US3200018A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Controlled epitaxial crystal growth by focusing electromagnetic radiation
Assignee: Raytheon Co
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Filing: 1962-01-29
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Granted: 1965-08-10
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Expires: 1982-01-29
Abstract
No abstract record available.
Inventors
- 👤 Jack J Grossman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 07:31
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/482; H10P14/24; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/3438; H10P14/3441; H10P14/3442; H10W; H10W74/00; H10W74/40; H10W74/43; Y; Y10; Y10S; Y10S148/00; Y10S148/026; Y10S148/048; Y10S148/071; Y10S148/085; Y10S438/00; Y10S438/914; Y10S438/925
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
69 words
A METHOD OF VAPOR DEPOSITING AN EPITAXIAL LAYER OF A MATERIAL ON A SUBSTRATE, WHICH COMPRISES: ESTABLISHING A VAPOR ATMOSPHERE OF THE MATERIAL TO BE DEPOSITED ADJACENT THE SUBSTRATE, MAINTAINING THE TEMPERATURE OF SAID SUBSTRATE LESS THAN THE TEMPERATURE SUFFICIENT TO EFFECT EPITAXIAL VAPOR DEPOSITION; AND FOCUSING ELECTROMAGNETIC RADIATION ON A LOCALIZED AREA OF THE SUBSTRATE IN AN EFFECTIVE AMOUNT TO SUSTAIN EPITAXIAL VAPOR DEPOSITION WITHIN SAID LOCALIZED AREA.
Claim 2
Independent Claim
69 words
A METHOD OF VAPOR DEPOSITING AN EPITAXIAL LAYER OF A MATERIAL ON A SUBSTRATE, WHICH COMPRISES: ESTABLISHING A VAPOR ATMOSPHERE OF THE MATERIAL TO BE DEPOSITED ADJACENT THE SUBSTRATE, MAINTAINING THE TEMPERATURE OF SAID SUBSTRATE LESS THAN THE TEMPERATURE SUFFICIENT TO EFFECT EPITAXIAL VAPOR DEPOSITION; AND FOCUSING ELECTROMAGNETIC RADIATION ON A LOCALIZED AREA OF THE SUBSTRATE IN AN EFFECTIVE AMOUNT TO SUSTAIN EPITAXIAL VAPOR DEPOSITION WITHIN SAID LOCALIZED AREA.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1968-08-09 | 1969-02-08 | 1969-08-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1972-08-09 | 1973-02-08 | 1973-08-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1976-08-09 | 1977-02-08 | 1977-08-10 | $7700.00 | Window Closed / Lapsed |