independent Claim
81 words
A method for fabricating semiconductor diaphragms adapted for use in transducer apparatus, comprising the steps of: patterning a semiconductor wafer with an etch mask having openings defining diaphragm areas for said wafer; etching the patterned semiconductor wafer to a predefined depth to define a setback gap; removing the etch mask to provide an unmasked semiconductor surface; and etching said semiconductor surface with a quaternary ammonium hydroxide to form a desired diaphragm thickness and to provide specular surfaces adapted for electrostatic sealing.
Claim 2
Independent Claim
81 words
A method for fabricating semiconductor diaphragms adapted for use in transducer apparatus, comprising the steps of: patterning a semiconductor wafer with an etch mask having openings defining diaphragm areas for said wafer; etching the patterned semiconductor wafer to a predefined depth to define a setback gap; removing the etch mask to provide an unmasked semiconductor surface; and etching said semiconductor surface with a quaternary ammonium hydroxide to form a desired diaphragm thickness and to provide specular surfaces adapted for electrostatic sealing.
Claim 3
Dependent Claim
15 words
The method of claim 1, further including etching said semiconductor material with tetramethyl ammonium hydroxide.
Claim 4
Dependent Claim
15 words
The method of claim 1, further including processing single crystal silicon as said semiconductor material.
Claim 5
Dependent Claim
15 words
The method of claim 1, further including masking said semiconductor material with a silicon dioxide.
Claim 6
Dependent Claim
14 words
The method of claim 4, further including patterning said silicon dioxide with a photoresist.
Claim 7
Dependent Claim
19 words
The method of claim 1, further including etching said semiconductor material about 5-20 microns to define said setback gap.
Claim 8
Dependent Claim
21 words
The method of claim 1, further including patterning and etching said semiconductor to provide micromachined planar surfaces around each said diaphragm.
Claim 9
Dependent Claim
23 words
The method of claim 7, further including etching the semiconductor material a second time to define a diaphragm thickness of about 3-20 microns.
Claim 10
Dependent Claim
20 words
The method of claim 1, further including starting with a silicon semiconductor wafer of about 100 microns thick or less.
Claim 11
Dependent Claim
22 words
The method of claim 1, further including patterning and etching opposing sides of the semiconductor wafer to provide cross-sectionally symmetrical diaphragm structures.
Claim 12
Dependent Claim
29 words
The method of claim 1, further including patterning an area on the semiconductor material to prevent etching thereof and thereby provide rigidity so that the wafer can be handled.
Claim 13
Dependent Claim
26 words
The method of claim 11, further including masking an area about a peripheral edge of the semiconductor material to define a rim for providing said rigidity.
Claim 14
Dependent Claim
14 words
A transducer having a diaphragm fabricated in accordance with the method of claim 1.
Claim 15
Independent Claim
89 words
A method for fabricating semiconductor diaphragms adapted for use in transducer apparatus, comprising the steps of: pattering by masking a thin semiconductor wafer on opposing planar sides thereof to define spaced apart diaphragm areas; etching the semiconductor wafer a first time to remove exposed semiconductor material to a desired depth to define a setback gap; removing the mask; and etching the semiconductor wafer on both sides a second time to uniformly remove semiconductor material to a depth for achieving a desired diaphragm thickness substantially independently of said setback gap.
Claim 16
Independent Claim
89 words
A method for fabricating semiconductor diaphragms adapted for use in transducer apparatus, comprising the steps of: pattering by masking a thin semiconductor wafer on opposing planar sides thereof to define spaced apart diaphragm areas; etching the semiconductor wafer a first time to remove exposed semiconductor material to a desired depth to define a setback gap; removing the mask; and etching the semiconductor wafer on both sides a second time to uniformly remove semiconductor material to a depth for achieving a desired diaphragm thickness substantially independently of said setback gap.
Claim 17
Dependent Claim
32 words
The method of claim 14, further including carrying out the second etch with a quaternary ammonium hydroxide to thereby achieve a very smooth surface at least in areas surrounding the diaphragm areas.
Claim 18
Dependent Claim
29 words
The method of claim 14, further including preventing an area of said wafer from being etched during said process to thereby provide a degree of rigidity to said wafer.
Claim 19
Dependent Claim
20 words
The method of claim 14, further including carrying out said first etch and said second etch with tetramethyl ammonium hydroxide.
Claim 20
Dependent Claim
42 words
The method of claim 14, further including etching the semiconductor wafer said first time to achieve a setback gap of about 25 microns, or less, and etching the semiconductor wafer said second time to achieve a diaphragm thickness of about 15 microns.
Claim 21
Dependent Claim
14 words
A transducer having a diaphragm fabricated in accordance with the method of claim 14.
Claim 22
Independent Claim
87 words
A method for fabricating a semiconductor material to provide a plurality of uniform diaphragms, comprising the steps of: patterning opposing surfaces of a semiconductor wafer with a mask to define a plurality of diaphragm areas; etching both sides of the semiconductor wafer at the patterned areas to define a desired setback depth; removing the etch mask; and micromachining both sides of the semiconductor wafer to achieve a desired diaphragm thickness and to provide semiconductor support areas surrounding each said diaphragm with a surface adapted for electrostatic sealing.
Claim 23
Independent Claim
87 words
A method for fabricating a semiconductor material to provide a plurality of uniform diaphragms, comprising the steps of: patterning opposing surfaces of a semiconductor wafer with a mask to define a plurality of diaphragm areas; etching both sides of the semiconductor wafer at the patterned areas to define a desired setback depth; removing the etch mask; and micromachining both sides of the semiconductor wafer to achieve a desired diaphragm thickness and to provide semiconductor support areas surrounding each said diaphragm with a surface adapted for electrostatic sealing.
Claim 24
Dependent Claim
15 words
The method of claim 20, further including patterning, etching and micromachining a silicon semiconductor wafer.
Claim 25
Dependent Claim
17 words
The method of claim 20, further including micromachining said semiconductor wafer with a quaternary ammonium hydroxide etchant.
Claim 26
Dependent Claim
25 words
The method of claim 20, further including etching both sides of the semiconductor wafer to achieve a setback depth of less than about 50 microns.
Claim 27
Dependent Claim
22 words
The method of claim 20, further including micromachining the semiconductor wafer to achieve a diaphragm thickness of about 10 microns, or less.
Claim 28
Independent Claim
44 words
A method for fabricating semiconductor diaphragms adapted for use in transducer apparatus, comprising the steps of: masking a wafer of material to define plural diaphragm areas; and processing said wafer to form thin diaphragm areas and thicker areas peripheral to each said diaphragm area.
Claim 29
Independent Claim
44 words
A method for fabricating semiconductor diaphragms adapted for use in transducer apparatus, comprising the steps of: masking a wafer of material to define plural diaphragm areas; and processing said wafer to form thin diaphragm areas and thicker areas peripheral to each said diaphragm area.
Claim 30
Dependent Claim
22 words
The method of claim 25, further including processing opposing sides of said wafer with essentially identical steps to form said diaphragm areas.
Claim 31
Dependent Claim
43 words
The method of claim 26, further including etching a masked said wafer to define a setback dimension of each said diaphragm area, and then etching an unmasked said wafer to define a thickness of each diaphragm area without substantially affecting the setback dimension.
Claim 32
Dependent Claim
23 words
The method of claim 27, further including removing substantially all mask material from opposing sides of said wafer for etching said unmasked wafer.
Claim 33
Dependent Claim
37 words
The method of claim 28, further including leaving a portion of said wafer masked so as to prevent etching of a portion of said wafer and thereby provide a support structure to enhance rigidity of said wafer.
Claim 34
Dependent Claim
19 words
The method of claim 29, further including processing a semiconductor wafer having a diameter greater than about three inches.
Claim 35
Dependent Claim
15 words
A semiconductor wafer having plural diaphragms fabricated in accordance with the method of claim 23.
Claim 36
Independent Claim
75 words
A method for fabricating transducer diaphragms, comprising the steps of: forming a bilayer wafer of semiconductor material having a p-type material layer and an n-type material layer; removing one said material layer to form a thin semiconductor layer; patterning by masking said thin layer to define diaphragm areas; etching said thin layer to form a setback gap; removing said patterning mask; and uniformly etching said unmasked thin layer until a desired diaphragm thickness is achieved.
Claim 37
Independent Claim
75 words
A method for fabricating transducer diaphragms, comprising the steps of: forming a bilayer wafer of semiconductor material having a p-type material layer and an n-type material layer; removing one said material layer to form a thin semiconductor layer; patterning by masking said thin layer to define diaphragm areas; etching said thin layer to form a setback gap; removing said patterning mask; and uniformly etching said unmasked thin layer until a desired diaphragm thickness is achieved.
Claim 38
Dependent Claim
24 words
The method of claim 32, wherein said bilayer is formed by growing an epitaxial layer of semiconductor material on a single crystal semiconductor wafer.
Claim 39
Dependent Claim
26 words
The method of claim 32, wherein said bilayer is formed by diffusing an impurity of a first type into a semiconductor wafer of a second type.
Claim 40
Dependent Claim
18 words
The method of claim 32, wherein said masking step is carried out by forming and patterning silicon dioxide.
Claim 41
Dependent Claim
16 words
The method of claim 35, further including etching said semiconductor material with a quaternary ammonium hydroxide.
Claim 42
Dependent Claim
15 words
The method of claim 36, further including forming said bilayer with an epitaxial n-type layer.
Claim 43
Dependent Claim
25 words
The method of claim 32, further including masking an area of said material layer to prevent removal thereof, thereby enhancing rigidity of said thin layer.
Claim 44
Dependent Claim
60 words
A semiconductor wafer fabricated for use with transducers, comprising: a plurality of diaphragm areas defined in said semiconductor wafer; and a removable punch-out area associated with each said diaphragm, said punch-out area having a peripheral thinned area and a central unthinned area so as to be easily fractured when pressure is applied to the central part of said punch-out area.
Claim 45
Dependent Claim
60 words
A semiconductor wafer fabricated for use with transducers, comprising: a plurality of diaphragm areas defined in said semiconductor wafer; and a removable punch-out area associated with each said diaphragm, said punch-out area having a peripheral thinned area and a central unthinned area so as to be easily fractured when pressure is applied to the central part of said punch-out area.
