Method of forming emitter coupled logic bipolar memory cell using polysilicon Schottky diodes for coupling

Claim 1

An improved method of forming an improved ECL bipolar memory cell in an integrated circuit structure using polysilicon Schottky diodes to couple the memory cell to the bit lines to reduce the problem of latch-up and using polysilicon load devices to couple the memory cell to a word line, the improvement comprising: (a) forming a layer of polysilicon over an integrated circuit substrate having portions of one or more memory transistors already formed therein; (b) patterning said polysilicon layer to form: (1) contacts for said previously formed memory transistor portions; (2) portions of one or more load devices to couple said memory cell to a word line; and (3) cathode portions for said Schottky diodes; (c) depositing, on said cathode portions of said polysilicon, a metal capable of reacting with said polysilicon in a sintering reaction to form a metal silicide comprising the anode of said Schottky diode selected from the class consisting of cobalt, chromium, hafnium, iridium, manganese, molybdenum, nickel, palladium, platinum, rhenium, tantalum, titanium, tungsten, and zirconium; (d) sintering said metal at a temperature of 600°-900° C. to react with said polysilicon to form said metal silicide; and (e) connecting said ECL memory cell respectively to first and second bit lines through said polysilicon Schottky diodes; whereby a memory cell is formed which is coupled to a first word line through a polysilicon load device also formed from portions of said polysilicon layer and said cell has enhanced resistance to latch-up because of the low minority carrier efficiency of said Schottky diodes.

Claim 6

A method of forming an improved ECL bipolar memory cell in an integrated circuit structure using Schottky diodes formed from a portion of a polysilicon layer and a metal silicide to connect the respective collectors of the memory transistors to the bit lines to reduce the problem of latch-up which comprises: (a) forming a layer of polysilicon over an integrated circuit substrate; (b) patterning and selectively doping said polysilicon layer to form: (1) contacts portions for said memory transistor portions; (2) one or more load resistors to couple said memory cell to a word line; and (3) cathode portions for said Schottky diodes; (c) depositing, on said cathode portions of said polysilicon, a metal capable of reacting with said polysilicon in a sintering reaction to form a metal silicide comprising the anode of said Schottky diode selected from the class consisting of cobalt, chromium, hafnium, iridium, manganese, molybdenum, nickel, palladium, platinum, rhenium, tantalum, titanium, tungsten, and zirconium; (d) sintering said metal at a temperature of 600°-900° C. to react with said polysilicon to form said metal silicide; and (e) connecting said ECL memory cell respectively to first and second bit lines through said polysilicon Schottky diodes; whereby a memory cell is formed which is coupled to a first word line through a polysilicon load resistor also formed from portions of said polysilicon layer and said cell has enhanced resistance to latch-up because of the low minority carrier efficiency of said Schottky diodes coupling said cell to said bit lines.

Claim 7

A method of forming an improved ECL bipolar memory cell in an integrated circuit structure using Schottky diodes formed from a portion of a polysilicon layer and a metal silicide to connect the respective collectors of the memory transistors to the bit lines to reduce the problem of latch-up which comprises: (a) forming a layer of polysilicon over an integrated circuit substrate; (b) patterning and selectively doping said polysilicon layer to form: (1) contacts portions for said memory transistor portions; (2) one or more load resistors to couple said memory cell to a word line; and (3) cathode portions for said Schottky diodes; (c) depositing, on said cathode portions of said polysilicon, a metal capable of reacting with said polysilicon in a sintering reaction to form a metal silicide comprising the anode of said Schottky diode selected from the class consisting of cobalt, chromium, hafnium, iridium, manganese, molybdenum, nickel, palladium, platinum, rhenium, tantalum, titanium, tungsten, and zirconium; (d) sintering said metal at a temperature of 600°-900° C. to react with said polysilicon to form said metal silicide; and (e) connecting said ECL memory cell respectively to first and second bit lines through said polysilicon Schottky diodes; whereby a memory cell is formed which is coupled to a first word line through a polysilicon load resistor also formed from portions of said polysilicon layer and said cell has enhanced resistance to latch-up because of the low minority carrier efficiency of said Schottky diodes coupling said cell to said bit lines.