Method and device for producing thin film

Abstract

Abstract PURPOSE:To form continuously a thin film as the resulting product of thermal decomposition having high quality by irradiating a broad laser beam on a substrate moving in one direction and supplying at the same time the plate-shaped gaseous flow of a reactive gaseous material. CONSTITUTION:A long slit nozzle 3 is mounted across a track stand 2 for transporting a substrate 1 to supply thin plate-like gaseous flow 4 of a reactive gaseous material at a high velocity. An evacuating head 5 facing the nozzle 3 is mounted at a specified space therefrom to suck and disharge the plate-shaped gaseous flow 4 arriving from the nozzle 3. A sweep mirror 6 is mounted above the central axis Y of the stand 2 to project the laser beam toward the space between the nozzle 3 and the head 5 thereby sweeping and heating, at a high speed, the surface of the substrate 1 advancing at a specified speed, across said surface. The thin film as the resulting product of thermal decomposition of the reactive gaseous material is thus continuously formed on the surface of the substrate 1 under movement.

Inventors

• 👤 Osamu Tabata
• 👤 田畑　収
• 👤 Saburo Kimura
• 👤 三郎 木村

Bibliographic Details