US4384037A
Expired / Lapsed
US
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Positive type photosensitive resin composition
Assignee: JSR Corp
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Filing: 1981-03-02
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Granted: 1983-05-17
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Expires: 2001-03-02
Abstract
Abstract A photosensitive resin composition comprising a 1,2-quanonediazide compound and a copolymer consisting essentially of (A) a conjugated diolefinic compound, (B) a monoolefinically unsaturated compound and (C) an α,β-ethylenically unsaturated carboxylic acid. Said composition can provide a positive type resist which is difficult to break and excellent in adhesion to a substrate.
Inventors
- 👤 Yoshihiro Hosaka
- 👤 Yoichi Kamoshida
- 👤 Yoshiyuki Harita
- 👤 Kunihiro Harada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 13:30
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/023; G03F7/0233; C; C08; C08K; C08K5/00; C08K5/16; C08K5/22; C08K5/27; C08K5/28; C08K5/315; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/108; Y10S430/111
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
84 words
A positive photosensitive resin composition consisting of an admixture of 5-100 parts by weight of a 1,2-quinonediazide compound per 100 parts of a copolymer consisting essentially of (A) 5-60 mole % of a conjugated diolefinic compound, (B) 25-90 mole % of a monoolefinically unsaturated compound and (C) 5-40 mole % of an α,β-ethylenically unsaturated carboxylic acid and an additive selected from the group consisting of a storage stabilizer, a dyestuff, a pigment, a polymer soluble in an aqueous alkali solution and a mixture thereof.
Claim 2
Dependent Claim
84 words
A positive photosensitive resin composition consisting of an admixture of 5-100 parts by weight of a 1,2-quinonediazide compound per 100 parts of a copolymer consisting essentially of (A) 5-60 mole % of a conjugated diolefinic compound, (B) 25-90 mole % of a monoolefinically unsaturated compound and (C) 5-40 mole % of an α,β-ethylenically unsaturated carboxylic acid and an additive selected from the group consisting of a storage stabilizer, a dyestuff, a pigment, a polymer soluble in an aqueous alkali solution and a mixture thereof.
Claim 3
Dependent Claim
57 words
A positive type photosensitive resin composition consisting of an admixture of 5-100 parts by weight of a 1,2-quinonediazide compound per 100 parts of a copolymer consisting essentially of (A) 5-60 mole % of a conjugated diolefinic compound, (B) 25-90 mole % of a monoolefinically unsaturated compound and (C) 5-40 mole % of an α,β-ethylenically unsaturated carboxylic acid.
Claim 4
Dependent Claim
57 words
A positive type photosensitive resin composition consisting of an admixture of 5-100 parts by weight of a 1,2-quinonediazide compound per 100 parts of a copolymer consisting essentially of (A) 5-60 mole % of a conjugated diolefinic compound, (B) 25-90 mole % of a monoolefinically unsaturated compound and (C) 5-40 mole % of an α,β-ethylenically unsaturated carboxylic acid.
Claim 5
Dependent Claim
42 words
A photosensitive resin composition according to claim 2, wherein said copolymer consists of (A) 10-40 mole % of a conjugated diolefinic compound, (B) 35-80 mole % of a monoolefinically unsaturated compound and (C) 10-25 mole % of an α,β-ethylenically unsaturated carboxylic acid.
Claim 6
Dependent Claim
25 words
A photosensitive resin composition according to claim 2, wherein said copolymer has an intrinsic viscosity of 0.01-1 dl/g as measured in tetrahydrofuran at 30° C.
Claim 7
Dependent Claim
25 words
A photosensitive resin composition according to claim 2, wherein said copolymer has an intrinsic viscosity of 0.01-0.3 dl/g as measured in tetrahydrofuran at 30° C.
Claim 8
Dependent Claim
33 words
A photosensitive resin composition according to claim 2, 3, 4 or 5 wherein said conjugated diolefinic compound is at least one member selected from the group consisting of 1,3-butadiene, isoprene, chloroprene and dimethylbutadiene.
Claim 9
Dependent Claim
22 words
A photosensitive resin composition according to claim 2, 3, 4 or 5, wherein said conjugated diolefinic compound (A) is 1,3-butadiene or isoprene.
Claim 10
Dependent Claim
59 words
A photosensitive resin composition according to claim 2, 3, 4 or 5, wherein said monoolefinically unsaturated compound (B) is at least one member selected from the group consisting of alkyl methacrylates, alkyl acrylates, cycloalkyl methacrylates, cycloalkyl acrylates, aryl methacrylates, aryl acrylates, dialkyl dicarboxylates, hydroxyalkyl acrylates or methacrylates, styrene, styrene derivatives, acrylonitrile, methacrylonitrile, vinyl chloride, vinylidene chloride and vinyl acetate.
Claim 11
Dependent Claim
38 words
A photosensitive resin composition according to claim 2, 3, 4 or 5, wherein said monoolefinically unsaturated compound (B) is at least one compound selected from the group consisting of methyl methacrylate, ethyl methacrylate, n-butyl methacrylate, styrene and acrylonitrile.
Claim 12
Dependent Claim
55 words
A photosensitive resin composition according to claim 2, 3, 4 or 5, wherein said α,β-ethylenically unsaturated carboxylic acid (C) is at least one compound selected from the group consisting of acrylic acid, methacrylic acid, crotonic acid, maleic acid, fumaric acid, citraconic acid, mesaconic acid, itaconic acid, maleic anhydride, itaconic anhydride, monoethyl maleate and monoethyl fumarate.
Claim 13
Dependent Claim
25 words
A photosensitive resin composition according to claim 2, 3, 4 or 5, wherein said α,β-ethylenically unsaturated carboxylic acid (C) is acrylic acid or methacrylic acid.
Claim 14
Dependent Claim
34 words
A photosensitive resin composition according to claim 2, 3, 4 or 5, wherein said 1,2-quinonediazide compound is a 1,2-benzoquinonediazidesulfonic acid ester, a 1,2-naphthoquinonediazidesulfonic acid ester, a 1,2-benzoquinonediazidesulfonic acid amide or a 1,2-naphthoquinonediazidesulfonic acid amide.
Claim 15
Dependent Claim
32 words
A photosensitive resin composition according to claim 2, 3, 4 or 5 wherein the amount of said 1,2-quinonediazide compound is 10-50 parts by weight per 100 parts by weight of said copolymer.
Claim 16
Dependent Claim
47 words
A photosensitive resin composition according to claim 2, wherein the copolymer is a copolymer having a narrow composition distribution prepared under such conditions that the standard deviations of the copolymerized proportions of individual copolymer components at any plural times during the polymerization reaction are 3 or less.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-05-16 | 1986-11-15 | 1987-05-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-05-16 | 1990-11-15 | 1991-05-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-05-16 | 1994-11-15 | 1995-05-17 | $7700.00 | Window Closed / Lapsed |