US4731255A
Expired / Lapsed
US
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Gas-phase growth process and an apparatus for the same
Assignee: Applied Materials Japan Inc
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Filing: 1985-09-26
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Granted: 1988-03-15
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Expires: 2005-09-26
Abstract
Abstract A gas-phase growth process for growing films of uniform thickness or having a prescribed pattern form or growing films sequentially onto a substrate and an apparatus related thereto. The films are grown by allowing an inert gas to flow over a reaction gas flow in parallel to the surface of the substrate. Optionally, the substrate surface could be irradiated by a UV light source which is directed from above the inert gas toward the substrate surface.
Inventors
- 👤 Kazuo Maeda
- 👤 Noboru Tokumasu
- 👤 Toshihiko Fukuyama
- 👤 Tsugiaki Hirata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 21:42
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45502; C23C16/45504; B; B05; B05D; B05D1/00; B05D1/60; C23C16/48; C23C16/482; C23C16/488; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B25/14; B05D3/00; B05D3/06; B05D3/061
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
110 words
A gas-phase growth process for growing films of uniform thickness or having a prescribed pattern form or growing films sequentially onto a substrate, which comprises: flowing a reaction gas over the surface of said substrate in parallel with said surface; flowing an inert gas over the flow of said reaction gas so as to create a laminar flow with the flow of said reaction gas; preheating both gases to about the same temperature, so as to induce a surface reaction of the reaction gas; and growing a film onto the substrate, said process being conducted in the absence of a reaction chamber and with generally a complete particle generation suppression.
Claim 2
Dependent Claim
110 words
A gas-phase growth process for growing films of uniform thickness or having a prescribed pattern form or growing films sequentially onto a substrate, which comprises: flowing a reaction gas over the surface of said substrate in parallel with said surface; flowing an inert gas over the flow of said reaction gas so as to create a laminar flow with the flow of said reaction gas; preheating both gases to about the same temperature, so as to induce a surface reaction of the reaction gas; and growing a film onto the substrate, said process being conducted in the absence of a reaction chamber and with generally a complete particle generation suppression.
Claim 3
Dependent Claim
18 words
The gas-phase growth process according to claim 1, wherein a carrier gas is used for said reaction gas.
Claim 4
Dependent Claim
14 words
The gas-phase growth process according to claim 2, wherein said carrier gas is He.
Claim 5
Dependent Claim
139 words
A gas-phase growth process for growing films of uniform thickness or having a pattern form or growing films sequentially onto a substrate, which comprises: flowing a reaction gas over the surface of said substrate in parallel with said surface; flowing an inert gas over the flow of said reaction gas so as to create a laminar flow with the flow of said reaction gas; directing UV light over the inert gas toward the surface of the substrate and irradiating said surface to effect photo excitation of said reaction gas; preheating both gases to about the same temperatures, to induce a surface reaction of the reaction gas by the energy of said UV light; and growing a film onto the substrate, said process being conducted in the absence of a reaction chamber and with almost a complete particle generation supression.
Claim 6
Dependent Claim
139 words
A gas-phase growth process for growing films of uniform thickness or having a pattern form or growing films sequentially onto a substrate, which comprises: flowing a reaction gas over the surface of said substrate in parallel with said surface; flowing an inert gas over the flow of said reaction gas so as to create a laminar flow with the flow of said reaction gas; directing UV light over the inert gas toward the surface of the substrate and irradiating said surface to effect photo excitation of said reaction gas; preheating both gases to about the same temperatures, to induce a surface reaction of the reaction gas by the energy of said UV light; and growing a film onto the substrate, said process being conducted in the absence of a reaction chamber and with almost a complete particle generation supression.
Claim 7
Dependent Claim
18 words
The gas-phase growth process according to claim 4 wherein a carrier gas is used for said reaction gas.
Claim 8
Dependent Claim
14 words
The gas-phase growth process according to claim 5 wherein said carrier gas is He.
Claim 9
Dependent Claim
17 words
The gas-phase growth process according to claim 4, wherein the reaction gas comprises an inorganic silane system.
Claim 10
Dependent Claim
17 words
The gas-phase growth process according to claim 4, wherein said reaction gas comprises an organic silane system.
Claim 11
Dependent Claim
20 words
The gas-phase growth process according to claim 4, wherein said surface is irradiated through a mask with a prescribed pattern.
Claim 12
Dependent Claim
34 words
The gas-phase growth process according to claim 9, wherein both gases are preheated to almost the same temperature, in which said temperature is about 400° C. prior to being subjected to the flowing steps.
