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US4456679A Expired / Lapsed US ⏱️ 0.0 years remaining

Production of relief images or resist images by a positive-working method

Assignee: BASF SE
•
Filing: 1983-08-22
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Granted: 1984-06-26
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Expires: 2003-08-22
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Abstract

Abstract Relief images or resist images are produced by a positive-working process, using a solid photosensitive resist layer which is applied to a base and contains a compound possessing two or more aromatic and/or heteroaromatic o-nitrocarbinol ester groups and crosslinking compounds possessing two or more reactive groups which are capable, under the action of heat, of reacting with carboxyl groups to form a covalent chemical bond. To produce the relief images or resist images, the photosensitive resist layer is first exposed imagewise to actinic light, the exposed areas of this layer are then washed out with an aqueous developer, the remaining resist layer is post-exposed uniformly to actinic light and finally the post-exposed resist layer is thermally crosslinked and hardened.

Inventors

  • 👤 Reinhold J. Leyrer
  • 👤 Dietrich Saenger

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 15:45
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/0045; G03F7/039; Y; Y10; Y10S; Y10S522/00; Y10S522/904

Claims Analysis

Total Claims: 20
Claim 1
Independent Claim 181 words
A process for the production of a relief image or a resist image, which constitutes a positive image of an image-bearing transparency, in which a solid photosensitive resist layer applied to a base is exposed imagewise to actinic light and the exposed areas of the resist layer are then washed out with an aqueous developer, wherein the photosensitive resist layer contains, as the photosensitive component, a compound possessing two or more aromatic and/or heteroaromatic o-nitrocarbinol ester groups of the formula (I) ##STR4## where A is a radical of an unsubstituted or substituted 5-membered to 14-membered aromatic or heteroaromatic ring system, and X is hydrogen, alkyl of 1 to 8 carbon atoms or an unsubstituted or substituted aryl or aralkyl radical, and wherein the said layer contains a compound which effects crosslinking and possesses 2 or more reactive groups which are capable of reacting with --COOH groups under the action of heat to form a covalent chemical bond, and wherein the said layer is exposed imagewise, developed, post-exposed uniformly to actinic light and then crosslinked and hardened under the action of heat.
Claim 2
Dependent Claim 181 words
A process for the production of a relief image or a resist image, which constitutes a positive image of an image-bearing transparency, in which a solid photosensitive resist layer applied to a base is exposed imagewise to actinic light and the exposed areas of the resist layer are then washed out with an aqueous developer, wherein the photosensitive resist layer contains, as the photosensitive component, a compound possessing two or more aromatic and/or heteroaromatic o-nitrocarbinol ester groups of the formula (I) ##STR4## where A is a radical of an unsubstituted or substituted 5-membered to 14-membered aromatic or heteroaromatic ring system, and X is hydrogen, alkyl of 1 to 8 carbon atoms or an unsubstituted or substituted aryl or aralkyl radical, and wherein the said layer contains a compound which effects crosslinking and possesses 2 or more reactive groups which are capable of reacting with --COOH groups under the action of heat to form a covalent chemical bond, and wherein the said layer is exposed imagewise, developed, post-exposed uniformly to actinic light and then crosslinked and hardened under the action of heat.
Claim 3
Dependent Claim 55 words
A process as claimed in claim 1, wherein the photosensitive resist layer contains a compound possessing o-nitrocarbinol ester groups of the formula (I), in which the carbinol on which the o-nitrocarbinol ester groups of the formula (I) are based is o-nitrobenzyl alcohol, 2-nitro-6-chlorobenzyl alcohol, 2-nitro-4-cyanobenzyl alcohol, 2-nitro-4,5-dimethoxybenzyl alcohol, α-methyl-o-nitrobenzyl alcohol, α-phenyl-o-nitrobenzyl alcohol or α-(o-nitrophenyl)-o-nitrobenzyl alcohol.
Claim 4
Dependent Claim 50 words