Claim 46
Dependent Claim
19 words
The semiconductor wafer of claim 39, wherein said removable punch-out area includes a circular trench formed in said wafer.
Claim 47
Dependent Claim
20 words
The semiconductor wafer of claim 40, further including a pair of aligned trenches formed in opposing surfaces of said wafer.
Claim 48
Dependent Claim
24 words
The semiconductor wafer of claim 39, wherein said peripheral thinned area has a thickness substantially the same as a thickness of said diaphragm area.
Claim 49
Dependent Claim
97 words
A processed wafer, comprising: a wafer having a plurality of first areas defining a plurality of diaphragm areas spaced about said wafer, said diaphragm areas being defined as recessed areas in said wafer and thinned to define a diaphragm thickness, and a second area defining a support area surrounding each said diaphragm area and having a thickness greater than said diaphragm thickness, and a third area having a thickness greater than said second area for providing rigidity to said wafer to enhance handling thereof, said first, second and third areas being formed from the same said wafer.
Claim 50
Dependent Claim
97 words
A processed wafer, comprising: a wafer having a plurality of first areas defining a plurality of diaphragm areas spaced about said wafer, said diaphragm areas being defined as recessed areas in said wafer and thinned to define a diaphragm thickness, and a second area defining a support area surrounding each said diaphragm area and having a thickness greater than said diaphragm thickness, and a third area having a thickness greater than said second area for providing rigidity to said wafer to enhance handling thereof, said first, second and third areas being formed from the same said wafer.
Claim 51
Dependent Claim
20 words
The wafer of claim 43, wherein said third area defines a support structure formed in a matrix about said wafer.
Claim 52
Dependent Claim
19 words
The wafer of claim 43, wherein said third area defines a ring around a peripheral edge of said wafer.
Claim 53
Dependent Claim
11 words
The wafer of claim 43, wherein said wafer material comprises silicon.
Claim 54
Dependent Claim
17 words
The wafer of claim 46, further including an electrical contact formed in association with each said diaphragm.
Claim 55
Dependent Claim
19 words
The wafer of claim 46, further including a pair of electrical contacts formed in association with each said diaphragm.
Claim 56
Dependent Claim
17 words
The wafer of claim 46, further including a p-n junction formed in association with each said diaphragm.
Claim 57
Dependent Claim
15 words
The wafer of claim 43, further including a plurality of holes formed through said wafer.
Claim 58
Dependent Claim
30 words
The wafer of claim 50, further including forming said diaphragms in wafer areas so as to define a die, and forming said holes at a common corner of said die.
Claim 59
Dependent Claim
10 words
The wafer of claim 43, further including micromachined support areas.
Claim 60
Independent Claim
79 words
A method for fabricating diaphragms adapted for use in transducer apparatus, comprising the steps of: masking a wafer of material to define diaphragm areas; processing said wafer to form thin diaphragm areas and thicker areas peripheral to each said diaphragm area; and processing said wafer to form a rigid support area to said thin wafer for handling, said rigid support being thicker than said areas peripheral to said diaphragms to thereby provide said wafer with rigidity for handling purposes.
Claim 61
Independent Claim
79 words
A method for fabricating diaphragms adapted for use in transducer apparatus, comprising the steps of: masking a wafer of material to define diaphragm areas; processing said wafer to form thin diaphragm areas and thicker areas peripheral to each said diaphragm area; and processing said wafer to form a rigid support area to said thin wafer for handling, said rigid support being thicker than said areas peripheral to said diaphragms to thereby provide said wafer with rigidity for handling purposes.
Claim 62
Dependent Claim
22 words
The method of claim 53, further including processing a semiconductor wafer having a beginning thickness of no more than about 40 mils.
Claim 63
Dependent Claim
13 words
The method of claim 53, further including processing a single crystal silicon wafer.
Claim 64
Dependent Claim
48 words
The method of claim 55, further including masking a predefined area of said silicon material with silicon dioxide, and leaving said silicon dioxide mask on the wafer throughout the processing steps so that masked silicon areas are not thinned and said wafer retains a certain amount of rigidity.
Claim 65
Dependent Claim
26 words
The method of claim 53, further including masking a peripheral edge of said wafer to prevent etching to thereby provide a circumferential support to said wafer.
Claim 66
Dependent Claim
21 words
The method of claim 53, further including masking portions of opposing sides of said wafer to prevent removal of wafer material.
Claim 67
Dependent Claim
11 words
A transducer fabricated in accordance with the method of claim 53.
Claim 68
Dependent Claim
51 words
A processed wafer, comprising: a wafer having a plurality of areas defining diaphragms; a plurality of areas circumscribing said diaphragm areas which are electrostatically sealable to other material surfaces; and a support rim circumscribing said wafer, said rim being thicker than the areas circumscribing the diaphragm areas to enhance rigidity thereof.
Claim 69
Dependent Claim
51 words
A processed wafer, comprising: a wafer having a plurality of areas defining diaphragms; a plurality of areas circumscribing said diaphragm areas which are electrostatically sealable to other material surfaces; and a support rim circumscribing said wafer, said rim being thicker than the areas circumscribing the diaphragm areas to enhance rigidity thereof.
Claim 70
Dependent Claim
11 words
The processed wafer of claim 60, wherein said wafer comprises silicon.
Claim 71
Dependent Claim
36 words
The processed wafer of claim 60, further including holes formed through said wafer so that when said wafer is sandwiched to another material wafer, access can be made through said holes to said other material wafer.
Claim 72
Dependent Claim
15 words
The processed wafer of claim 60, further including micromachined areas to provide electrostatically sealable surfaces.
Claim 73
Dependent Claim
37 words
A semiconductor wafer, comprising: a wafer of epitaxial semiconductor material substantially unsupported in a central region thereof by other material layers, said wafer having epitaxial semiconductor material on opposing faces thereof and uniform epitaxial semiconductor material therethrough.
Claim 74
Dependent Claim
37 words
A semiconductor wafer, comprising: a wafer of epitaxial semiconductor material substantially unsupported in a central region thereof by other material layers, said wafer having epitaxial semiconductor material on opposing faces thereof and uniform epitaxial semiconductor material therethrough.
Claim 75
Dependent Claim
16 words
The semiconductor wafer of claim 64, further including a support for enhancing rigidity of said wafer.
Claim 76
Dependent Claim
15 words
The semiconductor wafer of claim 65, wherein said support comprises single crystal non-epitaxial silicon material.
Claim 77
Dependent Claim
29 words
The semiconductor wafer of claim 66, wherein said epitaxial wafer is doped with a first conductivity type impurity, and said support is doped with a different conductivity type impurity.
Claim 78
Dependent Claim
18 words
The semiconductor wafer of claim 65, wherein said wafer has a thickness of less than about 50 microns.
Claim 79
Dependent Claim
14 words
The semiconductor wafer of claim 64, wherein said wafer is doped with an impurity.
Claim 80
Dependent Claim
18 words
The semiconductor wafer of claim 64, wherein said epitaxial wafer has formed therein a plurality of transducer diaphragms.
Claim 81
Dependent Claim
18 words
The semiconductor wafer of claim 64, wherein said epitaxial wafer has a diameter greater than about three inches.
Claim 82
Independent Claim
42 words
A method for forming uniform thickness semiconductor wafers, comprising the steps of: forming an epitaxial layer of uniform thickness silicon material on a single crystal silicon substrate wafer; and removing the single crystal substrate wafer material thereby leaving said epitaxial silicon material.
Claim 83
Independent Claim
42 words
A method for forming uniform thickness semiconductor wafers, comprising the steps of: forming an epitaxial layer of uniform thickness silicon material on a single crystal silicon substrate wafer; and removing the single crystal substrate wafer material thereby leaving said epitaxial silicon material.
Claim 84
Dependent Claim
19 words
The method of claim 72, further including forming a support to said epitaxial silicon material to enhance rigidity thereof.
Claim 85
Dependent Claim
18 words
The method of claim 72, further including forming said layer and said wafer of different conductivity type impurities.
Claim 86
Dependent Claim
25 words
The method of claim 74, further including electroetching said composite structure so as to selectively remove said wafer material without substantially removing said epitaxial material.
Claim 87
Dependent Claim
29 words
The method of claim 75, further including masking a portion of said wafer so as to be insensitive to said electroetch, thereby forming said support to said epitaxial material.
Claim 88
Dependent Claim
17 words
The method of claim 75, further including etching said wafer material with a quaternary ammonium hydroxide etchant.
Claim 89
Dependent Claim
18 words
The method of claim 77, further including forming an alkali metal on a face of said epitaxial material.
Claim 90
Independent Claim
96 words
A method for processing a reinforced semiconductor wafer, comprising the steps of: forming an epitaxial semiconductor layer of a first conductivity type on a semiconductor substrate wafer of a second conductivity type; masking areas of the substrate wafer desired to be etch protected and masking substantially the entire surface area of the epitaxial layer, thereby defining a support structure to said wafer; removing the unmasked areas of the substrate wafer until the epitaxial first type conductivity semiconductor material is exposed on the etched face; and processing said first conductivity type semiconductor layer for forming elements therein.
Claim 91
Independent Claim
96 words
A method for processing a reinforced semiconductor wafer, comprising the steps of: forming an epitaxial semiconductor layer of a first conductivity type on a semiconductor substrate wafer of a second conductivity type; masking areas of the substrate wafer desired to be etch protected and masking substantially the entire surface area of the epitaxial layer, thereby defining a support structure to said wafer; removing the unmasked areas of the substrate wafer until the epitaxial first type conductivity semiconductor material is exposed on the etched face; and processing said first conductivity type semiconductor layer for forming elements therein.
Claim 92
Dependent Claim
24 words
The method of claim 79, further including forming a substrate wafer ring around a peripheral edge of said semiconductor layer to provide rigidity thereto.
Claim 93
Dependent Claim
39 words
The method of claim 79, further including preparing said epitaxial layer for forming diaphragms therein, whereby said epitaxial layer is formed to a thickness of about that of a desired diaphragm thickness plus about twice a desired gap depth.
Claim 94
Dependent Claim
37 words
The method of claim 79, further including carrying out the step of removing the unmasked area of substrate wafer with an etch which is selective with respect to the first and second conductivity types of semiconductor material.
