Method for fabricating a self-aligned lightly doped drain semiconductor device with silicide

Claim 1

A method for fabricating at least a pair of shallow source/drain, light doped drain complementary metal-oxide-semiconductor devices having self-aligned low-resistivity silicide/polysilicon gates, comprising at least the sequential steps of: (a) providing a silicon substrate having field oxide regions grown thereon in a predetermined pattern and defining a first device type area and a second device type area; (b) depositing a gate oxide layer over the substrate; (c) depositing a polysilicon layer over the gate oxide layer; (d) depositing a refractory metal layer over the polysilicon layer; (e) selectively removing portions of the refractory metal layer in a desired pattern to define a gate region in each first device type area and in each second device type area; (f) selectively removing the polysilicon layer in the pattern defined by the patterned refractory metal layer, thereby exposing at least the field oxide regions and further so that the polysilicon is undercut with respect to the sides of the patterned refractory meal layer; (g) selectively removing the gate oxide layer in the pattern defined by the patterned refractory metal-polysilicon-oxide layer, thereby exposing surface regions of the substrates; (h) preamorphizing the exposed surface of the substrate, thereby limiting the implant depth of dopants in subsequent steps; (i) implanting dopants in a first conductivity type into the exposed surface regions of the substrate, thereby forming source and drain regions which extend approximately to the sides of the patterned refractory metal layer of the gate region in each first device type area but spaced from the underlying polysilicon layer; (j) implanting dopants of a second conductivity type in selected areas of the exposed surface regions of the substrate, thereby forming source and drain regions which extend approximately to the sides of the patterned refractory metal layer of the gate region in each second device type area but spaced from the underlying polysilicon layer; (k) annealing the substrate at a temperature sufficient to react the patterned refractory metal layer and the underlying polysilicon layer to form a silicide layer therebetween, and diffusing the source and drain regions formed of dopants of said second type to the edge of the adjacent gate region; (l) removing any unreacted refractory metal from the polysilicon gate region; and (m) implanting dopants of the first type in selected areas of the exposed surface regions of the substrate, thereby forming shallow doping regions between (1) the source and drain regions approximate but spaced from the gate region in each first device type area and (2) the edge of the adjacent gate region.

Claim 2

A method for fabricating at least a pair of shallow source/drain, light doped drain complementary metal-oxide-semiconductor devices having self-aligned low-resistivity silicide/polysilicon gates, comprising at least the sequential steps of: (a) providing a silicon substrate having field oxide regions grown thereon in a predetermined pattern and defining a first device type area and a second device type area; (b) depositing a gate oxide layer over the substrate; (c) depositing a polysilicon layer over the gate oxide layer; (d) depositing a refractory metal layer over the polysilicon layer; (e) selectively removing portions of the refractory metal layer in a desired pattern to define a gate region in each first device type area and in each second device type area; (f) selectively removing the polysilicon layer in the pattern defined by the patterned refractory metal layer, thereby exposing at least the field oxide regions and further so that the polysilicon is undercut with respect to the sides of the patterned refractory meal layer; (g) selectively removing the gate oxide layer in the pattern defined by the patterned refractory metal-polysilicon-oxide layer, thereby exposing surface regions of the substrates; (h) preamorphizing the exposed surface of the substrate, thereby limiting the implant depth of dopants in subsequent steps; (i) implanting dopants in a first conductivity type into the exposed surface regions of the substrate, thereby forming source and drain regions which extend approximately to the sides of the patterned refractory metal layer of the gate region in each first device type area but spaced from the underlying polysilicon layer; (j) implanting dopants of a second conductivity type in selected areas of the exposed surface regions of the substrate, thereby forming source and drain regions which extend approximately to the sides of the patterned refractory metal layer of the gate region in each second device type area but spaced from the underlying polysilicon layer; (k) annealing the substrate at a temperature sufficient to react the patterned refractory metal layer and the underlying polysilicon layer to form a silicide layer therebetween, and diffusing the source and drain regions formed of dopants of said second type to the edge of the adjacent gate region; (l) removing any unreacted refractory metal from the polysilicon gate region; and (m) implanting dopants of the first type in selected areas of the exposed surface regions of the substrate, thereby forming shallow doping regions between (1) the source and drain regions approximate but spaced from the gate region in each first device type area and (2) the edge of the adjacent gate region.

Claim 4

A method for fabricating a shallow source/drain, lightly doped drain metal-oxide-semiconductor device having a self-aligned low-resistance silicide/polysilicon gate, comprising at least the sequential steps of: (a) providing a silicon substrate; (b) forming at least one gate region on the substrate of a layer of gate oxide on the substrate, a layer of polysilicon over the gate oxide and a refractory metal layer over the polysilicon layer with the polysilicon being undercut with respect to the sides of the refractory metal layer; (c) implanting dopants of a first conductivity type in selected areas of the surface regions of the substrate on each side of each gate region approximately to the sides of the refractory metal layer of each gate region but spaced from the underlying polysilicon layer; (d) annealing the substrate at a temperature sufficient to react the refractory metal layer and the underlying polysilicon layer to form a silicide layer therebetween; (e) removing any unreacted refractory metal from the polysilicon gate region; and (f) implanting dopants of the first type in the surface regions of the substrate on each side of each gate region, thereby forming shallow doping regions between (1) the source and drain regions and (2) the edge of the adjacent gate region.

Claim 5

A method for fabricating a shallow source/drain, lightly doped drain metal-oxide-semiconductor device having a self-aligned low-resistance silicide/polysilicon gate, comprising at least the sequential steps of: (a) providing a silicon substrate; (b) forming at least one gate region on the substrate of a layer of gate oxide on the substrate, a layer of polysilicon over the gate oxide and a refractory metal layer over the polysilicon layer with the polysilicon being undercut with respect to the sides of the refractory metal layer; (c) implanting dopants of a first conductivity type in selected areas of the surface regions of the substrate on each side of each gate region approximately to the sides of the refractory metal layer of each gate region but spaced from the underlying polysilicon layer; (d) annealing the substrate at a temperature sufficient to react the refractory metal layer and the underlying polysilicon layer to form a silicide layer therebetween; (e) removing any unreacted refractory metal from the polysilicon gate region; and (f) implanting dopants of the first type in the surface regions of the substrate on each side of each gate region, thereby forming shallow doping regions between (1) the source and drain regions and (2) the edge of the adjacent gate region.