Hydrocarbon-substituted analogs of phosphine and arsine, particularly for metal organic chemical vapor deposition

Claim 1

A compound having the structure: ##STR7## wherein H is hydride and the respective identities of N, X, and Y are selected from the following table of species: ______________________________________ N X Y ______________________________________ arsenic hydride s-butyl arsenic hydride i-butyl arsenic hydride n-pentyl arsenic hydride i-pentyl arsenic hydride t-pentyl arsenic hydride neopentyl arsenic hydride cyclopentadienyl arsenic methyl i-propyl arsenic methyl n-butyl arsenic methyl s-butyl arsenic methyl i-butyl arsenic methyl t-butyl arsenic methyl n-pentyl arsenic methyl i-pentyl arsenic methyl t-pentyl arsenic methyl neopentyl arsenic methyl cyclopentadienyl arsenic ethyl n-propyl arsenic ethyl i-propyl arsenic ethyl n-butyl arsenic ethyl s-butyl arsenic ethyl i-butyl arsenic ethyl t-butyl arsenic ethyl n-pentyl arsenic ethyl i-pentyl arsenic ethyl t-pentyl arsenic ethyl neopentyl arsenic ethyl cyclopentadienyl arsenic ethyl phenyl arsenic n-propyl i-propyl arsenic n-propyl n-butyl arsenic n-propyl s-butyl arsenic n-propyl i-butyl arsenic n-propyl t-butyl arsenic n-propyl n-pentyl arsenic n-propyl i-pentyl arsenic n-propyl t-pentyl arsenic n-propyl neopentyl arsenic n-propyl cyclopentadienyl arsenic n-propyl phenyl arsenic i-propyl n-butyl arsenic i-propyl s-butyl arsenic i-propyl i-butyl arsenic i-propyl t-butyl arsenic i-propyl n-pentyl arsenic i-propyl i-pentyl arsenic i-propyl t-pentyl arsenic i-propyl neopentyl arsenic i-propyl cyclopentadienyl arsenic i-propyl phenyl arsenic n-butyl s-butyl arsenic n-butyl i-butyl arsenic n-butyl t-butyl arsenic n-butyl n-pentyl arsenic n-butyl i-pentyl arsenic n-butyl t-pentyl arsenic n-butyl neopentyl arsenic n-butyl cyclopentadienyl arsenic n-butyl phenyl arsenic s-butyl s-butyl arsenic s-butyl i-butyl arsenic s-butyl t-butyl arsenic s-butyl n-pentyl arsenic s-butyl i-pentyl arsenic s-butyl t-pentyl arsenic s-butyl neopentyl arsenic s-butyl cyclopentadienyl arsenic s-butyl phenyl arsenic i-butyl i-butyl arsenic i-butyl t-butyl arsenic i-butyl n-pentyl arsenic i-butyl i-pentyl arsenic i-butyl t-pentyl arsenic i-butyl neopentyl arsenic i-butyl cyclopentadienyl arsenic i-butyl phenyl arsenic t-butyl n-pentyl arsenic t-butyl i-pentyl arsenic t-butyl t-pentyl arsenic t-butyl neopentyl arsenic t-butyl cyclopentadienyl arsenic t-butyl phenyl arsenic n-pentyl n-pentyl arsenic n-pentyl i-pentyl arsenic n-pentyl t-pentyl arsenic n-pentyl neopentyl arsenic n-pentyl cyclopentadienyl arsenic n-pentyl phenyl arsenic i-pentyl i-pentyl arsenic i-pentyl t-pentyl arsenic i-pentyl neopentyl arsenic i-pentyl cyclopentadienyl arsenic i-pentyl phenyl arsenic t-pentyl t-pentyl arsenic t-pentyl neopentyl arsenic t-pentyl cyclopentadienyl arsenic t-pentyl phenyl arsenic neopentyl neopentyl arsenic neopentyl cyclopentadienyl arsenic neopentyl phenyl arsenic cyclopentadienyl cyclopentadienyl arsenic cyclopentadienyl phenyl phosphorus hydride t-pentyl phosphorus hydride neopentyl phosphorus methyl s-butyl phosphorus methyl i-butyl phosphorus methyl t-butyl phosphorus methyl n-pentyl phosphorus methyl i-pentyl phosphorus methyl t-pentyl phosphorus methyl neopentyl phosphorus methyl cyclopentadienyl phosphorus ethyl n-propyl phosphorus ethyl i-propyl phosphorus ethyl n-butyl phosphorus ethyl s-butyl phosphorus ethyl i-butyl phosphorus ethyl t-butyl phosphorus ethyl n-pentyl phosphorus ethyl i-pentyl phosphorus ethyl t-pentyl phosphorus ethyl neopentyl phosphorus ethyl cyclopentadienyl phosphorus n-propyl i-propyl phosphorus n-propyl n-butyl phosphorus n-propyl s-butyl phosphorus n-propyl i-butyl phosphorus n-propyl t-butyl phosphorus n-propyl n-pentyl phosphorus n-propyl i-pentyl phosphorus n-propyl t-pentyl phosphorus n-propyl neopentyl phosphorus n-propyl cyclopentadienyl phosphorus n-propyl phenyl phosphorus i-propyl n-butyl phosphorus i-propyl s-butyl phosphorus i-propyl t-butyl phosphorus i-propyl n-pentyl phosphorus i-propyl i-pentyl phosphorus i-propyl t-pentyl phosphorus i-propyl neopentyl phosphorus i-propyl cyclopentadienyl phosphorus i-propyl phenyl phosphorus n-butyl s-butyl phosphorus n-butyl i-butyl phosphorus n-butyl t-butyl phosphorus n-butyl n-pentyl phosphorus n-butyl i-pentyl phosphorus n-butyl t-pentyl phosphorus n-butyl neopentyl phosphorus n-butyl cyclopentadienyl phosphorus s-butyl i-butyl phosphorus s-butyl t-butyl phosphorus s-butyl n-pentyl phosphorus s-butyl i-pentyl phosphorus s-butyl t-pentyl phosphorus s-butyl neopentyl phosphorus s-butyl cyclopentadienyl phosphorus s-butyl phenyl phosphorus i-butyl t-butyl phosphorus i-butyl n-pentyl phosphorus i-butyl i-pentyl phosphorus i-butyl t-pentyl phosphorus i-butyl neopentyl phosphorus i-butyl cyclopentadienyl phosphorus i-butyl phenyl phosphorus t-butyl n-pentyl phosphorus t-butyl t-pentyl phosphorus t-butyl neopentyl phosphorus t-butyl cyclopentadienyl phosphorus n-pentyl n-pentyl phosphorus n-pentyl i-pentyl phosphorus n-pentyl t-pentyl phosphorus n-pentyl neopentyl phosphorus n-pentyl cyclopentadienyl phosphorus n-pentyl phenyl phosphorus i-pentyl t-pentyl phosphorus i-pentyl neopentyl phosphorus i-pentyl cyclopentadienyl phosphorus i-pentyl phenyl phosphorus t-pentyl t-pentyl phosphorus t-pentyl neopentyl phosphorus t-pentyl cyclopentadienyl phosphorus t-pentyl phenyl phosphorus neopentyl neopentyl phosphorus neopentyl cyclopentadienyl phosphorus neopentyl phenyl phosphorus cyclopentadienyl cyclopentadienyl ______________________________________