Claim 95
Dependent Claim
39 words
The method of claim 79, further including fixing a glass substrate of a given diameter to an unrimmed side of said semiconductor layer, and fixing another glass substrate of a smaller diameter to a rimmed surface of said layer.
Claim 96
Dependent Claim
25 words
The method of claim 83, further including fixing glass substrates to said epitaxial layer which are substantially thicker than a diaphragm area of said layer.
Claim 97
Dependent Claim
43 words
A transducer, comprising: a conductive capacitor plate; a semiconductor diaphragm defining a deflectable capacitor plate spaced apart from said fixed capacitor plate; and a support structure encircling said semiconductor diaphragm and attached thereto for maintaining said deflectable diaphragm radially tensioned a predefined amount.
Claim 98
Dependent Claim
43 words
A transducer, comprising: a conductive capacitor plate; a semiconductor diaphragm defining a deflectable capacitor plate spaced apart from said fixed capacitor plate; and a support structure encircling said semiconductor diaphragm and attached thereto for maintaining said deflectable diaphragm radially tensioned a predefined amount.
Claim 99
Dependent Claim
22 words
The transducer of claim 85, further including a support substrate for supporting said fixed capacitor plate with respect to said deflectable diaphragm.
Claim 100
Dependent Claim
20 words
The transducer of claim 86, wherein said support substrate comprises said support structure which also maintains said semiconductor diaphragm tensioned.
Claim 101
Dependent Claim
27 words
The transducer of claim 87, further including a thick semiconductor material circumscribing said diaphragm, and said support substrate maintains said diaphragm tensioned through said thick semiconductor material.
Claim 102
Dependent Claim
17 words
The transducer of claim 86, wherein said support substrate has a thickness greater than about 20 mils.
Claim 103
Dependent Claim
25 words
The transducer of claim 85, further including a pair of said support structures, each supporting a fixed capacitor plate with respect to said deflectable diaphragm.
Claim 104
Dependent Claim
11 words
The transducer of claim 85, wherein said semiconductor diaphragm comprises silicon.
Claim 105
Dependent Claim
35 words
The transducer of claim 85, wherein said support structure and said semiconductor diaphragm are constructed of materials having different thermal expansion and contraction properties so that a predefined tension can be imparted to said diaphragm.
Claim 106
Dependent Claim
16 words
The transducer of claim 85, wherein said diaphragm has a thickness less than about 20 microns.
Claim 107
Dependent Claim
52 words
In a transducer of the type having a diaphragm which is deflectable in response to an input, the improvement comprising: a diaphragm constructed of a semiconductor material; and a mechanism for maintaining said diaphragm in a tensioned state such that said diaphragm is substantially radially flat in the absence of said input.
Claim 108
Dependent Claim
52 words
In a transducer of the type having a diaphragm which is deflectable in response to an input, the improvement comprising: a diaphragm constructed of a semiconductor material; and a mechanism for maintaining said diaphragm in a tensioned state such that said diaphragm is substantially radially flat in the absence of said input.
Claim 109
Dependent Claim
40 words
The improved transducer of claim 94, wherein said tensioning mechanism comprises a first material having a defined thermal expansion fixed with respect to a semiconductor material from which said diaphragm is formed, said semiconductor material having a different thermal expansion.
Claim 110
Dependent Claim
19 words
The improved transducer of claim 95, further including an electrostatic seal between said first material and said semiconductor material.
Claim 111
Dependent Claim
18 words
The improved transducer of claim 95, wherein said first material comprises glass, and said semiconductor material comprises silicon.
Claim 112
Dependent Claim
23 words
The improved transducer of claim 94, wherein said tensioning mechanism comprises a net transfer of volumetric material such that such diaphragm is tensioned.
Claim 113
Dependent Claim
26 words
The improved transducer of claim 94, wherein said tensioning mechanism comprises a pretensioned diaphragm affixed to a support structure such that the diaphragm remains tensioned thereafter.
Claim 114
Dependent Claim
31 words
The improved transducer of claim 94, wherein said semiconductor diaphragm is formed on a wafer with a plurality of other diaphragms, each transducer being fabricated substantially simultaneously with a pretensioned diaphragm.
Claim 115
Dependent Claim
16 words
The improved transducer of claim 94, wherein said diaphragm is constructed of a silicon semiconductor material.
Claim 116
Dependent Claim
57 words
A multiple transducer structure, comprising: a top support substrate; a bottom support substrate; a semiconductor wafer having a plurality of recessed areas defining diaphragms, said wafer being sandwiched between said top and bottom support substrates; a tension in each said diaphragm; and an electrostatic seal substantially circumscribing each said diaphragm to said top and bottom support substrates.
Claim 117
Dependent Claim
57 words
A multiple transducer structure, comprising: a top support substrate; a bottom support substrate; a semiconductor wafer having a plurality of recessed areas defining diaphragms, said wafer being sandwiched between said top and bottom support substrates; a tension in each said diaphragm; and an electrostatic seal substantially circumscribing each said diaphragm to said top and bottom support substrates.
Claim 118
Dependent Claim
24 words
The transducer structure of claim 102, wherein said semiconductor wafer includes a plurality of holes therethrough for providing access to said bottom support substrate.
Claim 119
Dependent Claim
21 words
The transducer structure of claim 102, further including conductive paths defining a sealing grid on the top and bottom support substrates.
Claim 120
Dependent Claim
39 words
The transducer structure of claim 102, wherein said top and bottom support substrates both comprise a glass having a different thermal expansion characteristic then that of said semiconductor wafer in a temperature range in which the transducer is fabricated.
Claim 121
Dependent Claim
18 words
The transducer structure of claim 105, wherein said glass support substrates are substantially thicker than said semiconductor wafer.
Claim 122
Independent Claim
80 words
A method for fabricating a pretensioned diaphragm, comprising the steps of: fabricating a diaphragm structure from a first type of material; fabricating a support structure from a different second type of material; changing the temperature of said first and second types of material such that each said material undergoes a different dimensional change; and fixing said diaphragm structure to said support structure and allowing said composite structure to return to a quiescent temperature such that said diaphragm remains in tension.
Claim 123
Independent Claim
80 words
A method for fabricating a pretensioned diaphragm, comprising the steps of: fabricating a diaphragm structure from a first type of material; fabricating a support structure from a different second type of material; changing the temperature of said first and second types of material such that each said material undergoes a different dimensional change; and fixing said diaphragm structure to said support structure and allowing said composite structure to return to a quiescent temperature such that said diaphragm remains in tension.
Claim 124
Dependent Claim
32 words
The method of claim 107, further including changing the temperature of said first and second materials such that said diaphragm material contracts to a greater extent than that of said support structure.
Claim 125
Dependent Claim
30 words
The method of claim 107, further including heating said first material and second material such that said diaphragm material expands to a greater extent than that of said support material.
Claim 126
Dependent Claim
68 words
The method of claim 107, further including heating a silicon material and a borosilicate glass such that said silicon expands to an extent great than that of said borosilicate glass, fixing said materials together, and allowing the materials to cool such that said silicon material contracts to a greater extent than that of said borosilicate glass to thereby allow said silicon to remain in tension after said cooling.
Claim 127
Dependent Claim
95 words
A transducer having a pretensioned diaphragm, comprising: a pair of thick support substrates each having a predefined thermal expansion characteristic; a diaphragm fabricated from a material having a thermal characteristic different from that of said support substrates and being substantially thinner than said support substrates such that the thermal expansion characteristics of said support substrates predominate and such that when the temperature of said substrates and said diaphragm is changed and then the substrates and diaphragm are sandwiched and fixed together and said temperature is again changed, said diaphragm remains fixed in a tensioned state.
Claim 128
Dependent Claim
95 words
A transducer having a pretensioned diaphragm, comprising: a pair of thick support substrates each having a predefined thermal expansion characteristic; a diaphragm fabricated from a material having a thermal characteristic different from that of said support substrates and being substantially thinner than said support substrates such that the thermal expansion characteristics of said support substrates predominate and such that when the temperature of said substrates and said diaphragm is changed and then the substrates and diaphragm are sandwiched and fixed together and said temperature is again changed, said diaphragm remains fixed in a tensioned state.
Claim 129
Dependent Claim
19 words
The transducer of class 111, wherein said support substrates comprise glass, and said diaphragm structure comprises a semiconductor material.
Claim 130
Dependent Claim
19 words
The transducer of class 111, wherein said support substrates comprise glass, and said diaphragm structure comprises a semiconductor material.
Claim 131
Dependent Claim
19 words
The transducer of claim 111, wherein said diaphragm structure is fixed between said support substrates by an electrostatic seal.
Claim 132
Dependent Claim
25 words
The transducer of claim 111, wherein said diaphragm structure includes a peripheral support area fixed to said support substrates, and a thinner flexible membrane area.
Claim 133
Dependent Claim
29 words
The transducer of claim 111, further including a diaphragm having a thickness less than about 20 microns and said support substrates have a thickness greater than about 20 mils.
Claim 134
Independent Claim
78 words
A method for tensioning a diaphragm, comprising the steps of: sandwiching together a support material and a diaphragm material; applying an electrical potential to said sandwiched structure such that an electric field is formed therein and a substantially permanent movement of ions occurs in one or the other of said materials such that said diaphragm experiences a radial stress; and fixing said support material to said diaphragm material such that said radial stress in said diaphragm is maintained.
Claim 135
Independent Claim
78 words
A method for tensioning a diaphragm, comprising the steps of: sandwiching together a support material and a diaphragm material; applying an electrical potential to said sandwiched structure such that an electric field is formed therein and a substantially permanent movement of ions occurs in one or the other of said materials such that said diaphragm experiences a radial stress; and fixing said support material to said diaphragm material such that said radial stress in said diaphragm is maintained.
Claim 136
Dependent Claim
28 words
The method of claim 116, further including raising the temperature of said support material and said diaphragm material to effect a bond and thereby fix said materials together.
Claim 137
Dependent Claim
32 words
The method of claim 116, further including selecting a support material having slow moving ions and fast moving ions in response to said electrical potential to thereby effect said movement of atoms.
Claim 138
Dependent Claim
23 words
The method of claim 118, further including selecting said support material as glass having fast moving sodium ions and slower moving oxygen ions.