A process as claimed in claim 1, wherein the photosensitive resist layer contains, as the compound possessing the o-nitrocarbinol ester groups of the formula (I), a di- and/or polyester of a low molecular weight di- and/or polycarboxylic acid and in addition a polymeric binder which is compatible with these esters.
Claim 5
Dependent Claim 54 words
A process as claimed in claim 1, wherein the photosensitive resist layer contains a polymer which has a molecular weight of above 500 and contains not less than 5% by weight, based on the molecular weight of the polymer, of aromatic and/or heteroaromatic o-nitrocarbinol ester groups of the formula (I) bonded in the molecule.
Claim 6
Dependent Claim 44 words
A process as claimed in claim 4, wherein the photosensitive resist layer contains a polymer which possesses o-nitrocarbinol ester groups of the formula (I) and is derived from a homopolymer or copolymer of acrylic acid, methacrylic acid, maleic acid, fumaric acid and/or crotonic acid.
Claim 7
Dependent Claim 41 words
A process as claimed in claim 1, wherein the photosensitive resist layer contains a compound, in particular a polymer, which, in addition to the o-nitrocarbinol ester groups of the formula (I), also contains the crosslinking reactive groups incorporated in the molecule.
Claim 8
Dependent Claim 33 words
A process as claimed in claim 6, wherein the compound possessing o-nitrocarbinol ester groups of the formula (I) contains, as crosslinking reactive groups, amine, imine, amide, epoxide, hydroxyl, isocyanate and/or blocked isocyanate groups.
Claim 9
Dependent Claim 42 words
A process as claimed in claim 1, wherein the photosensitive resist layer contains, in addition to the compound possessing the o-nitrocarbinol ester groups of the formula (I), one or more crosslinking compounds possessing 2 or more reactive groups of the type mentioned.
Claim 10
Dependent Claim 37 words
A process is claimed in claim 8, wherein the photosensitive resist layer contains, as a crosslinking compound, an epoxide possessing two or more epoxide groups or an isocyanate possessing two or more free or blocked isocyanate groups.
Claim 11
Dependent Claim 14 words
A process as claimed in claim 8, wherein the crosslinking compound is an α,ω-diisocyanatopolycarbodiimide.
Claim 12
Dependent Claim 19 words
A process as claimed in claim 8, wherein the crosslinking compound contains two or more hydroxyl and/or amino groups.
Claim 13
Dependent Claim 30 words
A process as claimed in claim 1, wherein the photosensitive resist layer contains, as further additives, plasticizers, flow improvers, catalysts for the thermal hardening, sensitizers, dyes, pigments and/or photochromic substances.
Claim 14
Dependent Claim 27 words
A process as claimed in claim 1, wherein the thermal crosslinking and hardening of the post-exposed resist layer is carried out at from 50° to 250° C.
Claim 15
Dependent Claim 18 words
A process as claimed in claim 1, wherein the photosensitive layer is from 0.1 to 2,000 μm thick.
Claim 16
Dependent Claim 27 words
A process as claimed in claim 1, wherein the dry, solid photosensitive resist layer is laminated onto the base using pressure with the optional application of heat.
Claim 17
Dependent Claim 35 words
A process as claimed in claim 15, wherein the photosensitive resist layer, before being applied to the base, is pre-exposed uniformly for a short time to actinic light, on that side which faces the base.
Claim 18
Dependent Claim 51 words
A process as claimed in claim 1, wherein the photosensitive resist layer, before being uniformly post-exposed and thermally hardened, is subjected several times to alternate imagewise exposure and washing out with the developer, and, after washing out but before each subsequent imagewise exposure, the bared areas of the base are modified.
Claim 19
Dependent Claim 32 words
A process as claimed in claim 1, wherein the photosensitive resist layer is applied to a perforated base, and, using the latter as a photomask, is exposed imagewise through the perforations therein.
Claim 20
Dependent Claim 35 words
A process as claimed in claim 18, wherein, before imagewise exposure, a light-scattering of reflecting layer, film or sheet is applied to that surface of the photosensitive resist layer which faces away from the base.

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-06-26 1987-12-26 1988-06-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-06-26 1991-12-26 1992-06-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-06-26 1995-12-26 1996-06-26 $7700.00 Window Closed / Lapsed

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