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US3758830A Expired / Lapsed US ⏱️ 0.0 years remaining

Transducer formed in peripherally supported thin semiconductor web

Assignee: HP Inc
•
Filing: 1972-04-10
•
Granted: 1973-09-11
•
Expires: 1992-04-10
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Abstract

Abstract A thin web supported by a peripheral frame is formed from a single crystal of silicon, the web and frame being of opposite conductivity types. A lower resistivity region is diffused into the web, and the web is covered by an insulating layer having holes through which conductors are deposited in contact with each end of the diffused region. The resulting transducer can be used as a thermocouple or strain gage. For use as a thermocouple, one of the junctions between the diffused region and a conductor is situated near the center portion of the web. The diffused region comprises one leg of the thermocouple, and one of the conductors functions as the other leg. The frame acts as a heat sink relative to the center portion of the web, making the junction near the center portion a hot junction and the junction near the frame a cold junction. For use as a diaphragm type strain gage the diffused region is made to transverse most of the web. The frame serves as a mounting base that is integral with the strain gage. The resistance of the diffused region changes in proportion to the change of the dimensions of the diffused region that result from the application of a force normal to the plane of the web.

Inventors

  • 👤 W Jackson

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 14:06
CPC Classifications
H; H10; H10D; H10D48/00; H10D48/50; G; G01; G01K; G01K7/00; G01K7/02; G01L; G01L9/00; G01L9/0041; G01L9/0051; G01L9/0052; G01L9/0054; H10D99/00; H10W; H10W40/00; H10W40/10; H10W72/00; Y; Y10; Y10S; Y10S148/00; Y10S148/051; Y10S148/097; Y10S148/136; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49082; Y10T29/49103

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 111 words
A transducer comprising: a single-crystal, semiconductor support member having a frame portion of a first conductivity type and a web portion, thinner than the frame portion, of a second conductivity type; a sensing region of lower resistivity than the web portion formed in the web portion; an insulating layer substantially covering the web portion; a first conductor supported on the insulating layer and making electrical contact with a first portion of the sensing region through a first opening in the insulating layer; and a second conductr supported on the insulating layer and making electrical contact with a second portion of the sensing region through a second opening in the insulating layer.
Claim 2
Dependent Claim 111 words
A transducer comprising: a single-crystal, semiconductor support member having a frame portion of a first conductivity type and a web portion, thinner than the frame portion, of a second conductivity type; a sensing region of lower resistivity than the web portion formed in the web portion; an insulating layer substantially covering the web portion; a first conductor supported on the insulating layer and making electrical contact with a first portion of the sensing region through a first opening in the insulating layer; and a second conductr supported on the insulating layer and making electrical contact with a second portion of the sensing region through a second opening in the insulating layer.
Claim 3
Dependent Claim 132 words
A transducer as in claim 1 including a third conductor supported on the insulating layer wherein: the frame portion is peripheral; the first portion of the sensing region is near the center of the web portion; the sensing region forms a first leg of the thermocouple; the first conductor forms a second leg of the thermocouple; the contact between the first portion of the sensing region and the first conductor forms a first thermocouple junction; and the third conductor makes contact with the first conductor near the frame portion, and the second portion of the sensing region makes contact with the second conductor near the frame portion, the contact between the second portion of the sensing region and the second conductor and between the first and third metals forming second thermocouple junctions.
Claim 4
Dependent Claim 26 words
A transducer as in claim 2 wherein the doping of the sensing region is non-uniform along a direction normal to the surface of the web portion.
Claim 5
Dependent Claim 24 words
A transducer as in claim 3 wherein: the frame portion is P-conductivity type; and the web portion and the sensing region are N-conductivity type.
Claim 6
Dependent Claim 64 words
A transducer as in claim 1 wherein: the frame portion is peripheral; the contact between the first conductor and the first portion of the sensing region is near a first segment of the frame portion; and the contact between the second conductor and the second portion of the sensing region is near a second segment of the frame portion, substantially opposite the first segment.
Claim 7
Dependent Claim 26 words
A transducer as in claim 5 wherein the doping of the sensing region is non-uniform along a direction normal to the surface of the web portion.
Claim 8
Dependent Claim 47 words
A transducer as in claim 1 wherein: the first portion of the sensing region is a first conductivity type; the second portion of the sensing region is a second conductivity type; and a rectifying junction is formed between the first and second portions of the sensing region.

References Cited (Backward Citations)

US3292057A Cited
US3337780A Cited
US3294988A Cited
US3406366A Cited
US3568124A Cited
US3492513A Cited
US3675140A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1976-09-10 1977-03-12 1977-09-11 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1980-09-10 1981-03-12 1981-09-11 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1984-09-10 1985-03-12 1985-09-11 $7700.00 Window Closed / Lapsed

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