Claim 139
Dependent Claim
39 words
The method of claim 116, further including forming plural diaphragms in said diaphragm material, and forming relief zones between said diaphragms such that a material compression due to said moving ions is concentrated with respect to the individual diaphragms.
Claim 140
Dependent Claim
30 words
The method of claim 120, further including forming conductive paths on said support material and between said diaphragms to thereby concentrate said material compression with respect to the individual diaphragms.
Claim 141
Dependent Claim
29 words
The method of claim 120, further including forming grooves in said support material and between said diaphragms to thereby concentrate said material compression with respect to the individual diaphragms.
Claim 142
Dependent Claim
18 words
The method of claim 116, further including sandwiching a borosilicate glass support material to a semiconductor diaphragm material.
Claim 143
Dependent Claim
55 words
The method of claim 123, further including sandwiching a borosilicate glass composition having about 80% SiO 2 , 13% B 2 O 3 , 2% AL 2 O 3 , 4% Na 2 O 3 , 0.5% Sb 2 O 3 and 0.25% As 2 O 3 , together with a silicon semiconductor diaphragm material.
Claim 144
Dependent Claim
26 words
The method of claim 116, further including placing an electrode on said support material at least partially circumscribing said diaphragm to provide an electrostatic sealing conductor.
Claim 145
Dependent Claim
25 words
The method of claim 116, further including locating a conductor around a boundary of said diaphragm material for confining a compression region adjacent said diaphragm.
Claim 146
Dependent Claim
33 words
The method of claim 126, further including forming plural diaphragms in said diaphragm material, and forming a boundary conductor between said diaphragms to localize and confine material compression regions to respective diaphragms areas.
Claim 147
Dependent Claim
22 words
The method of claim 116, wherein said fixing step is carried out by electronstatically sealing glass support material to silicon diaphragm material.
Claim 148
Dependent Claim
11 words
A transducer diaphragm fabricated in accordance the method of claim 116.
Claim 149
Independent Claim
70 words
A method for fabricating tensioned diaphragms, comprising the steps of: forming a plurality of thin diaphragms in a semiconductor wafer; forming a rim around said wafer with material having a thermal expansion characteristic different than that of said semiconductor wafer; and changing the temperature of the rimmed wafer such that said rim expands to an extent greater than the wafer material to thereby form a tension in each said diaphragm.
Claim 150
Independent Claim
70 words
A method for fabricating tensioned diaphragms, comprising the steps of: forming a plurality of thin diaphragms in a semiconductor wafer; forming a rim around said wafer with material having a thermal expansion characteristic different than that of said semiconductor wafer; and changing the temperature of the rimmed wafer such that said rim expands to an extent greater than the wafer material to thereby form a tension in each said diaphragm.
Claim 151
Dependent Claim
23 words
The method of claim 130, further including forming said rim with a glass material and electrostatically sealing said glass to said semiconductor wafer.
Claim 152
Dependent Claim
26 words
The method of claim 130, further including forming said rim with a substrate wafer material having a doping level different than that of said semiconductor wafer.
Claim 153
Dependent Claim
19 words
The method of claim 130, further including electrostatically sealing said pretensioned wafer between a pair of glass insulator substrates.
Claim 154
Dependent Claim
23 words
The method of claim 152, further including electrostatically sealing said semiconductor wafer around each said diaphragm between said pair of glass insulator substrates.
Claim 155
Dependent Claim
30 words
The method of claim 130, further including forming said rim on each side of said semiconductor substrate and processing said semiconductor wafer on both sides thereof to form said diaphragms.
Claim 156
Dependent Claim
12 words
A pretensioned wafer fabricated in accordance with the method of claim 130.
Claim 157
Independent Claim
132 words
A method for tensioning a diaphragm, comprising the steps of: utilizing a diaphragm material having a thermal expansion property in an operating temperature range and a thermal expansion property in a fabrication temperature range; utilizing a support material having a given thermal expansion property substantially the same as that of said diaphragm material in the operating temperature range, and a thermal expansion property different than that of the diaphragm material in said fabrication temperature range; changing the temperature of said diaphragm material and of said support material to a fabrication temperature and fixing said diaphragm to said support material; and again changing the temperature of the composite diaphragm material and said support material so that said diaphragm material contracts more than said support material to thereby impart a tension to said diaphragm.
Claim 158
Independent Claim
132 words
A method for tensioning a diaphragm, comprising the steps of: utilizing a diaphragm material having a thermal expansion property in an operating temperature range and a thermal expansion property in a fabrication temperature range; utilizing a support material having a given thermal expansion property substantially the same as that of said diaphragm material in the operating temperature range, and a thermal expansion property different than that of the diaphragm material in said fabrication temperature range; changing the temperature of said diaphragm material and of said support material to a fabrication temperature and fixing said diaphragm to said support material; and again changing the temperature of the composite diaphragm material and said support material so that said diaphragm material contracts more than said support material to thereby impart a tension to said diaphragm.
Claim 159
Dependent Claim
17 words
The method of claim 137, further including fixing a silicon diaphragm material to a glass support material.
Claim 160
Dependent Claim
22 words
The method of claim 138, further including elevating the temperature of said silicon and said glass until said glass is elastically deformable.
Claim 161
Dependent Claim
27 words
The method of claim 139, further including applying a voltage between said silicon and said glass to form an electrostatic seal between said silicon and said glass.
Claim 162
Dependent Claim
21 words
The method of claim 137, further including fixing said diaphragm to said support material by electrostatically sealing at said fabrication temperature.
Claim 163
Dependent Claim
14 words
The method of claim 137, wherein said diaphragm is tensioned during said fixing step.
Claim 164
Dependent Claim
26 words
The method of claim 137, wherein said diaphragm is tensioned during the step where the temperature of said diaphragm and said support material is again changed.
Claim 165
Dependent Claim
18 words
The method of claim 137, further including fixing said support material to opposing sides of said diaphragm material.
Claim 166
Dependent Claim
34 words
The method of claim 137, further including placing an electrostatic sealing conductor electrode on said support material at least partially circumscribing said diaphragm to facilitate the formation of an electrostatic seal around said diaphragm.
Claim 167
Dependent Claim
30 words
The method of claim 145, further including placing a conductor on said support material in the neighborhood of said diaphragm material for confining a material compression region adjacent said diaphragm.
Claim 168
Dependent Claim
37 words
The method of claim 146, further including forming plural diaphragms in said diaphragm material, and forming a boundary conductor on said support material between said diaphragms to localize and confine material compression regions to respective diaphragm areas.
Claim 169
Dependent Claim
13 words
A transducer diaphragm structure fabricated in accordance to the method of claim 137.
Claim 170
Independent Claim
88 words
A method for fabricating a transducer structure, comprising the steps of: sandwiching a semiconductor wafer between a top and bottom insulator substrate such that a diaphragm formed in said wafer is spaced apart from capacitor plates formed on said top and bottom insulator substrates; and applying an electrostatic sealing voltage to conductive paths on said top and bottom insulator substrate such that a cylindrical electrostatic field is concentrated circumferentially around said diaphragm and said silicon material circumscribing said diaphragm is sealed to said top and bottom insulator substrates.
Claim 171
Independent Claim
88 words
A method for fabricating a transducer structure, comprising the steps of: sandwiching a semiconductor wafer between a top and bottom insulator substrate such that a diaphragm formed in said wafer is spaced apart from capacitor plates formed on said top and bottom insulator substrates; and applying an electrostatic sealing voltage to conductive paths on said top and bottom insulator substrate such that a cylindrical electrostatic field is concentrated circumferentially around said diaphragm and said silicon material circumscribing said diaphragm is sealed to said top and bottom insulator substrates.
Claim 172
Dependent Claim
27 words
The method of claim 149, further including applying a sealing voltage to a grid network such that a peripheral area around said transducer structure is electrostatically sealed.
Claim 173
Dependent Claim
23 words
The method of claim 149, further including applying a sealing voltage to a substrate C-shaped sealing ring located above and below said diaphragm.
Claim 174
Dependent Claim
23 words
The method of claim 149, further including connecting said capacitor plates to said semiconductor material by a conductive path during said sealing operation.
Claim 175
Dependent Claim
23 words
The method of claim 149, further including applying a sealing voltage to a circular conductive path to form a circular cylindrical electrostatic field.
Claim 176
Dependent Claim
95 words
A transducer structure, comprising: a top insulator substrate; a capacitor plate; a bottom insulator substrate; the semiconductor wafer having a diaphragm, said wafer being electrostatically bonded between said top and bottom insulator substrates; and a conductive sealing grid network adjacent a top surface of said top substrate and a conductive sealing grid network adjacent a bottom side of said bottom insulator substrate such that a voltage can be applied under predefined temperature conditions to both said sealing grid networks such that an electrostatic seal is effected on opposing wafer surfaces and circumferentially around said diaphragm.
Claim 177
Dependent Claim
95 words
A transducer structure, comprising: a top insulator substrate; a capacitor plate; a bottom insulator substrate; the semiconductor wafer having a diaphragm, said wafer being electrostatically bonded between said top and bottom insulator substrates; and a conductive sealing grid network adjacent a top surface of said top substrate and a conductive sealing grid network adjacent a bottom side of said bottom insulator substrate such that a voltage can be applied under predefined temperature conditions to both said sealing grid networks such that an electrostatic seal is effected on opposing wafer surfaces and circumferentially around said diaphragm.
Claim 178
Dependent Claim
30 words
The transducer structure of claim 154, wherein said conductive sealing grid comprises paths which are circular in shape with an inside diameter generally larger than a diameter of said diaphragms.
Claim 179
Dependent Claim
38 words
The transducer structure of claim 154, wherein each said circular conductive sealing path has a break therein for allowing a conductor path to be routed from outside said circular path to a central location within said sealing path.
Claim 180
Dependent Claim
23 words
The transducer structure of claim 156, wherein the respective breaks of said circular sealing paths on the top and bottom substrates are misaligned.
Claim 181
Dependent Claim
20 words
The transducer structure of claim 154, further including other conductor sealing paths located at peripheral edges of said transducer structure.
Claim 182
Dependent Claim
21 words
The transducer structure of claim 154, wherein said semiconductor wafer is electrostatically sealed directly to said top and bottom insulator substrates.