Claim 13
Dependent Claim
28 words
The gas-phase growth process according to claim 4, wherein the process includes moving a UV light source of said UV light and said substrate relatively back and forth.
Claim 14
Dependent Claim
44 words
The gas-phase growth process according to claim 11, wherein a carrier gas is used for said reaction gas and the reaction gas, the inert gas and the carrier gas are preheated to almost the same temperature prior to being subjected to the flowing steps.
Claim 15
Dependent Claim
20 words
The gas-phase growth process according to claim 12, wherein said surface is irradiated through a mask with a prescribed pattern.
Claim 16
Dependent Claim
17 words
The gas-phase growth process according to claim 1, wherein said reaction gas comprises an inorganic silane system.
Claim 17
Dependent Claim
17 words
The gas-phase growth process according to claim 1, wherein said reaction gas comprises an organic silane system.
Claim 18
Dependent Claim
98 words
A gas-phase growth apparatus for growing films of uniform thickness or having a pattern form or growing films sequentially onto a substrate, which comprises: reaction-gas supply nozzles for flowing a reaction gas over the surface of said substrate in parallel with said surface; inert-gas supply nozzles for flowing an inert gas over the flow of said reaction gas so as to create a laminar flow with the flow of said reaction gas; and a heating means serving to preheat both gases to about the same temperature, said apparatus further characterized as not being comprised of a reaction chamber.
Claim 19
Dependent Claim
98 words
A gas-phase growth apparatus for growing films of uniform thickness or having a pattern form or growing films sequentially onto a substrate, which comprises: reaction-gas supply nozzles for flowing a reaction gas over the surface of said substrate in parallel with said surface; inert-gas supply nozzles for flowing an inert gas over the flow of said reaction gas so as to create a laminar flow with the flow of said reaction gas; and a heating means serving to preheat both gases to about the same temperature, said apparatus further characterized as not being comprised of a reaction chamber.
Claim 20
Dependent Claim
40 words
The gas-phase growth apparatus according to claim 16, wherein blocking plates, which serve to block out the air surrounding the apparatus, are provided, said plates extending forward on both sides from said reaction-gas supply nozzles and said inert-gas supply nozzles.
Claim 21
Dependent Claim
34 words
The gas-phase growth apparatus according to claim 16, wherein said reaction-gas nozzles and said inert-gas supply nozzles are in a U-shaped arrangement so as to surround said substrate except for a gas exhaust direction.
Claim 22
Dependent Claim
129 words
A gas-phase growth apparatus for growing films of uniform thickness or having a pattern form or growing films sequentially onto a substrate, which comprises: reaction-gas supply nozzles for flowing a reaction gas over the surface of said substrate in parallel with said surface; and inert-gas supply nozzles for flowing an inert gas over the flow of said reaction gas so as to create a laminar flow with the flow of said reaction gas; an UV-irradiation source serving to irradiate UV light onto said surface of the substrate; and a heating means serving to preheat both gases to almost the same temperature, to induce a surface reaction of the reaction gas with the energy of said UV light, said apparatus further characterized as not being comprised of a reaction chamber.
Claim 23
Dependent Claim
129 words
A gas-phase growth apparatus for growing films of uniform thickness or having a pattern form or growing films sequentially onto a substrate, which comprises: reaction-gas supply nozzles for flowing a reaction gas over the surface of said substrate in parallel with said surface; and inert-gas supply nozzles for flowing an inert gas over the flow of said reaction gas so as to create a laminar flow with the flow of said reaction gas; an UV-irradiation source serving to irradiate UV light onto said surface of the substrate; and a heating means serving to preheat both gases to almost the same temperature, to induce a surface reaction of the reaction gas with the energy of said UV light, said apparatus further characterized as not being comprised of a reaction chamber.
Claim 24
Dependent Claim
40 words
The gas-phase growth apparatus according to claim 9, wherein blocking plates which serve to block out the air surrounding the apparatus are provided, said plates extending forward on both sides from said reaction-gas supply nozzles and said inert-gas supply nozzles.
Claim 25
Dependent Claim
34 words
The gas-phase growth apparatus according to claim 19, wherein said reaction-gas nozzles and said inert-gas supply nozzles are in a U-shaped arrangement so as to surround said substrate except for a gas exhaust direction.
Claim 26
Dependent Claim
32 words
The gas-phase growth apparatus according to claim 19, wherein a driving means is provided which is capable of moving said UV-irradiation source and said substrate relatively back and forth in parallel planes.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-03-15 | 1991-09-14 | 1992-03-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-03-15 | 1995-09-14 | 1996-03-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-03-15 | 1999-09-14 | 2000-03-15 | $7700.00 | Window Closed / Lapsed |