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US4950558A Expired / Lapsed US ⏱️ 0.0 years remaining

Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof

Assignee: Verizon Laboratories Inc
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Filing: 1988-09-23
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Granted: 1990-08-21
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Expires: 2008-09-23
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Abstract

Abstract An oxidation resistant, high temperature thermal cycling resistant coated ceramic article for ceramic heat engine applications. The substrate is a silicon-based material, i.e. a silicon nitride- or silicon carbide-based monolithic or composite material. The coating is a graded coating of at least two layers: an intermediate AlN or Al x N y O z layer and an aluminum oxide or zirconium oxide outer layer. The composition of the coating changes gradually from that of the substrate to that of the AlN or Al x N y O z layer and further to the composition of the aluminum oxide or zirconium oxide outer layer. Other layers may be deposited over the aluminum oxide layer. A CVD process for depositing the graded coating on the substrate is also disclosed.

Inventors

  • 👤 Vinod K. Sarin

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 23:08
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/308; C04; C04B; C04B41/00; C04B41/45; C04B41/52; C04B41/80; C04B41/81; C04B41/89; C23C16/301; C23C16/303; C23C16/40; C23C16/403; C23C16/405; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24942; Y10T428/2495; Y10T428/24967; Y10T428/24975; Y10T428/25; Y10T428/256; Y10T428/257; Y10T428/26; Y10T428/263