Claim 183
Dependent Claim
23 words
The transducer structure of claim 154, wherein said sealing grid networks are formed on respective top and bottom sides of said insulator substrates.
Claim 184
Dependent Claim
55 words
A transducer structure, comprising: glass and semiconductor layers electrostatically sealed together; a capacitor plate; a deflectable diaphragm formed in said semiconductor layer; a conductive sealing grid to which a voltage is applied for achieving said electrostatic seal; and a conductive grid for connecting said capacitor plate to said semiconductor material during an electrostatic sealing process.
Claim 185
Dependent Claim
55 words
A transducer structure, comprising: glass and semiconductor layers electrostatically sealed together; a capacitor plate; a deflectable diaphragm formed in said semiconductor layer; a conductive sealing grid to which a voltage is applied for achieving said electrostatic seal; and a conductive grid for connecting said capacitor plate to said semiconductor material during an electrostatic sealing process.
Claim 186
Dependent Claim
20 words
The transducer structure of claim 161, wherein said conductive interconnecting grid interconnects plural capacitor plates together at a common location.
Claim 187
Dependent Claim
27 words
The transducer structure of claim 162, wherein said common location comprises a contact which when sectioned therethrough provides a capacitor plate edge contact to each associated transducer.
Claim 188
Dependent Claim
19 words
The transducer structure of claim 162, wherein said common location comprises a square contact area connecting four capacitor plates.
Claim 189
Dependent Claim
19 words
The transducer structure of claim 161, further including plural said transducer structures, each having said sealing grids connected together.
Claim 190
Dependent Claim
23 words
The transducer structure of claim 161, wherein said sealing grid comprises a circular conductive path for concentrating an electric field around said diaphragm.
Claim 191
Dependent Claim
19 words
The transducer structure of claim 161, further including a sealing grid path adjacent a peripheral edge of said structure.
Claim 192
Independent Claim
64 words
A method for electrostatically sealing material layers together, comprising the steps of: forming a plurality of device structures on at least one of the material layers; sandwiching together the material layers to be electrostatically sealed; and concentrating an electric field with respect to each said device structure such that ion movement within at least one of the layers is confined to each device structure.
Claim 193
Independent Claim
64 words
A method for electrostatically sealing material layers together, comprising the steps of: forming a plurality of device structures on at least one of the material layers; sandwiching together the material layers to be electrostatically sealed; and concentrating an electric field with respect to each said device structure such that ion movement within at least one of the layers is confined to each device structure.
Claim 194
Dependent Claim
20 words
The method of claim 168, further including forming conductive paths on one said material layer for concentrating the electric field.
Claim 195
Dependent Claim
24 words
The method of claim 168, further including clamping said sandwiched layers in a plate-like structure having a grid network for concentrating the electric field.
Claim 196
Dependent Claim
22 words
The method of claim 168, further including electrosealing glass and semiconductor layers together so that sodium ions are concentrated at predefined locations.
Claim 197
Dependent Claim
19 words
The method of claim 168, further including forming plural transducer devices on corresponding die of glass and semiconductor layers.
Claim 198
Dependent Claim
28 words
The method of claim 172, further including forming conductive paths within boundaries of each said die so that the movement of ions are concentrated within each said die.
Claim 199
Dependent Claim
16 words
The method of claim 172, further including forming conductive paths on boundaries of each said die.
Claim 200
Dependent Claim
31 words
The method of claim 172, further including forming conductive paths to define electric field paths such that ion movement is away from diaphragms to thereby impart a tension to said diaphragms.
Claim 201
Dependent Claim
27 words
The method of claim 175, further including concentrating the ion movement within the respective die so that each said diaphragm is tensioned independently of the other diaphragms.
Claim 202
Dependent Claim
11 words
Electrostatic sealing apparatus for carrying out the method of claim 168.
Claim 203
Dependent Claim
173 words
A multilayer transducer structure, comprising: a top glass substrate; a bottom glass substrate; a semiconductor wafer sandwiched between said top and bottom glass substrates, said semiconductor wafer including a clamped diaphragm spaced apart from said top and bottom glass substrates to define respective capacitor gaps, said semiconductor wafer further including a contact on an upper surface thereof for providing electrical connections to said semiconductor wafer; said top glass substrate including a top capacitor plate formed on an under surface thereof, and a hole therein, and a conductor path connected to said top capacitor plate, routed through said hole and to a top side of said top glass substrate; and said bottom glass substrate including a hole therein for communicating fluid pressure to said diaphragm, and a conductive bottom capacitor plate formed on a top surface of said bottom glass substrate connected by a conductor path through said hole to an undersurface of said bottom glass substrate, to an edge thereof and around said edge to a top surface of said bottom glass substrate.
Claim 204
Dependent Claim
173 words
A multilayer transducer structure, comprising: a top glass substrate; a bottom glass substrate; a semiconductor wafer sandwiched between said top and bottom glass substrates, said semiconductor wafer including a clamped diaphragm spaced apart from said top and bottom glass substrates to define respective capacitor gaps, said semiconductor wafer further including a contact on an upper surface thereof for providing electrical connections to said semiconductor wafer; said top glass substrate including a top capacitor plate formed on an under surface thereof, and a hole therein, and a conductor path connected to said top capacitor plate, routed through said hole and to a top side of said top glass substrate; and said bottom glass substrate including a hole therein for communicating fluid pressure to said diaphragm, and a conductive bottom capacitor plate formed on a top surface of said bottom glass substrate connected by a conductor path through said hole to an undersurface of said bottom glass substrate, to an edge thereof and around said edge to a top surface of said bottom glass substrate.
Claim 205
Dependent Claim
74 words
The multilayer transducer structure of claim 178, wherein said top and bottom glass support substrates and said semiconductor wafer are constructed with substantially identical length and width, and further including a cutout in said top glass support substrate for allowing access to said semiconductor contact, and further including aligned cutouts in said top glass support substrate and said semiconductor wafer for allowing access to said conductor path on said bottom glass support substrate contacts.
Claim 206
Dependent Claim
48 words
The multilayer transducer structure of claim 178, wherein said top glass support substrate and said bottom glass support substrate have conductors extending from said capacitor plates to respective corners of said support substrates to thereby facilitate fabricating a plurality of said support substrates from a glass substrate layer.
Claim 207
Dependent Claim
38 words
The multilayer transducer structure of claim 178, further including a conductive via formed in each said glass support substrate for connecting said respective capacitor plates to conductive areas on other sides of said respective said glass support substrates.
Claim 208
Independent Claim
166 words
A method for fabricating a three layer transducer structure, comprising the steps of: forming a diaphragm in a material which is at least semiconductive; sandwiching said diaphragm material between a top insulator and a bottom insulator; forming a pair of capacitor plates on respective surfaces of said top insulator and said bottom insulator so as to be adjacent said diaphragm; forming holes in said top and bottom insulators wafers for allowing a fluid pressure to deflect said diaphragm; forming a top side contact on said top insulator and electrically connected to one said capacitor plate; forming a top side contact to said diaphragm material and forming a cutout in said top insulator wafer for allowing access to said top side diaphragm material contact; and forming a top side contact on said bottom insulator wafer in electrical contact with the other said capacitor plate, and forming cutouts in said top insulator and said diaphragm material for allowing access to said top side contact of said bottom insulator.
Claim 209
Independent Claim
166 words
A method for fabricating a three layer transducer structure, comprising the steps of: forming a diaphragm in a material which is at least semiconductive; sandwiching said diaphragm material between a top insulator and a bottom insulator; forming a pair of capacitor plates on respective surfaces of said top insulator and said bottom insulator so as to be adjacent said diaphragm; forming holes in said top and bottom insulators wafers for allowing a fluid pressure to deflect said diaphragm; forming a top side contact on said top insulator and electrically connected to one said capacitor plate; forming a top side contact to said diaphragm material and forming a cutout in said top insulator wafer for allowing access to said top side diaphragm material contact; and forming a top side contact on said bottom insulator wafer in electrical contact with the other said capacitor plate, and forming cutouts in said top insulator and said diaphragm material for allowing access to said top side contact of said bottom insulator.
Claim 210
Dependent Claim
18 words
The method of claim 182, further including providing said cutouts at edges of said respective wafers and insulators.
Claim 211
Dependent Claim
32 words
The method of claim 182, further including coating ones of said cutouts with a conductive material to provide electrical connection from one side of an insulator to another side of the insulator.
Claim 212
Dependent Claim
53 words
The method of claim 182, further including forming plural said multilayer transducer structures having a common corner, and forming a conductive via at said common corner, and separating said plural multilayer transducer structures through said conductive corner to provide top side to bottom side conductive paths to each said separated multilayer transducer structure.
Claim 213
Dependent Claim
39 words
The method of claim 182, further including forming a sealing grid structure on said top insulator and a sealing grid structure on said bottom insulator for use in electrostatically sealing said top and bottom insulators to said diaphragm material.
Claim 214
Dependent Claim
44 words
The method of claim 182, further including forming a conductive material on opposing sides of said top insulator through a hole in said top insulator, a top conductive surface thereof defining a top contact and a bottom conductive surface defining the top capacitor plate.
Claim 215
Dependent Claim
60 words
The method of claim 182, further including forming a conductor material on opposing sides of said bottom insulator through a hole therein and around an edge of said bottom insulator, a first top surface of the conductive material defining a top contact of said bottom insulator and a second top surface of the conductive material defining said bottom capacitor plate.
Claim 216
Dependent Claim
47 words
The method of claim 188, wherein the step of forming said conductor material around said edge is carried out by forming a hole in said bottom insulator, covering sidewalls of said hole with said conductive material and cutting through said conductive hole to separate such transducer structure.
Claim 217
Dependent Claim
28 words
The method of claim 182, further including forming said diaphragm contacts by depositing a conductive material through said cutouts in said top insulator wafer onto said diaphragm material.
Claim 218
Dependent Claim
34 words
The method of claim 190, further including placing an apertured plate over said top insulator wafer and sputtering a conductive material through said apertures and onto said diaphragm material for forming electrical contacts thereto.
Claim 219
Dependent Claim
23 words
The method of claim 191, further including forming a pair of electrical contacts on said diaphragm material through said top insulator wafer cutouts.
