US4965222A
Expired / Lapsed
US
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Method of manufacturing an epitaxial indium phosphide layer on a substrate surface
Assignee: US Philips Corp
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Filing: 1989-10-02
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Granted: 1990-10-23
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Expires: 2009-10-02
Abstract
Abstract A method of manufacturing an epitaxial InP layer on a substrate surface by means of a MOVPE process at atmospheric pressure, cyclopentadienyl indium (I) or alkyl cyclopentadienyl indium (I) being used as the indium precursor, thereby precluding side reactions.
Inventors
- 👤 Aemilianus G. J. Staring
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 18:22
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C30; C30B; C30B25/00; C30B25/02; C23C16/00; C23C16/22; C23C16/30; C23C16/301; C30B29/00; C30B29/10; C30B29/40; G; G05; G05B; G05B2219/00; G05B2219/30; G05B2219/49; G05B2219/49013; Y; Y10; Y10S; Y10S148/00; Y10S148/11; Y10S148/119
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
51 words
A method of providing an epitaxial indium phosphide layer on a substrate surface by bringing a gas mixture comprising a metalorganic indium compound and phosphine into contact with the heated substrate surface, characterized in that cyclopentadienyl indium (I) is used as the metalorganic indium compound, the cyclopentadiene group optionally being alkyl-substituted.
Claim 2
Independent Claim
51 words
A method of providing an epitaxial indium phosphide layer on a substrate surface by bringing a gas mixture comprising a metalorganic indium compound and phosphine into contact with the heated substrate surface, characterized in that cyclopentadienyl indium (I) is used as the metalorganic indium compound, the cyclopentadiene group optionally being alkyl-substituted.
Claim 3
Dependent Claim
27 words
A method as claimed in claim 1, characterized in that the vapour pressure of the alkyl-substituted cyclopentadienyl indium (I) is at least 0.01 mbar at 20° C.
Claim 4
Dependent Claim
28 words
A method as claimed in claim 2, characterized in that monoalkyl cyclopentadienyl indium (I) is used, the number of carbon atoms of the alkyl group being maximally 4.
Claim 5
Dependent Claim
16 words
A method as claimed in claim 2, characterized in that methyl cyclopentadienyl indium (I) is used.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-10-22 | 1994-04-23 | 1994-10-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-10-22 | 1998-04-23 | 1998-10-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-10-22 | 2002-04-23 | 2002-10-23 | $7700.00 | Window Closed / Lapsed |