US4920072A
Expired / Lapsed
US
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Method of forming metal interconnects
Assignee: Texas Instruments Inc
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Filing: 1988-10-31
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Granted: 1990-04-24
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Expires: 2008-10-31
Abstract
Abstract Metal interconnects and method for forming same such that an intermediately formed aluminum layer provides an etch stop and etch mask during the tungsten etch back. The method may be used to form tungsten contacts without requiring pre-metal planarization of the semiconductor body.
Inventors
- 👤 Stephen A. Keller
- 👤 Piper A. Spry
- 👤 Martha S. Adams
- 👤 Ralph G. Harper
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:52
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/425; H10W20/01; H10W20/031; H10W20/056; H10W20/062; Y; Y10; Y10S; Y10S148/00; Y10S148/026
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
123 words
A method of forming metal interconnects comprising the steps of: providing a non planarized semiconductor body having active devices formed thereon; depositing spin-on-glass on said semiconductor body; depositing a barrier layer material over said spin-on-glass; depositing a metal layer over said barrier layer; forming a photoresist layer over said metal layer and patterning said photoresist for contact formation; etching said contact pattern into said barrier and metal layers; removing said photoresist; further etching said contact pattern to the underlying devices; depositing a conformal layer of CVD tungsten over said semiconductor body to fill said contact openings; etching back said tungsten without photoresist using said metal layer as an etch stop to prevent over etching; stripping said metal layer; and depositing a metalization layer.
Claim 2
Independent Claim
123 words
A method of forming metal interconnects comprising the steps of: providing a non planarized semiconductor body having active devices formed thereon; depositing spin-on-glass on said semiconductor body; depositing a barrier layer material over said spin-on-glass; depositing a metal layer over said barrier layer; forming a photoresist layer over said metal layer and patterning said photoresist for contact formation; etching said contact pattern into said barrier and metal layers; removing said photoresist; further etching said contact pattern to the underlying devices; depositing a conformal layer of CVD tungsten over said semiconductor body to fill said contact openings; etching back said tungsten without photoresist using said metal layer as an etch stop to prevent over etching; stripping said metal layer; and depositing a metalization layer.
Claim 3
Dependent Claim
23 words
The method of claim 1 wherein said tungsten contacts are etched to within 100 to 300 nanometers of said barrier layer/metal layer interface.
Claim 4
Dependent Claim
12 words
The method of claim 1, wherein said barrier layer material comprises titanium-tungsten.
Claim 5
Dependent Claim
11 words
The method of claim 1, wherein said metalization layer comprises aluminum.
Claim 6
Dependent Claim
20 words
The method of claim 1, wherein said metal layer is chosen from the group consisting of aluminum, copper, and silicon.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-04-23 | 1993-10-23 | 1994-04-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-04-23 | 1997-10-23 | 1998-04-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-04-23 | 2001-10-23 | 2002-04-24 | $7700.00 | Window Closed / Lapsed |