Claim 220
Dependent Claim
148 words
A multilayer transducer, comprising: a top insulator substrate; a bottom insulator substrate; an intermediate wafer sandwiched between said top and bottom substrates, said intermediate wafer including a diaphragm spaced apart by gaps from said top and bottom glass substrates; a conductive top capacitor plate formed on an under surface of said top substrate; a conductive bottom capacitor plate formed on a top surface of said bottom glass substrate, a contact formed on a top side of said bottom insulator substrate electrically connected to said bottom capacitor plate; a contact formed on a top surface of said intermediate wafer; a cutout in said intermediate wafer providing access to said top side contact on said bottom insulator substrate; a first cutout in said top insulator substrate providing access to said bottom capacitor plate contact; and a second cutout in said top insulator substrate providing access to said intermediate wafer contact.
Claim 221
Dependent Claim
148 words
A multilayer transducer, comprising: a top insulator substrate; a bottom insulator substrate; an intermediate wafer sandwiched between said top and bottom substrates, said intermediate wafer including a diaphragm spaced apart by gaps from said top and bottom glass substrates; a conductive top capacitor plate formed on an under surface of said top substrate; a conductive bottom capacitor plate formed on a top surface of said bottom glass substrate, a contact formed on a top side of said bottom insulator substrate electrically connected to said bottom capacitor plate; a contact formed on a top surface of said intermediate wafer; a cutout in said intermediate wafer providing access to said top side contact on said bottom insulator substrate; a first cutout in said top insulator substrate providing access to said bottom capacitor plate contact; and a second cutout in said top insulator substrate providing access to said intermediate wafer contact.
Claim 222
Dependent Claim
19 words
The mutlilayer transducer of claim 193, wherein said cutouts in said top insulator substrate are located in corners thereof.
Claim 223
Dependent Claim
26 words
The multilayer transducer of claim 193, wherein the cutout in said top insulator substrate is larger than a cutout in said intermediate wafer aligned vertically therewith.
Claim 224
Dependent Claim
27 words
The multilayer transducer of claim 193, further including a contact on a top surface of said top insulator substrate for providing contact to said top capacitor plate.
Claim 225
Dependent Claim
23 words
The multilayer transducer of claim 193, further including a pair of spaced apart contacts formed on said intermediate wafer for measuring resistance thereof.
Claim 226
Dependent Claim
33 words
The multilayer transducer of claim 193, wherein said intermediate wafer comprises a semiconductor material, and further including a p-n junction formed therein, and a pair of contacts providing external contact to said junction.
Claim 227
Dependent Claim
57 words
The multilevel transducer of claim 193, further including a plated through via in said bottom insulator substrate providing an electrical connection between said bottom capacitor plate and a bottom land area, and a conductor connecting said bottom land area to an edge of said bottom insulator substrate, around an edge thereof and to said top side contact.
Claim 228
Independent Claim
89 words
A method for fabricating a multilayer transducer having a semiconductor diaphragm, comprising the steps of: forming a diaphragm in a semiconductor layer; forming a capacitor plate on an upper and lower insulator substrate; sandwiching said semiconductor layer between said upper and lower insulator substrates so that said diaphragm is spaced apart from said capacitor plates; forming electrical contacts to said capacitor plates and to said semiconductor layer; and forming a second electrical contact to said semiconductor layer for allowing electrical measurements of said semiconductor material to determine parameters thereof.
Claim 229
Independent Claim
89 words
A method for fabricating a multilayer transducer having a semiconductor diaphragm, comprising the steps of: forming a diaphragm in a semiconductor layer; forming a capacitor plate on an upper and lower insulator substrate; sandwiching said semiconductor layer between said upper and lower insulator substrates so that said diaphragm is spaced apart from said capacitor plates; forming electrical contacts to said capacitor plates and to said semiconductor layer; and forming a second electrical contact to said semiconductor layer for allowing electrical measurements of said semiconductor material to determine parameters thereof.
Claim 230
Dependent Claim
25 words
The method of claim 200, further including forming said semiconductor layer contacts spaced apart so that a resistance of said semiconductor material can be measured.
Claim 231
Dependent Claim
21 words
The method of claim 201, further including forming a p-n junction between said first and second contacts of said semiconductor material.
Claim 232
Independent Claim
46 words
A method for processing a semiconductor material for forming transducer diaphragms, comprising the steps of: forming a plurality of quadrature unit cells symmetrically oriented on a semiconductor wafer, each said cell being defined by plural non-symmetrically oriented die, and forming a diaphragm in each said die.
Claim 233
Independent Claim
46 words
A method for processing a semiconductor material for forming transducer diaphragms, comprising the steps of: forming a plurality of quadrature unit cells symmetrically oriented on a semiconductor wafer, each said cell being defined by plural non-symmetrically oriented die, and forming a diaphragm in each said die.
Claim 234
Dependent Claim
32 words
The method of claim 203, further including forming a removable semiconductor area at a corner of each said die, said removable area being adapted for forming a hole through said semiconductor wafer.
Claim 235
Dependent Claim
36 words
The method of claim 204, further including forming said removable area by forming symmetrical trenches on each side of said wafer so as to form an intermediate thinned area which is easily broken for removal thereof.
Claim 236
Dependent Claim
16 words
The method of claim 203, further including forming an electrical contact associated with each said die.
Claim 237
Dependent Claim
30 words
The method of claim 203, further including forming a pair of spaced apart electrical contacts on each said die so that electrical parameters of said semiconductor material can be measured.
Claim 238
Dependent Claim
22 words
The method of claim 203, further including micromachining the semiconductor wafer to achieve a diaphragm thickness of about 10 microns, or less.
Claim 239
Independent Claim
89 words
A method for processing a material layer for forming multilayer transducers, comprising the steps of: forming a plurality of multiple unit cells in a material layer, each said cell being substantially symmetrically oriented on said layer with respect to each other; and forming each said cell as a plurality of similar die, and each die of a cell being oriented differently with respect to the other die of the cell, and the plural die for each said cell being oriented substantially symmetrical with the die of the other cells.
Claim 240
Independent Claim
89 words
A method for processing a material layer for forming multilayer transducers, comprising the steps of: forming a plurality of multiple unit cells in a material layer, each said cell being substantially symmetrically oriented on said layer with respect to each other; and forming each said cell as a plurality of similar die, and each die of a cell being oriented differently with respect to the other die of the cell, and the plural die for each said cell being oriented substantially symmetrical with the die of the other cells.
Claim 241
Dependent Claim
13 words
The method of claim 209, further including forming diaphragms in a semiconductor layer.
Claim 242
Dependent Claim
18 words
The method of claim 210, further including forming a hole in a corner of each said diaphragmed die.
Claim 243
Dependent Claim
24 words
The method of claim 210, further including forming electrical contacts on said semiconductor layer after said material layer is fixed between other insulator layers.
Claim 244
Dependent Claim
37 words
The method of claim 212, further including forming access holes in at least one said insulator layer for exposing areas of said semiconductor layer, and depositing a conductive material through said access holes onto said semiconductor layer.
Claim 245
Dependent Claim
15 words
The method of claim 209, further including forming capacitor plates on a glass substrate layer.
Claim 246
Dependent Claim
21 words
The method of claim 209, further including forming a hole in said material layer which is common to multiple said cells.
Claim 247
Dependent Claim
18 words
The method of claim 215, further including forming said hole at a corner of said multiple of cells.
Claim 248
Dependent Claim
30 words
The method of claim 215, further including forming a hole in said material layer which is common to plural die each of which is associated with a different said cell.
Claim 249
Dependent Claim
22 words
The method of claim 209, further including forming a conductive via central to each said die connected to a conductive capacitor plate.
Claim 250
Dependent Claim
26 words
The method of claim 218, further including forming a hole at three corners of each said die to define a top substrate layer of a transducer.
Claim 251
Dependent Claim
30 words
The method of claim 218, further including forming a conductive via at a corner of each said die, and connecting said corner via and said central via with a conductor.
Claim 252
Dependent Claim
76 words
A transducer structure, comprising: a plurality of multiple unit cells in a material layer, each said cell being substantially symmetrically oriented on the layer with respect to each other; and said cells each comprising a plurality of similar die, and each die of a cell being oriented differently with respect to the other die of the cell, and the plural die of each said cell being oriented substantially symmetrical with the die of the other cells.
Claim 253
Dependent Claim
76 words
A transducer structure, comprising: a plurality of multiple unit cells in a material layer, each said cell being substantially symmetrically oriented on the layer with respect to each other; and said cells each comprising a plurality of similar die, and each die of a cell being oriented differently with respect to the other die of the cell, and the plural die of each said cell being oriented substantially symmetrical with the die of the other cells.
Claim 254
Dependent Claim
14 words
A transducer structure of claim 221, wherein said material layer comprises a semiconductor material.
Claim 255
Dependent Claim
20 words
The transducer structure of claim 222, further including a hole formed in a corner of each die having a diaphragm.
Claim 256
Dependent Claim
15 words
The transducer structure of claim 221, wherein said material layer comprises a glass substrate layer.
Claim 257
Dependent Claim
21 words
The transducer structure of claim 221, further including a hole in said material layer which is common to multiple said cells.
Claim 258
Dependent Claim
19 words
The transducer structure of claim 225, further including a hole formed at a corner of said multiple of cells.
Claim 259
Dependent Claim
32 words
The transducer structure of claim 225, further including a hole formed in said material layer, said hole being common to plural die each of which is associated with a different said cell.
Claim 260
Dependent Claim
26 words
The transducer structure of claim 221, further including a conductive via formed central to each said die, said via being connected to a conductive capacitor plate.
Claim 261
Dependent Claim
28 words
The transducer structure of claim 228, further including a hole formed at three corners of each said die to define a top substrate layer of said transducer structure.
Claim 262
Dependent Claim
32 words
The transducer structure of claim 228, further including a conductive via formed at a corner of each said die, and a conductive path connecting said corner via to an associated central via.
