US4125650A
Expired / Lapsed
US
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Resist image hardening process
Assignee: International Business Machines Corp
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Filing: 1977-08-08
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Granted: 1978-11-14
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Expires: 1997-08-08
Abstract
Abstract Resist images are hardened so that they are flow resistant at elevated temperatures by coating the image with a layer of a quinone-diazide hardening agent and heating the image to cause the agent to react with the resist and form a hardened image.
Inventors
- 👤 George T. Chiu
- 👤 Edward C. Fredericks
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 13:33
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/40
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
62 words
A process for forming a flow resistant organic polymeric resist mask on a substrate comprising coating the mask with a solution of a quinone diazide hardening agent to form a layer of hardening agent on the resist mask, heating the coated mask to cause the agent to react with the exposed surfaces of the mask and then removing the excess hardening agent.
Claim 2
Dependent Claim
62 words
A process for forming a flow resistant organic polymeric resist mask on a substrate comprising coating the mask with a solution of a quinone diazide hardening agent to form a layer of hardening agent on the resist mask, heating the coated mask to cause the agent to react with the exposed surfaces of the mask and then removing the excess hardening agent.
Claim 3
Dependent Claim
19 words
The process of claim 1 wherein the hardening agent is a water soluble acid salt of an orthoquinone diazide.
Claim 4
Dependent Claim
18 words
The process of claim 2 wherein the hardening agent is a sulfonic acid salt of an orthoquinone diazide.
Claim 5
Dependent Claim
18 words
The process of claim 2 wherein the hardening agent is a carboxylic acid salt of an orthoquinone diazide.
Claim 6
Dependent Claim
10 words
The process of claim 1 wherein the solution comprises water.
Claim 7
Dependent Claim
17 words
The process of claim 5 wherein the solution includes an alcohol having 2 to 4 carbon atoms.
Claim 8
Dependent Claim
24 words
The process of claim 1 wherein the hardening agent concentration in the solution is from about 0.5 to 10 percent by weight of solution.
Claim 9
Dependent Claim
39 words
The process of claim 1 wherein the hardening agent concentration in the solution is from about 0.5 to 1.5 percent by weight of solution and the layer of hardening agent is from about 500 to 1000 A in thickness.
Claim 10
Dependent Claim
33 words
The process of claim 2 wherein the hardening agent has the formula: ##STR2## where R is SO 3 X or COOX and X is Na, K, Ca, Ba, Li, or NH 4 .
Claim 11
Dependent Claim
33 words
The process of claim 2 wherein the hardening agent has the formula: ##STR3## where R is SO 3 X or COOX and X is Na, K, Ca, Ba, Li, or NH 4 .
Claim 12
Dependent Claim
33 words
The process of claim 2 wherein the hardening agent has the formula: ##STR4## where R is SO 3 X or COOX and X is Na, K, Ca, Ba, Li, or NH 4 .
Claim 13
Dependent Claim
33 words
The process of claim 2 wherein the hardening agent has the formula: ##STR5## where R is SO 3 X or COOX and X is Na, K, Ca, Ba, Li, or NH 4 .
Claim 14
Dependent Claim
12 words
The process of claim 1 wherein the solution includes a wetting agent.
Claim 15
Dependent Claim
25 words
The process of claim 13 wherein the wetting agent is a surfactant present in an amount of about 0.01 to 1.0% by weight of solution.
Claim 16
Dependent Claim
17 words
The process of claim 1 wherein the resist mask is formed from a positive acting resist composition.
Claim 17
Dependent Claim
17 words
The process of claim 1 wherein the resist mask is formed from a negative acting resist composition.
References Cited (Backward Citations)
US3278305A
Cited
US3502470A
Cited
US3459708A
Cited
US3660097A
Cited
US3711287A
Cited
US3920483A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-11-13 | 1982-05-15 | 1982-11-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-11-13 | 1986-05-15 | 1986-11-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-11-13 | 1990-05-15 | 1990-11-14 | $7700.00 | Window Closed / Lapsed |