Claims Analysis

Total Claims: 20
Claim 1
Independent Claim 124 words
A coated article comprising: a fully dense shaped substrate body of a silicon nitride- or silicon carbide-based monolithic or composite material; an adherent, continuous, fully dense intermediate layer about 0.5-20 microns thick of an aluminum nitride material over and chemically bonded to the substrate body; and an adherent, continuous, fully dense first outer layer about 0.5-900 microns thick comprising an oxide of aluminum or zirconium over and chemically bonded to the intermediate layer; wherein each layer is a graded layer changing in composition from the material over which it is deposited to the material of the layer and further to the material, if any, deposited thereon, so that no clearly defined compositional interfaces exist between the substrate and the layers, or between the layers.
Claim 2
Dependent Claim 124 words
A coated article comprising: a fully dense shaped substrate body of a silicon nitride- or silicon carbide-based monolithic or composite material; an adherent, continuous, fully dense intermediate layer about 0.5-20 microns thick of an aluminum nitride material over and chemically bonded to the substrate body; and an adherent, continuous, fully dense first outer layer about 0.5-900 microns thick comprising an oxide of aluminum or zirconium over and chemically bonded to the intermediate layer; wherein each layer is a graded layer changing in composition from the material over which it is deposited to the material of the layer and further to the material, if any, deposited thereon, so that no clearly defined compositional interfaces exist between the substrate and the layers, or between the layers.
Claim 3
Dependent Claim 14 words
An article according to claim 1 wherein the intermediate layer is 2-10 microns thick.
Claim 4
Dependent Claim 15 words
An article according to claim 1 wherein the first outer layer is 0.5-20 microns thick.
Claim 5
Dependent Claim 15 words
An article according to claim 3 wherein the first outer layer is 2-10 microns thick.
Claim 6
Dependent Claim 49 words
An article according to claim 1 wherein the first outer layer comprises a graded composite ceramic material comprising a continuous layer of alumina or zirconia having dispersed therein discontinuous discrete particles of at least one material different therefrom and selected from the group consisting of alumina, zirconia, and yttria.
Claim 7
Dependent Claim 87 words
An article according to claim 1 wherein the first outer layer is 0.5-20 micron thick; and further comprising an adherent, continuous, fully dense second outer layer about 0.5-900 microns thick, over and chemically bonded to the first outer layer, of a graded composite ceramic material different from that of the first outer layer and comprising a continuous layer of alumina, zirconia, or yttria having dispersed therein discontinuous discrete particles of at least one material different therefrom and selected from the group consisting of alumina, zirconia, and yttria.
Claim 8
Dependent Claim 47 words
An article according to claim 6 wherein the second outer layer is 0.5-20 microns thick; and further comprising an adherent, continuous, fully dense additional outer layer about 0.5-900 microns thick over and chemically bonded to the second outer layer, of alumina, zirconia, yttria stabilized zirconia, or yttria.
Claim 9
Dependent Claim 47 words
An article according to claim 1 wherein the first outer layer is 0.5-20 microns thick; and further comprising an adherent continuous, fully dense additional outer layer about 0.5-900 microns thick, over and chemically bonded to the first outer layer, of alumina, zirconia, yttria stabilized zirconia, or yttria.
Claim 10
Dependent Claim 188 words
A coated article comprising: a fully dense shaped substrate body of a silicon nitride- or silicon carbide-based monolithic or composite material; an adherent, continuous, fully dense intermediate layer about 2-10 microns thick of an aluminum nitride material over and chemically bonded to the substrate body; an adherent, continuous, fully dense first outer layer about 2-10 microns thick comprising a continuous layer of alumina having dispersed therein discontinuous discrete particles of zirconia, over and chemically bonded to the intermediate layer; an adherent, continuous, fully dense second outer layer about 2-10 microns thick comprising a continuous layer of zirconia having dispersed therein discontinuous discrete particles of alumina over and chemically bonded to the first outer layer; an adherent, continuous, fully dense additional outer layer about 1-5 microns thick of zirconia, over and chemically bonded to the second outer layer; wherein each layer is a graded layer changing in composition from the material over which it is deposited to the material of the layer and further to the material, if any, deposited thereon, so that no clearly defined compositional interfaces exist between the substrate and the layers, or between the layers.
Claim 11
Dependent Claim 188 words
A coated article comprising: a fully dense shaped substrate body of a silicon nitride- or silicon carbide-based monolithic or composite material; an adherent, continuous, fully dense intermediate layer about 2-10 microns thick of an aluminum nitride material over and chemically bonded to the substrate body; an adherent, continuous, fully dense first outer layer about 2-10 microns thick comprising a continuous layer of alumina having dispersed therein discontinuous discrete particles of zirconia, over and chemically bonded to the intermediate layer; an adherent, continuous, fully dense second outer layer about 2-10 microns thick comprising a continuous layer of zirconia having dispersed therein discontinuous discrete particles of alumina over and chemically bonded to the first outer layer; an adherent, continuous, fully dense additional outer layer about 1-5 microns thick of zirconia, over and chemically bonded to the second outer layer; wherein each layer is a graded layer changing in composition from the material over which it is deposited to the material of the layer and further to the material, if any, deposited thereon, so that no clearly defined compositional interfaces exist between the substrate and the layers, or between the layers.
Claim 12
Dependent Claim 124 words
A coated article comprising: a fully dense shaped substrate body of a silicon nitride- or silicon carbide-based monolithic or composite material. an adherent, continuous, fully dense intermediate layer about 0.5-20 microns thick or an aluminum oxynitride material over and chemically bonded to the substrate body; and an adherent, continuous, fully dense first outer layer about 0.5-900 microns thick comprising an oxide of aluminum or zirconium over and chemically bonded to the intermediate layer; wherein each layer is a graded layer changing in composition from the material over which it is deposited to the material of the layer and further to the material, if any, deposited thereon, so that no clearly defined compositional interfaces exist between the substrate and the layers, or between the layers.
Claim 13
Dependent Claim 124 words
A coated article comprising: a fully dense shaped substrate body of a silicon nitride- or silicon carbide-based monolithic or composite material. an adherent, continuous, fully dense intermediate layer about 0.5-20 microns thick or an aluminum oxynitride material over and chemically bonded to the substrate body; and an adherent, continuous, fully dense first outer layer about 0.5-900 microns thick comprising an oxide of aluminum or zirconium over and chemically bonded to the intermediate layer; wherein each layer is a graded layer changing in composition from the material over which it is deposited to the material of the layer and further to the material, if any, deposited thereon, so that no clearly defined compositional interfaces exist between the substrate and the layers, or between the layers.
Claim 14
Dependent Claim 14 words
An article according to claim 10 wherein the intermediate layer is 2-10 microns thick.
Claim 15
Dependent Claim 15 words
An article according to claim 10 wherein the first outer layer is 0.5-20 microns thick.
Claim 16
Dependent Claim 15 words
An article according to claim 10 wherein the first outer layer is 2-10 microns thick.
Claim 17
Dependent Claim 49 words
An article according to claim 10 wherein the first outer layer comprises a graded composite ceramic material comprising a continuous layer of alumina or zirconia having dispersed therein discontinuous discrete particles of at least one material different therefrom and selected from the group consisting of alumina, zirconia, and yttria.
Claim 18
Dependent Claim 87 words
An article according to claim 10 wherein the first outer layer is 0.5-20 micron thick; and further comprising an adherent, continuous, fully dense second outer layer about 0.5-900 microns thick, over and chemically bonded to the first outer layer, of a graded composite ceramic material different from that of the first outer layer and comprising a continuous layer of alumina, zirconia, or yttria having dispersed therein discontinuous discrete particles of at least one material different therefrom and selected from the group consisting of alumina, zirconia, and yttria.
Claim 19
Dependent Claim 47 words
An article according to claim 15 wherein the second outer layer is 0.5-20 microns thick; and further comprising an adherent, continuous, fully dense additional outer layer about 0.5-900 microns thick over and chemically bonded to the second outer layer, of alumina, zirconia, yttria stabilized zirconia, or yttria.
Claim 20
Dependent Claim 47 words
An article according to claim 10 wherein the first outer layer is 0.5-20 microns thick; and further comprising an adherent continuous, fully dense additional outer layer about 0.5-900 microns thick, over and chemically bonded to the first outer layer, of alumina, zirconia, yttria stabilized zirconia, or yttria.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-08-20 1994-02-19 1994-08-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-08-20 1998-02-19 1998-08-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-08-20 2002-02-19 2002-08-21 $7700.00 Window Closed / Lapsed

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