Claim 263
Dependent Claim
191 words
In a trilevel transducer structure, a quadrature unit cell, comprising: a top insulator substrate having quadrants defining four die, said quadrants having four corners, each with a large hole formed therein and an intermediate size hole located between each said large hole, and a small size hole substantially centered in each said die, a conductive land area connected by a path through each said small hole to a conductive capacitor plate, each said land area being connected together by a conductive path to a conductive pad centered in each quadrant; a bottom insulator substrate having quadrants defining four die, said quadrants having four corners, each with a first conductive via connected to a second conductive via which is substantially centered in each said die, said centered via being connected to a conductive capacitor plate; and a semiconductor wafer sandwiched between said top and bottom insulator substrates, said semiconductor wafer having a quadrant defining four die, said wafer quadrants having four corners each with a hole, and each wafer quadrant having a diaphragm substantially centered in each said die, and an electrical contact connected to the semiconductor material of each said die.
Claim 264
Dependent Claim
191 words
In a trilevel transducer structure, a quadrature unit cell, comprising: a top insulator substrate having quadrants defining four die, said quadrants having four corners, each with a large hole formed therein and an intermediate size hole located between each said large hole, and a small size hole substantially centered in each said die, a conductive land area connected by a path through each said small hole to a conductive capacitor plate, each said land area being connected together by a conductive path to a conductive pad centered in each quadrant; a bottom insulator substrate having quadrants defining four die, said quadrants having four corners, each with a first conductive via connected to a second conductive via which is substantially centered in each said die, said centered via being connected to a conductive capacitor plate; and a semiconductor wafer sandwiched between said top and bottom insulator substrates, said semiconductor wafer having a quadrant defining four die, said wafer quadrants having four corners each with a hole, and each wafer quadrant having a diaphragm substantially centered in each said die, and an electrical contact connected to the semiconductor material of each said die.
Claim 265
Dependent Claim
44 words
The trilevel transducer structure of claim 231, wherein said corner hole in said semiconductor wafer has a diameter intermediate that of the corner via in said bottom substrate and said large corner holes in said top insulator substrate to define a stepped hole structure.
Claim 266
Dependent Claim
36 words
The trilevel transducer structure of claim 231, further including a pair of contacts located at diagonal corners of each said wafer die, said contacts being aligned with the intermediate size holes in said top insulator substrate.
Claim 267
Dependent Claim
17 words
The trilevel transducer structure of claim 233, further including a p-n junction formed between said wafer contacts.
Claim 268
Dependent Claim
50 words
The trilevel transducer structure of claim 231, further including a sealing conductive path formed at least partially around each said land area of said top insulator substrate, each said sealing conductive path being connected together for facilitating electrostatic sealing of the semiconductor wafer to said top and bottom insulator substrates.
Claim 269
Dependent Claim
23 words
The trilevel transducer structure of claim 235, wherein said conductive sealing paths are formed substantially around the central via of each said die.
Claim 270
Dependent Claim
66 words
The trilevel transducer structure of claim 236, further including a first sealing voltage pad formed near an edge of said top insulator substrate, said pad being connected to each said conductive sealing path, and a second sealing voltage pad formed adjacent an edge of said bottom insulator substrate, each said pad being connected respectively to said conductive sealing paths of said top and bottom insulator substrate.
Claim 271
Dependent Claim
27 words
The trilevel transducer structure of claim 235, wherein said conductive sealing paths of each said cell are connected together at a center location of the respective cells.
Claim 272
Dependent Claim
24 words
The trilevel transducer structure of claim 231, further including conductive paths formed along at least a portion of die boundaries for facilitating electrostatic sealing.
Claim 273
Independent Claim
91 words
A method for fabricating a multilayer transducer, comprising the steps of: fabricating a plurality of transducer structures as a multilayered composite, each said transducer structure sharing at least a portion of an edge thereof with other transducer structures; forming a conductive via in one or more of said layers; and sectioning said multilayered structure along said edge and through said conductive via into a plurality of individual transducer devices such that each said device includes a conductive path from a bottom surface to a top surface thereof and around an edge.
Claim 274
Independent Claim
91 words
A method for fabricating a multilayer transducer, comprising the steps of: fabricating a plurality of transducer structures as a multilayered composite, each said transducer structure sharing at least a portion of an edge thereof with other transducer structures; forming a conductive via in one or more of said layers; and sectioning said multilayered structure along said edge and through said conductive via into a plurality of individual transducer devices such that each said device includes a conductive path from a bottom surface to a top surface thereof and around an edge.
Claim 275
Dependent Claim
31 words
The method of claim 240, further including sectioning said composite in quadrants such that a portion of said conductive via is located at a corner of each said sectioned transducer device.
Claim 276
Dependent Claim
28 words
The method of claim 240, further including forming holes in upper said layers of said composite so as to provide access to electrical contacts formed on layers thereunder.
Claim 277
Dependent Claim
29 words
The method of claim 242, further including aligning said holes with said conductive vias so that access can be had through the hole to bottom layers of said structure.
Claim 278
Dependent Claim
11 words
The method of claim 243, further including sectioning said layers simultaneously.
Claim 279
Dependent Claim
18 words
The method of claim 244, further including forming an access hole larger in diameter than said conductive via.
Claim 280
Dependent Claim
36 words
The method of claim 240, further including forming said multilayered structure with holes in upper layers thereof aligned with holes formed in other layers thereunder, said upper layer holes being larger than said aligned holes thereunder.
Claim 281
Dependent Claim
64 words
The method of claim 240, further including forming electrical contacts on an intermediate layer of said multilayered composite by forming access holes in a top layer of said composite, overlying said top layer with an apertured stencil plate, and depositing a conductive material over said stencil plate such that said conductive material passes through said access holes and is deposited on said intermediate layer.
Claim 282
Dependent Claim
11 words
A multilayer transducer fabricated according to the method of claim 240.
Claim 283
Independent Claim
119 words
A method for fabricating a support substrate adapted for use in constructing transducers, comprising the steps of: forming a plurality of small holes in a spaced apart manner through a support substrate material, each said hole defining an aperture for communicating a fluid pressure therethrough; forming a plurality of conductive capacitor plates associated with each said small hole; forming a plurality of conductive areas on an opposing side of said support substrate material, and each conductive area being associated with a respective said capacitor plate; connecting said conductive areas with respective said capacitor plates by a conductive via through said small holes; and forming conductive paths from said conductive areas for providing an electrical connection to said capacitor plates.
Claim 284
Independent Claim
119 words
A method for fabricating a support substrate adapted for use in constructing transducers, comprising the steps of: forming a plurality of small holes in a spaced apart manner through a support substrate material, each said hole defining an aperture for communicating a fluid pressure therethrough; forming a plurality of conductive capacitor plates associated with each said small hole; forming a plurality of conductive areas on an opposing side of said support substrate material, and each conductive area being associated with a respective said capacitor plate; connecting said conductive areas with respective said capacitor plates by a conductive via through said small holes; and forming conductive paths from said conductive areas for providing an electrical connection to said capacitor plates.
Claim 285
Dependent Claim
31 words
The method of claim 249, further including forming said small holes and capacitor plates in a uniform pattern on said support substrate material so as to define symmetrical groups of die.
Claim 286
Dependent Claim
24 words
The method of claim 250, further including forming large holes through said substrate material at a common corner of a plurality of said die.
Claim 287
Dependent Claim
29 words
The method of claim 251, further including separating said support material into individual die through said large holes so that each said separated die has a corner portion missing.
Claim 288
Dependent Claim
16 words
The method of claim 249, further including forming a C-shaped ring around each said conductive area.
Claim 289
Dependent Claim
18 words
The method of claim 253, further including connecting each said C-shaped ring by a grid of conductive paths.
Claim 290
Dependent Claim
47 words
The method of claim 249, further including forming a conductive pad electrically connected to a plurality of said conductive paths, and separating said support substrate material into individual die so that a portion of said conductive pad is located at an edge of each said separated die.
Claim 291
Dependent Claim
98 words
A transducer structure, comprising: a top and bottom glass substrate characterized by a composition of weight of about: 80.4% SiO 2 13.0% B 2 O 3 2.0% AL 2 O 3 3.8% Na 2 O 3 0.5% Sb 2 O 3 0.25% As 2 O 3 a plurality of capacitor plates; a semiconductor wafer with a plurality of diaphragms formed therein; said semiconductor wafer being electrostatically sealed between said top and bottom glass substrates so that each said diaphragm is spaced apart from said capacitor plate; and conductors providing electrical connections to said capacitor plates and said diaphragms.
Claim 292
Dependent Claim
98 words
A transducer structure, comprising: a top and bottom glass substrate characterized by a composition of weight of about: 80.4% SiO 2 13.0% B 2 O 3 2.0% AL 2 O 3 3.8% Na 2 O 3 0.5% Sb 2 O 3 0.25% As 2 O 3 a plurality of capacitor plates; a semiconductor wafer with a plurality of diaphragms formed therein; said semiconductor wafer being electrostatically sealed between said top and bottom glass substrates so that each said diaphragm is spaced apart from said capacitor plate; and conductors providing electrical connections to said capacitor plates and said diaphragms.
Claim 293
Dependent Claim
24 words
The transducer structure of claim 256, further including an electrostatic seal around each said diaphragm so as to maintain a tension in said diaphragms.
Claim 294
Dependent Claim
37 words
The transducer structure of claim 257, further including a conductive sealing grid on said top and bottom substrates to provide an electrostatic seal at predetermined locations between said semiconductor wafer and said top and bottom glass substrates.
Claim 295
Dependent Claim
18 words
The transducer structure of claim 256, further including a conductive network for connecting all said capacitor plates together.
Claim 296
Dependent Claim
33 words
The transducer structure of claim 259, further including a contact for providing electrical connections to said semiconductor wafer, such that said capacitor plates can be shorted to said semiconductor wafer during electrostatic sealing.
Claim 297
Independent Claim
97 words
A method for fabricating a composite transducer structure, comprising the steps of: fabricating a first and second glass layer, each having a plurality of conductive capacitor plates; fabricating a semiconductor wafer having a plurality of thin diaphragm areas; registering the capacitor plates of one said glass layer to the diaphragms of said semiconductor wafer and adhering the layers together; registering the capacitor plates of the other glass layer to the diaphragms of said semiconductor wafer and adhering the layers together; and electrostatically sealing the glass layers to the semiconductor wafer to thereby form a composite transducer structure.
