US4891091A
Expired / Lapsed
US
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Method of epitaxially growing compound semiconductor materials
Assignee: Verizon Laboratories Inc
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Filing: 1987-06-08
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Granted: 1990-01-02
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Expires: 2007-06-08
Abstract
Abstract Method of MOVPE growing a compound semiconductor material, for example GaAs, on a substrate, for example Si. Sodium ions are first introduced onto the substrate surface as by immersing it in a cleaning solution containing sodium. A two-step MOVPE process is then employed to grow device quality single crystal compound semiconductor material on the surface of the substrate.
Inventors
- 👤 Shambhu K. Shastry
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 12:01
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/34; H10P14/3402; C; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/10; C30B29/40; C30B29/42; H10P14/24; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/2907; H10P14/2911; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3221; H10P14/3242; H10P14/3244; H10P14/3246; H10P14/3414; H10P14/3421; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/36
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
78 words
The method of epitaxially growing a compound semiconductor material on a substrate comprising providing a substrate of essentially single crystal insulating or semiconducting material having exposed surface areas; and introducing sodium ions onto said surface areas; and metalorganic vapor phase epitaxially growing single crystal compound semiconductor material on said surface areas of the substrate to form an interface with the substrate while incorporating sodium ions in the single crystal structure of the growing single crystal compound semiconductor material.
Claim 2
Independent Claim
78 words
The method of epitaxially growing a compound semiconductor material on a substrate comprising providing a substrate of essentially single crystal insulating or semiconducting material having exposed surface areas; and introducing sodium ions onto said surface areas; and metalorganic vapor phase epitaxially growing single crystal compound semiconductor material on said surface areas of the substrate to form an interface with the substrate while incorporating sodium ions in the single crystal structure of the growing single crystal compound semiconductor material.
Claim 3
Dependent Claim
26 words
The method in accordance with claim 1 wherein introducing sodium ions onto said surface areas includes immersing said substrate in a liquid solution containing sodium ions.
Claim 4
Dependent Claim
25 words
The method in accordance with claim 2 wherein a positive potential is applied to said substrate while the substrate is immersed in the liquid solution.
Claim 5
Dependent Claim
83 words
The method in accordance with claim 3 wherein metalorganic vapor phase epitaxially growing single crystal compound semiconductor material on said surface areas of the substrate includes placing the substrate in a chamber; and introducing a first vapor containing one constituent element of the compound semiconductor material and a second vapor containing another constituent element of the compound semiconductor material into the chamber while heating the substrate to grow a single crystal layer of the compound semiconductor material on said areas of the substrate.
Claim 6
Dependent Claim
18 words
The method in accordance with claim 4 wherein said liquid solution contains approximately 1 percent sodium by weight.
Claim 7
Independent Claim
179 words
The method of epitaxially growing a compound semiconductor material on a substrate comprising providing a substrate of essentially single crystal insulating or semiconducting material having exposed surface areas; placing the substrate in a chamber; introducing a first vapor containing one constituent element of the compound semiconductor material and a second vapor containing another constituent element of the compound semiconductor material into the chamber while heating said substrate at a first temperature to grow a first relatively thin layer of single crystal compound semiconductor material on the exposed surface areas of the substrate to form an interface with the substrate while incorporating sodium ions in the single crystal structure of the growing single crystal compound semiconductor material during a first deposition step; increasing the temperature of the substrate to a second temperature; and introducing said first vapor and said second vapor into the chamber while heating said substrate at said second temperature to grow a second relatively thick layer of single crystal compound semiconductor material on said first layer of single crystal compound semiconductor material during a second deposition step.
Claim 8
Independent Claim
179 words
The method of epitaxially growing a compound semiconductor material on a substrate comprising providing a substrate of essentially single crystal insulating or semiconducting material having exposed surface areas; placing the substrate in a chamber; introducing a first vapor containing one constituent element of the compound semiconductor material and a second vapor containing another constituent element of the compound semiconductor material into the chamber while heating said substrate at a first temperature to grow a first relatively thin layer of single crystal compound semiconductor material on the exposed surface areas of the substrate to form an interface with the substrate while incorporating sodium ions in the single crystal structure of the growing single crystal compound semiconductor material during a first deposition step; increasing the temperature of the substrate to a second temperature; and introducing said first vapor and said second vapor into the chamber while heating said substrate at said second temperature to grow a second relatively thick layer of single crystal compound semiconductor material on said first layer of single crystal compound semiconductor material during a second deposition step.
Claim 9
Dependent Claim
26 words
The method in accordance with claim 6 wherein introducing sodium ions onto said surface areas includes immersing said substrate in a liquid solution containing sodium ions.
Claim 10
Dependent Claim
26 words
The method in accordance with claim 7 wherein said substrate is of essentially single crystal silicon, III-V compound semiconductor material, or Al 2 O 3 .
Claim 11
Dependent Claim
15 words
The method in accordance with claim 8 wherein said compound semiconductor material is gallium arsenide.
Claim 12
Dependent Claim
19 words
The method in accordance with claim 9 wherein said first vapor includes arsine; and said second vapor includes triethylgallium.
Claim 13
Dependent Claim
29 words
The method in accordance with claim 10 wherein said first temperature is between 425° C. and 450° C.; and said second temperature is between 575° C. and 650° C..
Claim 14
Dependent Claim
77 words
The method in accordance with claim 11 wherein during said first deposition step said first vapor and said second vapor are introduced at a rate causing said first layer to grow in thickness at a growth rate of about 3 nanometers per minute; and during said second deposition step said first and second vapors are introduced at a rate causing said second layer to grow in thickness at a growth rate of about 40 nanometers per minute.
Claim 15
Dependent Claim
21 words
The method in accordance with claim 12 including prior to said first deposition step introducing said first vapor into the chamber.
Claim 16
Dependent Claim
36 words
The method in accordance with claim 13 wherein said first deposition step is carried on for a period of from 2 to 3 minutes and a first layer of from 5 to 10 nanometers is grown.
Claim 17
Dependent Claim
31 words
The method in accordance with claim 11 wherein during said first deposition step the ratio of arsenic atoms to gallium atoms introduced into the chamber is at least 200 to 1.
Claim 18
Dependent Claim
21 words
The method in accordance with claim 15 including prior to said first deposition step introducing said first vapor into the chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-01 | 1993-07-03 | 1994-01-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-01 | 1997-07-03 | 1998-01-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-01 | 2001-07-03 | 2002-01-02 | $7700.00 | Window Closed / Lapsed |