US4556629A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Developer composition for positive photoresists using solution with cyclic quaternary ammonium hydroxides
Assignee: ATK Launch Systems LLC
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Filing: 1983-12-21
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Granted: 1985-12-03
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Expires: 2003-12-21
Abstract
Abstract A method of developing a positive photoresist layer which has been image-wise-exposed comprising contacting the layer with an alkaline developing composition to remove exposed areas of the layer, the developing composition comprising a solution containing a cyclic quaternary ammonium hydroxide developing agent in a sufficient concentration to remove exposed areas of the layer. The present invention also includes a developing composition for use in the method.
Inventors
- 👤 Susan B. Poulin
- 👤 Ann B. Salamone
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:07
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/32; G03F7/322
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
73 words
A positive photoresist developing composition consisting essentially of a solution of a cyclic quaternary ammonium hydroxide developing agent in which a quaternary substituted nitrogen is a member of an aromatic or nonaromatic ring of between 4 and 8 atoms; said developing agent being present in a concentration sufficient to act as a developing agent, the solution having a normality of the cyclic quaternary ammonium hydroxide between about 0.1 N and about 6.0 N.
Claim 2
Dependent Claim
73 words
A positive photoresist developing composition consisting essentially of a solution of a cyclic quaternary ammonium hydroxide developing agent in which a quaternary substituted nitrogen is a member of an aromatic or nonaromatic ring of between 4 and 8 atoms; said developing agent being present in a concentration sufficient to act as a developing agent, the solution having a normality of the cyclic quaternary ammonium hydroxide between about 0.1 N and about 6.0 N.
Claim 3
Dependent Claim
66 words
The composition of claim 1 wherein the cyclic quaternary ammonium hydroxide is a derivative of pyridine, purine, pyrrole, carbazole, an isopyrrole, diazepine, pyrazole, azepine, triazole, indole, oxazole, indolemine, isoxazole, isobenzazole, thiazole, pyrindine, an isothiazole, pyranolpyrrole, an oxadiazole, isoindazole, dioxazole, indoxazine, pyridazine, benzoxazole, pyrimidine, anthranil, pyrazine, quinoline, piperazine, isoquinoline, triazine, cinnoline, oxazine, quinazoline, isoxazine, naphthridine, oxathiazine, pyrido-pyridine, oxadiazine, benzoxazine, morpholine, benzisoxazine, acridine, imidazoline, an oxatriazole, or pyrrolidone.
Claim 4
Dependent Claim
20 words
The composition of claim 1 wherein the quaternary nitrogen of the cyclic quaternary ammonium hydroxide is within an aromatic ring.
Claim 5
Dependent Claim
17 words
The composition of claim 3 wherein the cyclic quaternary ammonium hydroxide is an N-alkyl substituted pyridinium hydroxide.
Claim 6
Dependent Claim
20 words
The composition of claim 4 wherein the alkyl group on the quaternary nitrogen is of one to four carbon atoms.
Claim 7
Dependent Claim
15 words
The composition of claim 4 wherein the cyclic quaternary ammonium hydroxide is N-methyl pyridinium hydroxide.
Claim 8
Dependent Claim
25 words
The composition of claim 1 wherein the normality of the developing agent within the developing composition is between about 0.2 N and about 0.5 N.
Claim 9
Dependent Claim
17 words
The composition of claim 1 wherein the developing composition comprises an aqueous solution of the developing agent
Claim 10
Dependent Claim
13 words
The composition of claim 1 wherein the developing composition also includes a surfactant.
Claim 11
Dependent Claim
11 words
An etchant or RTV stripper comprising the composition of claim 1.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-12-02 | 1989-06-03 | 1989-12-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-12-02 | 1993-06-03 | 1993-12-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-12-02 | 1997-06-03 | 1997-12-03 | $7700.00 | Window Closed / Lapsed |