Claim 298
Independent Claim
97 words
A method for fabricating a composite transducer structure, comprising the steps of: fabricating a first and second glass layer, each having a plurality of conductive capacitor plates; fabricating a semiconductor wafer having a plurality of thin diaphragm areas; registering the capacitor plates of one said glass layer to the diaphragms of said semiconductor wafer and adhering the layers together; registering the capacitor plates of the other glass layer to the diaphragms of said semiconductor wafer and adhering the layers together; and electrostatically sealing the glass layers to the semiconductor wafer to thereby form a composite transducer structure.
Claim 299
Dependent Claim
23 words
The method of claim 261, further including forming a plurality of depressions in said semiconductor wafer and depositing an adherent in said depressions.
Claim 300
Dependent Claim
17 words
The method of claim 261, further including employing an adherent which can be hardened with ultraviolet light.
Claim 301
Dependent Claim
19 words
The method of claim 261, further including adhering the glass layers to a perimeter portion of said semiconductor wafer.
Claim 302
Dependent Claim
18 words
The method of claim 261, further including forming electrical contacts on said semiconductor wafer after said electrostatic sealing.
Claim 303
Dependent Claim
29 words
The method of claim 265, further including forming holes in one said insulator layer, sputtering a metal therethrough and onto said semiconductor wafer to achieve a electrical contact thereto.
Claim 304
Dependent Claim
130 words
A miniature pressure transducer, comprising: a top insulator having a conductive capacitor plate formed on an under surface thereof; a bottom insulator having a conductive capacitor plate formed on a top surface thereof; a semiconductor material sandwiched between said top and bottom insulators, a surface contact providing electrical connections to said semiconductor material, said semiconductor material including a thin diaphragm formed centrally therein and spaced apart from the respective capacitor plates of said top and bottom insulators; said top and bottom insulators and said semiconductor material having length and width dimensions less than about 500 mils; and conductive paths formed on a top surface of said top insulator and on a bottom surface of said bottom insulator for providing connections to said capacitor plates of said top and bottom insulators.
Claim 305
Dependent Claim
130 words
A miniature pressure transducer, comprising: a top insulator having a conductive capacitor plate formed on an under surface thereof; a bottom insulator having a conductive capacitor plate formed on a top surface thereof; a semiconductor material sandwiched between said top and bottom insulators, a surface contact providing electrical connections to said semiconductor material, said semiconductor material including a thin diaphragm formed centrally therein and spaced apart from the respective capacitor plates of said top and bottom insulators; said top and bottom insulators and said semiconductor material having length and width dimensions less than about 500 mils; and conductive paths formed on a top surface of said top insulator and on a bottom surface of said bottom insulator for providing connections to said capacitor plates of said top and bottom insulators.
Claim 306
Dependent Claim
25 words
The miniature transducer of claim 267, wherein said top and bottom insulators each include an aperture therethrough for allowing fluid pressure communication to said diaphragm.
Claim 307
Dependent Claim
22 words
The miniature transducer of claim 267, wherein said semiconductor material comprises silicon, and said diaphragm is 10 microns or less in thickness.
Claim 308
Dependent Claim
33 words
The miniature transducer of claim 267, further including a setback area formed in opposing sides of said semiconductor material for defining a gap between said diaphragm and said top and bottom capacitor plates.
Claim 309
Dependent Claim
38 words
The miniature transducer of claim 267, further including a conductor path formed around an edge of said bottom insulator and on a top surface thereof, wherein said conductor path is accessible from a single side of said transducer.
Claim 310
Dependent Claim
32 words
The miniature transducer of claim 271, further including recesses in an edge of said semiconductor material and in said top insulator for allowing access to a conductor formed on said bottom insulator.
Claim 311
Dependent Claim
14 words
The miniature transducer of claim 267, wherein said transducer includes a radially tensioned diaphragm.
Claim 312
Dependent Claim
20 words
The miniature transducer of claim 273, wherein said diaphragm is tensioned as a result of the fabrication of the transducer.
Claim 313
Independent Claim
108 words
A method for forming an electrical surface contact on an internal surface of a multilayer composite, comprising the steps of: forming a hole in one layer of said multilayer composite to expose a portion of said internal surface; covering said one layer with an apertured stencil plate and registering said aperture with respect to said hole in said one layer; depositing a conductive material over a surface of said stencil plate such that the conductive material passes through said aperture and through said hole and is deposited on said internal surface without filling said hole with the conductive material; and removing the stencil plate from the multilayer composite.
Claim 314
Independent Claim
108 words
A method for forming an electrical surface contact on an internal surface of a multilayer composite, comprising the steps of: forming a hole in one layer of said multilayer composite to expose a portion of said internal surface; covering said one layer with an apertured stencil plate and registering said aperture with respect to said hole in said one layer; depositing a conductive material over a surface of said stencil plate such that the conductive material passes through said aperture and through said hole and is deposited on said internal surface without filling said hole with the conductive material; and removing the stencil plate from the multilayer composite.
Claim 315
Dependent Claim
28 words
The method of claim 275, further including forming said apertures in said stencil plate with a diameter smaller than a diameter of the hole in said one layer.
Claim 316
Dependent Claim
15 words
The method of claim 38, further including reusing said stencil plate a plurality of times.
Claim 317
Dependent Claim
45 words
The method of claim 275, further including forming a plurality of contacts on said internal surface by forming plural apertures in said stencil plate such that said conductive material passes through said plurality of apertures and through a angle said hole in said one layer.
Claim 318
Dependent Claim
29 words
The method of claim 278, further including forming a plurality of said holes in said one layer, and forming groups of said plurality of apertures in said stencil plate.
Claim 319
Dependent Claim
11 words
A stencil plate for carrying out the method of claim 275.
Claim 320
Independent Claim
84 words
A method for fabricating a multilayered transducer structure, comprising the steps of: fixing together an insulator layer having holes therein and having a plurality of fixed capacitor plates, with a semiconductor layer having a corresponding plurality of deflectable diaphragms; covering said insulator layer with an apertured stencil plate, said apertures being registered with said holes in said insulator layer; and depositing a conductive material through said insulator layer holes and through said stencil plate apertures and onto said semiconductor layer to form electrical conductors.
Claim 321
Independent Claim
84 words
A method for fabricating a multilayered transducer structure, comprising the steps of: fixing together an insulator layer having holes therein and having a plurality of fixed capacitor plates, with a semiconductor layer having a corresponding plurality of deflectable diaphragms; covering said insulator layer with an apertured stencil plate, said apertures being registered with said holes in said insulator layer; and depositing a conductive material through said insulator layer holes and through said stencil plate apertures and onto said semiconductor layer to form electrical conductors.
Claim 322
Dependent Claim
29 words
The method of claim 281, further including forming a plurality of a plurality of apertures in said stencil plate in association with each said hole in said insulator layer.
Claim 323
Dependent Claim
23 words
The method of claim 281, further including employing said stencil plate a plurality of times for fabricating a plurality of said multilayer structures.
Claim 324
Dependent Claim
31 words
The method of claim 281, further including fabricating a plurality of said multilayer transducer structures during common processing steps, and forming said contacts after layers of said structure are fixed together.
Claim 325
Independent Claim
79 words
A method of etching a semiconductor wafer, comprising the steps: patterning the wafer to define areas of exposed semiconductor material to be etched; removing semiconductor surface oxides by applying an alkaline etchant to the exposed semiconductor areas to provide exposed areas of virgin semiconductor material; and before the developing of further surface oxides on the exposed areas of the semiconductor material, etching the exposed virgin semiconductor areas with a quaternary ammonium hydroxide etchant to achieve a smooth semiconductor surface.
Claim 326
Independent Claim
79 words
A method of etching a semiconductor wafer, comprising the steps: patterning the wafer to define areas of exposed semiconductor material to be etched; removing semiconductor surface oxides by applying an alkaline etchant to the exposed semiconductor areas to provide exposed areas of virgin semiconductor material; and before the developing of further surface oxides on the exposed areas of the semiconductor material, etching the exposed virgin semiconductor areas with a quaternary ammonium hydroxide etchant to achieve a smooth semiconductor surface.
Claim 327
Dependent Claim
23 words
The method of claim 285, further including etching the semiconductor wafer with a potassium hydroxide to produce exposed areas of virgin semiconductor material.
Claim 328
Dependent Claim
16 words
The method of claim 285, further including etching the virgin semiconductor areas with tetramethyl ammonium hydroxide.
Claim 329
Dependent Claim
26 words
The method of claim 285, further including masking the wafer with silicon dioxide to define an etch mask with respect to the quaternary ammonium hydroxide etchant.
Claim 330
Dependent Claim
38 words
The method of claim 288, further including etching the semiconductor wafer a first time to remove the silicon dioxide mask, and subjecting the wafer to the alkaline etchant to remove surface oxides and expose said virgin semiconductor material.
Claim 331
Independent Claim
95 words
A method for forming holes in a semiconductor wafer, comprising the steps of: masking and patterning the semiconductor wafer to define areas for forming the holes therein, said patterning including removing the mask material in a path around each semiconductor area to be removed; etching the wafer to remove the semiconductor material in the paths so as to form a thinned area circumscribing each central part which is not thinned; and applying a pressure to each central unthinned area so as to fracture the thinned semiconductor material and allow the central parts to be removed.
Claim 332
Independent Claim
95 words
A method for forming holes in a semiconductor wafer, comprising the steps of: masking and patterning the semiconductor wafer to define areas for forming the holes therein, said patterning including removing the mask material in a path around each semiconductor area to be removed; etching the wafer to remove the semiconductor material in the paths so as to form a thinned area circumscribing each central part which is not thinned; and applying a pressure to each central unthinned area so as to fracture the thinned semiconductor material and allow the central parts to be removed.
Claim 333
Dependent Claim
31 words
The method of claim 290, further including masking the wafer to form thinned planar diaphragm areas by etching the diaphragm areas to the same extent as said path areas are thinned.
Claim 334
Dependent Claim
42 words
The method of claim 290, further including patterning a mask material to form annular rings for the paths of said punch-out areas, and patterning the mask material at other areas to form circular diaphragm areas where the mask material is entirely removed.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-02-25 | 1994-08-27 | 1995-02-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-25 | 1998-08-27 | 1999-02-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-25 | 2002-08-27 | 2003-02-26 | $7700.00 | Window Closed / Lapsed |