US4832778A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Processing apparatus for wafers
Assignee: Texas Instruments Inc
•
Filing: 1988-05-27
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Granted: 1989-05-23
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Expires: 2008-05-27
Abstract
Abstract A high pressure processing apparatus and method which is compatible with a system wherein wafers are largely transported and processed under vacuum. The pressure vessel can be extremely small, i.e. has a total pressurized volume of which almost all interior points are within one or two centimeters of one of the workpieces which may be loaded into the chamber.
Inventors
- 👤 Cecil J. Davis
- 👤 Dean W. Freeman
- 👤 Robert T. Matthews
- 👤 Joel T. Tomlin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 15:54
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/33; H10P72/3306; H10P72/04; H10P72/0431; H10P72/0436; H10P72/0451; H10P72/0462; H10P72/3308; H10P72/70; H10P72/76; H10P72/7604; H10P72/7624
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
89 words
An apparatus for processing of wafers, comprising: (a) a process chamber capable of operating at low pressure; (b) one or more wafer support members within said process chamber, said wafer support members being capable of stably supporting a plurality of wafers in substantially face down positions with substantially no damage to structures on the face of said wafer; and (c) a wafer transfer mechanism positioned to transfer wafers under control through an openable port into said process chamber, said wafer transfer mechanism being capable of operation under high vacuum.
Claim 2
Independent Claim
89 words
An apparatus for processing of wafers, comprising: (a) a process chamber capable of operating at low pressure; (b) one or more wafer support members within said process chamber, said wafer support members being capable of stably supporting a plurality of wafers in substantially face down positions with substantially no damage to structures on the face of said wafer; and (c) a wafer transfer mechanism positioned to transfer wafers under control through an openable port into said process chamber, said wafer transfer mechanism being capable of operation under high vacuum.
Claim 3
Dependent Claim
28 words
The apparatus of claim 1 wherein wafer transfer mechanism has sufficient controllable vertical movement to selectably place and/or remove wafers from selectable positions in said wafer support members.
Claim 4
Dependent Claim
15 words
The apparatus of claim 1 wherein said apparatus is capable of performing chemical vapor deposition.
Claim 5
Dependent Claim
16 words
The apparatus of claim 1 wherein said apparatus is capable of performing slow low pressure processes.
Claim 6
Dependent Claim
15 words
The apparatus of claim 4 wherein said apparatus is capable of performing gaseous oxide deposition.
Claim 7
Independent Claim
72 words
An apparatus for processing of a wafer comprising: (a) a process chamber of a process module capable of operating at high and low pressure; (b) one or more wafer support members within said process chamber capable of supporting said wafers substantially face down; and (c) a wafer transfer mechanism positioned to transfer wafers under control through a port moveable between an open and closed positions into said process chamber at low pressure.
Claim 8
Independent Claim
72 words
An apparatus for processing of a wafer comprising: (a) a process chamber of a process module capable of operating at high and low pressure; (b) one or more wafer support members within said process chamber capable of supporting said wafers substantially face down; and (c) a wafer transfer mechanism positioned to transfer wafers under control through a port moveable between an open and closed positions into said process chamber at low pressure.
Claim 9
Dependent Claim
27 words
The apparatus as set forth in claim 6 wherein the interior walls of said chamber are adjacent said wafers when said port is in the closed position.
Claim 10
Dependent Claim
17 words
The apparatus as set forth in claim 6 wherein said chamber has an interior wall of quartz.
Claim 11
Dependent Claim
18 words
The apparatus as set forth in claim 6 wherein said chamber has an exterior wall of stainless steel.
Claim 12
Independent Claim
58 words
An apparatus for processing of wafers, comprising: (a) a process chamber; (b) a wafer support member within said process chamber for stably supporting a plurality of wafers, face down, with substantially no damage to structures on the face of said wafer; and (c) a wafer transfer mechanism positioned to transfer wafers to and from the wafer support member.
Claim 13
Independent Claim
58 words
An apparatus for processing of wafers, comprising: (a) a process chamber; (b) a wafer support member within said process chamber for stably supporting a plurality of wafers, face down, with substantially no damage to structures on the face of said wafer; and (c) a wafer transfer mechanism positioned to transfer wafers to and from the wafer support member.
Claim 14
Dependent Claim
20 words
The apparatus as set forth in claim 10 further including a movable port which allows access into the process chamber.
Claim 15
Dependent Claim
39 words
The apparatus as set forth in claim 10 further including a movable port which allows access to the process chamber wherein the interior walls of said chamber are adjacent said wafers when said port is in a closed position.
Claim 16
Dependent Claim
17 words
The apparatus as set forth in claim 10 wherein said chamber has an interior wall of quartz.
Claim 17
Dependent Claim
18 words
The apparatus as set forth in claim 10 wherein said chamber has an exterior wall of stainless steel.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-22 | 1992-11-21 | 1993-05-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-22 | 1996-11-21 | 1997-05-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-22 | 2000-11-21 | 2001-05-23 | $7700.00 | Window Closed / Lapsed |