US4857982A
Expired / Lapsed
US
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Avalanche photodiode with floating guard ring
Assignee: University of Southern California
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Filing: 1988-01-06
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Granted: 1989-08-15
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Expires: 2008-01-06
Abstract
Abstract The disclosed invention as direction to a semiconductor material avalanche photodiode of a separate multiplication and absorption region heterostructure design (SAM-APD). The improved SAM-APD of this invention is characterized by a plurality of floating guard rings which are separated about a central region and doped in the opposite high concentration from that of the multiplication region in which they are positioned. These rings float in the sense that they have no contact with the metalized p-contact of the photodiode; and, therefore, no direct contact with the current source. This structure results in an enhanced avalanche effect in the central region with limited edge breakdown undesirable consequences. In addition to this structure, an alternative embodiment suggests the use of both a floating ring and this slab below the central region, of a dimension slightly smaller than the smaller region and concentric with it to achieve an optimized central avalanche breakdown with reduced edge breakdown of the electric fields formed during reversed biasing of the APD (avalanche photodiode).
Inventors
- 👤 Stephen R. Forrest
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 14:09
CPC Classifications
H; H10; H10F; H10F30/00; H10F30/20; H10F30/21; H10F30/22; H10F30/225; H10F30/2255
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
228 words
An avalanche photodiode, comprising: a substrate composed of a first semiconductor material; a buffer region composed of said first semiconductor material formed over said substrate; a ternary light absorbing region composed of a second semiconductor material and doped with an impurity of a first conductivity type formed over said buffer region; a multiplication region composed of said first semiconductor material, doped with an impurity of said first conductivity type, having its upper portion doped with a first concentration of an impurity of said first conductivity type; and, forming a heterojunction with said light absorbing region; a central region composed of said first semiconductor material, doped to a second concentration with an impurity of a second conductivity type and implanted onto said multiplication region, said second concentration being greater than said first concentration; at least one floating ring region, composed of said first semiconductor material, doped to the same high concentration as said central region with an impurity of said second type; said floating ring region concentrically encircling said central region at the top surface of said photodiode, said ring region having no direct contact to a surface of electrical potential and being implanted into said multiplication region; whereby, said floating ring region acts as a guard ring preventing breakdown at the junction edge of the photodiode, enhancing the gain and efficiency of said photodiode, in said central region.
Claim 2
Dependent Claim
228 words
An avalanche photodiode, comprising: a substrate composed of a first semiconductor material; a buffer region composed of said first semiconductor material formed over said substrate; a ternary light absorbing region composed of a second semiconductor material and doped with an impurity of a first conductivity type formed over said buffer region; a multiplication region composed of said first semiconductor material, doped with an impurity of said first conductivity type, having its upper portion doped with a first concentration of an impurity of said first conductivity type; and, forming a heterojunction with said light absorbing region; a central region composed of said first semiconductor material, doped to a second concentration with an impurity of a second conductivity type and implanted onto said multiplication region, said second concentration being greater than said first concentration; at least one floating ring region, composed of said first semiconductor material, doped to the same high concentration as said central region with an impurity of said second type; said floating ring region concentrically encircling said central region at the top surface of said photodiode, said ring region having no direct contact to a surface of electrical potential and being implanted into said multiplication region; whereby, said floating ring region acts as a guard ring preventing breakdown at the junction edge of the photodiode, enhancing the gain and efficiency of said photodiode, in said central region.
Claim 3
Dependent Claim
66 words
The avalanche photodiode of claim 1, including: a slab region composed of said first semiconductor material, doped to a third concentration with an impurity of a second conductivity type, said third concentration being greater than said first concentration, said slab region juxtaposed between the central region and the multiplication region; whereby avalanche breakdown in said central region may be enhanced and junction edge breakdown substantially reduced.
Claim 4
Dependent Claim
60 words
The avalanche photodiode of claim 1, including a speed-up region, juxtaposed between the multiplication region and the absorption region, composed of a third semiconductor material; said speed-up region forming one heterojunction with said multiplication region and another heterojunction with said absorption region; wherein, said speed-up region enhances high frequency response by facilitating the flow of carriers to the multiplication region.
Claim 5
Dependent Claim
60 words
The avalanche photodiode of claim 2, including a speed-up region, juxtaposed between the multiplication region and the absorption region, composed of a third semiconductor material; said speed-up region forming one heterojunction with said multiplication region and another heterojunction with said absorption region; wherein, said speed-up region enhances high frequency response by facilitating the flow of carriers to the multiplication region.
Claim 6
Dependent Claim
24 words
The avalanche photodiode of claim 1, including, at least two passivation layers covering the top surface of the photodiode and surrounding said central region.
Claim 7
Dependent Claim
164 words
An avalanche photodiode, comprising: a multiplication region, a ternary light absorption region, a central region and a speed up region, said regions being disposed adjacent one another over a substrate; said multiplication region being made from a first semi-conductive material doped with a first concentration of an impurity of a first conductivity type; said speed up region being disposed adjacent said multiplication region, and being comprised of a second semiconductive material; said absorption region being composed of a third semi-conductive material and doped with said impurity of said first conductivity type; said absorption region being disposed adjacent said speed-up region; said central region being ion implanted in the upper surface of said multiplication region and being doped with an impurity of a second conductivity type, said central region surrounded by at least one guard ring of the same material and conductivity type; said guard ring not contacting a source of electronic current; whereby said photodiode has an avalanche effect confined to the central region.
Claim 8
Dependent Claim
164 words
An avalanche photodiode, comprising: a multiplication region, a ternary light absorption region, a central region and a speed up region, said regions being disposed adjacent one another over a substrate; said multiplication region being made from a first semi-conductive material doped with a first concentration of an impurity of a first conductivity type; said speed up region being disposed adjacent said multiplication region, and being comprised of a second semiconductive material; said absorption region being composed of a third semi-conductive material and doped with said impurity of said first conductivity type; said absorption region being disposed adjacent said speed-up region; said central region being ion implanted in the upper surface of said multiplication region and being doped with an impurity of a second conductivity type, said central region surrounded by at least one guard ring of the same material and conductivity type; said guard ring not contacting a source of electronic current; whereby said photodiode has an avalanche effect confined to the central region.
Claim 9
Dependent Claim
44 words
The avalanche photodiode of claim 6, including: a region comprised of said first semiconductor material and doped with a second concentration of impurity of said first conductivity type higher than said first concentration implanted below said central region; whereby said avalanche effect is enhanced.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-14 | 1993-02-13 | 1993-08-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-14 | 1997-02-13 | 1997-08-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-14 | 2001-02-13 | 2001-08-15 | $7700.00 | Window Closed / Lapsed |