Patent US4218909A successfully refreshed from Google Patents.
Patent US4981909A successfully refreshed from Google Patents.
US4981909A
Expired / Lapsed
US
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Plasma-resistant polymeric material, preparation thereof, and use thereof
Assignee: International Business Machines Corp
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Filing: 1988-09-07
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Granted: 1991-01-01
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Expires: 2008-09-07
Abstract
Abstract Plasma-resistant polymeric materials are prepared by reacting a polymeric material containing reactive hydrogen functional groups with a multifunctional organometallic material containing at least two functional groups which are reactive with the reactive hydrogen functional groups of the polymeric material, such as hexamethylcyclotrisilazane.
Inventors
- 👤 Edward D. Babich
- 👤 Michael Hatzakis
- 👤 Scott L. Jacobs
- 👤 Juri R. Parasczcak
- 👤 Jane M. Shaw
- 👤 David F. Witman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 18:52
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/26; G03F7/265
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
85 words
A process which comprises providing a layer of polymeric material on a substrate wherein said polymeric material contains at least reactive hydrogen functional groups or reactive hydrogen functional precursor groups, when aid polymeric material contains reactive hydrogen function precursor groups converting said precursor groups to reactive hydrogen groups reacting at least through 25% of the depth of said layer of polymeric material with a multifunctional organometallic material containing at least two functional groups which are reactive with the hydrogen reactive groups of said polymeric material.
Claim 2
Dependent Claim
85 words
A process which comprises providing a layer of polymeric material on a substrate wherein said polymeric material contains at least reactive hydrogen functional groups or reactive hydrogen functional precursor groups, when aid polymeric material contains reactive hydrogen function precursor groups converting said precursor groups to reactive hydrogen groups reacting at least through 25% of the depth of said layer of polymeric material with a multifunctional organometallic material containing at least two functional groups which are reactive with the hydrogen reactive groups of said polymeric material.
Claim 3
Dependent Claim
17 words
The process of claim 1 wherein at least 50% of the thickness of said layer is reacted.
Claim 4
Dependent Claim
14 words
The process of claim 1 wherein the entire thickness of said layer is reacted.
Claim 5
Dependent Claim
14 words
The process of claim 1 wherein said thickness is at least about 0.3 microns.
Claim 6
Dependent Claim
14 words
The process of claim 1 wherein said thickness is about 0.3 to 25 microns.
Claim 7
Dependent Claim
15 words
The process of claim 1 wherein said thickness is about 0.5 to about 5 microns.
Claim 8
Dependent Claim
13 words
The process of claim 1 wherein said layer is prebaked prior to reacting.
Claim 9
Dependent Claim
19 words
The process of claim 1 wherein said polymeric material is a prepolymerized phenolic-formaldehyde polymer containing a diazo ketone sensitizer.
Claim 10
Dependent Claim
29 words
The process of claim 1 wherein said organometallic material is represented by the formula: ##STR37## wherein each R IX individually is alkyl and each R VIII individually is alkyl.
Claim 11
Dependent Claim
51 words
A cross-linked polymeric material being the reaction product between the functional groups of a cyclic organometallic material having 4, 5 or 6 atoms in the ring which are reactive with reactive hydrogen functional groups and a polymeric material containing reactive hydrogen functional groups, or reactive hydrogen functional precursor groups, or both.
Claim 12
Dependent Claim
51 words
A cross-linked polymeric material being the reaction product between the functional groups of a cyclic organometallic material having 4, 5 or 6 atoms in the ring which are reactive with reactive hydrogen functional groups and a polymeric material containing reactive hydrogen functional groups, or reactive hydrogen functional precursor groups, or both.
Claim 13
Dependent Claim
15 words
The cross-linked polymeric material of claim 10 wherein said polymeric material is a phenolic-formaldehyde polymer.
Claim 14
Dependent Claim
12 words
The polymeric material of claim 10 wherein said organometallic material is hexamethylcyclotrisilazane.
Claim 15
Dependent Claim
25 words
The cross-linked polymeric material of claim 12 which contains at least about 1 part by weight of silicon per 20 parts of the polymeric material.
Claim 16
Dependent Claim
27 words
The cross-linked polymeric material of claim 12 which contains up to about 1 part by weight of silicon per 2 parts by weight of the polymeric material.
Claim 17
Dependent Claim
20 words
The polymeric material of claim 12 wherein the ratio of silicon to polymeric material is about 1:15 to about 1:4.
Claim 18
Dependent Claim
15 words
The cross-linked polymeric material of claim 10 which is in the form of a layer.
Claim 19
Dependent Claim
23 words
The cross-linked polymeric material of claim 10 which is in the form of a layer of about 0.4 to about 10 microns thick.
Claim 20
Dependent Claim
15 words
The polymeric material of claim 10 wherein said organometallic material is a cyclic organometallic material.
Claim 21
Dependent Claim
22 words
The cross-linked polymeric material of claim 10 wherein said polymeric material is a prepolymerized phenolic formaldehyde polymer containing a diazo ketone sensitizer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-31 | 1994-07-02 | 1995-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-31 | 1998-07-02 | 1999-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-31 | 2002-07-02 | 2003-01-01 | $7700.00 | Window Closed / Lapsed |