US3963538A
Expired / Lapsed
US
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Two stage heteroepitaxial deposition process for GaP/Si
Assignee: International Business Machines Corp
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Filing: 1974-12-17
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Granted: 1976-06-15
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Expires: 1994-12-17
Abstract
Abstract A process for producing light emitting diodes is disclosed. In the process a primer layer of GaP is pyrolytically deposited on a Si substrate with the resulting epitaxial film thickness being sufficient to form complete coalescence of the epitaxial nuclei, but thin enough to avoid cracks in the epitaxial layer due to stress induced by thermal expansion. The thickness is generally between 0.1-10 mu . A second layer of GaP is then deposited using the standard halide transport process with thicknesses of 2-5 mu or higher. In the case of GaP LED's the thickness is about 10-40 mu , whereas for the case of GaAsP LED's the GaP thickness is 2-5 mu and this is then followed, through the addition of AsH3, with GaAsP graded from the GaP composition to the particularly desired design composition. The final composition is then maintained for 10-20 mu .
Inventors
- 👤 Robert W. Broadie
- 👤 Bernard M. Kemlage
- 👤 H. Bernard Pogge
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:33
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10H; H10H20/00; H10H20/80; H10P14/24; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3218; H10P14/3221; H10P14/3242; H10P14/3244; H10P14/3251; H10P14/3254; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3418; H10P14/3421; Y; Y10; Y10S; Y10S148/00; Y10S148/025; Y10S148/059; Y10S148/067; Y10S148/072; Y10S148/119; Y10S438/00; Y10S438/933; Y10S438/938
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
87 words
A method of growing gallium phosphide on a silicon substrate comprising the steps of: subjecting the silicon substrate to a high temperature bake cycle in the range of 1100°C for approximately 2 minutes; pyrolytically depositing a first layer of GaP on Si to form a continuous thin epitaxial film; and depositing a second layer of GaP onto the first layer by the halide transport process to form an epitaxial layer of GaP on the GaP primed Si suitable for use in the production of light emitting diodes.
Claim 2
Independent Claim
87 words
A method of growing gallium phosphide on a silicon substrate comprising the steps of: subjecting the silicon substrate to a high temperature bake cycle in the range of 1100°C for approximately 2 minutes; pyrolytically depositing a first layer of GaP on Si to form a continuous thin epitaxial film; and depositing a second layer of GaP onto the first layer by the halide transport process to form an epitaxial layer of GaP on the GaP primed Si suitable for use in the production of light emitting diodes.
Claim 3
Dependent Claim
25 words
The method of claim 1 wherein the first layer is formed by pyrolytic deposition to a thickness in the range of 0.1 - 10 microns.
Claim 4
Dependent Claim
19 words
The method of claim 1 wherein the pytolytic deposition takes place in a temperature range of 750°C to 1000°C.
Claim 5
Dependent Claim
33 words
The method of claim 1 wherein the second layer is deposited by the halide transport process to a thickness in the range of 10 - 40 microns in thickness on the first layer.
Claim 6
Dependent Claim
20 words
The method of claim 1 wherein the deposition by the halide transport process is in the temperature range of 700°-850°C.
Claim 7
Dependent Claim
22 words
The method of claim 1 wherein the time deposition of the second layer is in the range of 75 to 150 minutes.
Claim 8
Independent Claim
96 words
A method of making a light emitting diode comprising the steps of: pyrolytically depositing a first layer of gallium phosphide on silicon to form a thin epitaxial film; depositing a second layer of GaP onto the first layer of GaP by the halide transport process; continuing to grow GaP to an appropriate thickness, with the bandgap of the GaP being altered by the addition of AsH 3 ; grading the AsH 3 content until a constant composition layer of GaAsP is achieved to the appropriate LED wavelength and maintaining the composition to grow an appropriate thickness.
Claim 9
Independent Claim
96 words
A method of making a light emitting diode comprising the steps of: pyrolytically depositing a first layer of gallium phosphide on silicon to form a thin epitaxial film; depositing a second layer of GaP onto the first layer of GaP by the halide transport process; continuing to grow GaP to an appropriate thickness, with the bandgap of the GaP being altered by the addition of AsH 3 ; grading the AsH 3 content until a constant composition layer of GaAsP is achieved to the appropriate LED wavelength and maintaining the composition to grow an appropriate thickness.
Claim 10
Dependent Claim
27 words
The method of claim 7 wherein the silicon substrate is first subjected to a high temperature bake cycle in the range of 1100°C for approximately 2 minutes.
Claim 11
Dependent Claim
27 words
The method of claim 7 wherein the first layer is formed by pyrolytic deposition to a thickness in the range of 0.1 - 10 microns in thickness.
Claim 12
Dependent Claim
20 words
The method of claim 7 wherein the deposition by the halide transport process is in a temperature range of 700°-850°C.
Claim 13
Independent Claim
68 words
A method of growing gallium phosphide on a silicon substrate consisting of the steps of: pyrolytically depositing a first layer of GaP on Si to form a continuous thin epitaxial film; depositing a second layer of GaP onto the first layer by the halide transport process to form an epitaxial layer of GaP on the Gap primed Si suitable for use in the production of light emitting diodes.
Claim 14
Independent Claim
68 words
A method of growing gallium phosphide on a silicon substrate consisting of the steps of: pyrolytically depositing a first layer of GaP on Si to form a continuous thin epitaxial film; depositing a second layer of GaP onto the first layer by the halide transport process to form an epitaxial layer of GaP on the Gap primed Si suitable for use in the production of light emitting diodes.
Claim 15
Dependent Claim
25 words
The method of claim 11 wherein the first layer is formed by pyrolytic deposition to a thickness in the range of 0.1 - 10 microns.
Claim 16
Dependent Claim
19 words
The method of claim 11 wherein the pyrolytic deposition takes place in a temperature range of 750°C to 1000°C.
Claim 17
Dependent Claim
31 words
The method of claim 11 wherein the second layer is deposited by the halide transport process to a thickness in the range of 10-40 microns in thickness on the first layer.
Claim 18
Dependent Claim
20 words
The method of claim 11 wherein the deposition by the halide transport process is in the temperature range of 700°-850°C.
Claim 19
Dependent Claim
23 words
The method of claim 11 wherein the time of deposition of the second layer is in the range of 75 to 150 minutes.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-06-15 | 1979-12-15 | 1980-06-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-06-15 | 1983-12-15 | 1984-06-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-06-15 | 1987-12-15 | 1988-06-15 | $7700.00 | Window Closed / Lapsed |