US3900325A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Light sensitive quinone diazide composition with n-3-oxohydrocarbon substituted acrylamide
Assignee: Shipley Co Inc
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Filing: 1972-11-06
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Granted: 1975-08-19
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Expires: 1992-11-06
Abstract
Abstract This invention is for a positive working, light sensitive composition useful for diverse applications such as metal plating and etching of metal, ceramics and the like, in a pattern, for example, in chemical milling or in the manufacture of printed circuit boards. Light sensitive compositions of the invention comprise (1) a major portion of a resin system having as principal ingredients, a carboxyl type acrylic resin and an acrylamide as a modifier and (2) a minor portion of at least one positive working, light sensitive diazo compound. By use of the acrylamide modifier in combination with the acrylic resin, there is provided a thick resist coating having improved photochemical properties and improved chemical resistance, especially to acid.
Inventors
- 👤 Carl W Christensen
- 👤 Calvin M Isaacson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 05:47
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/023; G03F7/0233
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
170 words
A POSITIVE WORKING PHOTORESIST COMPOSITION COMPRISING AN ORTHO QUINONE DIAZIDE SULFONYL ESTER LIGHT SENSITIVE COMPOUND, AN ACRYLIC TERPOLYMER RESIN WHEREIN ONE OF THE MONOMERS OF THE TERPOLYMER IS SELECTED FROM THE GROUP CONSISTING OF METHYL ACRYLATE, ETHYL ETHYLATE, AND PROPYL ACRYLATE, WHEREIN A SECOND MONOMER OF THE TERPOLYMER IS SELECTED FROM THE GROUP CONSISTING OF P-METHYL STYRENE, P-CHLOROSTYRENE, PETHYL STYRENE, AND STYRENE AND THE THIRD MONOMER OF THE TERPOLYMER IS SELECTED FROM THE GROUP CONSISTING OF ACRYLIC ACID, METHACRYLIC ACID, AND MALEIC ACID, WHEREIN THE WEIGHT PERCENT OF SAID THIRD MONOMER IS 3-15% BY WEIGHT AS BASED ON THE TOTAL WEIGHT OF THE MONOMERS OF SAID ACRYLIC TERPOLYMER RESIN, AND AN N-3-OXOHYDROCARBON SUBSTITUTED ACRYLAMIDE, THE RATIO OF SAID ACRYLIC RESIN TO SAID ACRYLAMIDE BEING BETWEEN 100:1 PARTS ACRYLIC RESIN TO ACRYLAMIDE TO 1:2 PARTS ACRYLIC RESIN TO ACRYLAMIDE ON A WEIGHT BASIS, AND SAID LIGHT SENSITIVE COMPOUND COMPRISING UP TO 40% BY WEIGHT OF THE PHOTORESIST COMPOSITION ON A DRY SOLIDS BASIS, AND SAID ACRYLAMIDE BEING REPRESENTED BY THE FORMULA:
Claim 2
Dependent Claim
170 words
A POSITIVE WORKING PHOTORESIST COMPOSITION COMPRISING AN ORTHO QUINONE DIAZIDE SULFONYL ESTER LIGHT SENSITIVE COMPOUND, AN ACRYLIC TERPOLYMER RESIN WHEREIN ONE OF THE MONOMERS OF THE TERPOLYMER IS SELECTED FROM THE GROUP CONSISTING OF METHYL ACRYLATE, ETHYL ETHYLATE, AND PROPYL ACRYLATE, WHEREIN A SECOND MONOMER OF THE TERPOLYMER IS SELECTED FROM THE GROUP CONSISTING OF P-METHYL STYRENE, P-CHLOROSTYRENE, PETHYL STYRENE, AND STYRENE AND THE THIRD MONOMER OF THE TERPOLYMER IS SELECTED FROM THE GROUP CONSISTING OF ACRYLIC ACID, METHACRYLIC ACID, AND MALEIC ACID, WHEREIN THE WEIGHT PERCENT OF SAID THIRD MONOMER IS 3-15% BY WEIGHT AS BASED ON THE TOTAL WEIGHT OF THE MONOMERS OF SAID ACRYLIC TERPOLYMER RESIN, AND AN N-3-OXOHYDROCARBON SUBSTITUTED ACRYLAMIDE, THE RATIO OF SAID ACRYLIC RESIN TO SAID ACRYLAMIDE BEING BETWEEN 100:1 PARTS ACRYLIC RESIN TO ACRYLAMIDE TO 1:2 PARTS ACRYLIC RESIN TO ACRYLAMIDE ON A WEIGHT BASIS, AND SAID LIGHT SENSITIVE COMPOUND COMPRISING UP TO 40% BY WEIGHT OF THE PHOTORESIST COMPOSITION ON A DRY SOLIDS BASIS, AND SAID ACRYLAMIDE BEING REPRESENTED BY THE FORMULA:
Claim 3
Dependent Claim
21 words
The composition of claim 1 where the ratio of the acrylic terpolymer resin to the acrylamide varies between 50:1 and 1:1.
Claim 4
Dependent Claim
21 words
The composition of claim 1 where the ratio of the acrylic terpolymer resin to the acrylamide varies between 25:1 and 10:1.
Claim 5
Dependent Claim
26 words
The composition of claim 1 where the light sensitive therefor comprises from 2 to 20% by weight of the photoresist composition on a dry solids basis.
Claim 6
Dependent Claim
26 words
The composition of claim 1 where the light sensitive therefor comprises from 8 to 12% by weight of the photoresist composition on a dry solids basis.
Claim 7
Dependent Claim
9 words
The composition of claim 1 where R is methyl.
Claim 8
Dependent Claim
14 words
The composition of claim 1 where R is methyl and R'''' is 1,1-dimethyl ethylene.
Claim 9
Dependent Claim
29 words
The composition of claim 1 including a novolak resin of the phenol-formaldehyde type present in an amount of from 25 to 75 % by weight of said resin system.
Claim 10
Dependent Claim
25 words
The composition of claim 8 where the novolak resin is present in an amount of from 40 to 60% by weight of said resin system.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-08-18 | 1979-02-17 | 1979-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-08-18 | 1983-02-17 | 1983-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-08-18 | 1987-02-17 | 1987-08-19 | $7700.00 | Window Closed / Lapsed |