Patent US4621032A successfully refreshed from Google Patents.
US4621032A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of forming a data storage medium and data storage device by congruent sublimation
Assignee: Energy Conversion Devices Inc
•
Filing: 1985-07-29
•
Granted: 1986-11-04
•
Expires: 2005-07-29
Abstract
Abstract Disclosed is an optical data storage device and a method of making the device. The device has a thin film of a multi-component, phase changeable, chalcogenide material. The thin film is prepared by vacuum deposition of a substantially non-convecting, multi-component, chalcogenide containing first source. The multicomponent source is converted to a non-condensed state, and the non-condensed material is deposited onto the substrate to form a deposit having substantial source/deposit compositional equivalence and the substantial absence of concentration gradients.
Inventors
- 👤 John P. DENeufville
- 👤 David A. Strand
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 11:34
CPC Classifications
G; G11; G11B; G11B7/00; G11B7/24; G11B7/26; G11B7/266; G11B7/241; G11B7/242; G11B7/243; G11B2007/24302; G11B2007/24316; Y; Y10; Y10S; Y10S428/00; Y10S428/913; Y10S428/922; Y10S428/9335; Y10S428/938
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
76 words
A method of depositing a multi-component, phase changeable, chalcogenide material onto a substrate, comprising the steps of: a. providing in a vacuum deposition means a substantially non-convecting, multi-component, congruently vaporizing chalcogenide first source; b. converting the first source to a non-condensed state having substantial source/non-condensed state compositional equivalence; and c. depositing material from the non-condensed state onto the substrate to form a deposit having substantial non-condensed state/deposit compositional equivalence and the substantial absence of concentration gradients.
Claim 2
Independent Claim
76 words
A method of depositing a multi-component, phase changeable, chalcogenide material onto a substrate, comprising the steps of: a. providing in a vacuum deposition means a substantially non-convecting, multi-component, congruently vaporizing chalcogenide first source; b. converting the first source to a non-condensed state having substantial source/non-condensed state compositional equivalence; and c. depositing material from the non-condensed state onto the substrate to form a deposit having substantial non-condensed state/deposit compositional equivalence and the substantial absence of concentration gradients.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein the first source is a solid source.
Claim 4
Dependent Claim
13 words
The method of claim 1 wherein the first source is a liquid source.
Claim 5
Dependent Claim
12 words
The method of claim 1 wherein the chalcogenide first source comprises tellurium.
Claim 6
Dependent Claim
11 words
The method of claim 1 comprising providing a chalcogen second source.
Claim 7
Dependent Claim
12 words
The method of claim 5 wherein the chalcogen second source comprises tellurium.
Claim 8
Dependent Claim
11 words
The method of claim 5 comprising providing an oxide third source.
Claim 9
Dependent Claim
13 words
The method of claim 7 wherein the oxide third source comprises tellurium oxide.
Claim 10
Dependent Claim
13 words
The method of claim 7 wherein the oxide third source comprises germanium oxide.
Claim 11
Dependent Claim
16 words
The method of claim 9 wherein the oxide third source comprises Ge and GeO 2 .
Claim 12
Dependent Claim
29 words
The method of claim 1 wherein the congruently vaporizing chalcogenide first source comprises tellurium and a component chosen from the group consisting of germanium, tin, lead and mixtures thereof.
Claim 13
Dependent Claim
18 words
The method of claim 11 wherein the congruently vaporizing chalcogenide first source comprises germanium telluride and tin telluride.
Claim 14
Dependent Claim
26 words
The method of claim 12 wherein the congruently vaporizing chalcogenide first source comprises (Ge x Sn 1-x ) Te where x is from 0.0 to 1.0.
Claim 15
Dependent Claim
86 words
An optical data storage device having a layer of a multicomponent, phase changeable, chalcogenide material on a substrate, said layer being deposited by the method comprising: a. providing in a vacuum deposition means a substantially non-convecting, multi-component, congruently vaporizing chalcogenide first source, b. converting the chalcogenide first source to a non-condensed state having substantial source/non-condensed state compositional equivalence; and c. depositing material from the non-condensed state onto the substrate to form a deposit having substantial non-condensed state/deposit compositional equivalence and the substantial absence of concentration gradients.
Claim 16
Dependent Claim
86 words
An optical data storage device having a layer of a multicomponent, phase changeable, chalcogenide material on a substrate, said layer being deposited by the method comprising: a. providing in a vacuum deposition means a substantially non-convecting, multi-component, congruently vaporizing chalcogenide first source, b. converting the chalcogenide first source to a non-condensed state having substantial source/non-condensed state compositional equivalence; and c. depositing material from the non-condensed state onto the substrate to form a deposit having substantial non-condensed state/deposit compositional equivalence and the substantial absence of concentration gradients.
Claim 17
Dependent Claim
17 words
The optical data storage device of claim 14 wherein the congruently vaporizing chalcogenide first source comprises tellurium.
Claim 18
Dependent Claim
32 words
The optical data storage device of claim 14 wherein the congruently vaporizing chalcogenide first source comprises tellurium and a component chosen from the group consisting of germanium, tin, lead, and mixtures thereof.
Claim 19
Dependent Claim
21 words
The optical data storage device of claim 16 wherein the congruently vaporizing chalcogenide first source comprises germanium telluride and tin telluride.
Claim 20
Dependent Claim
29 words
The optical data storage device of claim 17 wherein the congruently vaporizing chalcogenide first source comprises (Ge x Sn 1-x ) Te where x is from 0.0 to 1.0.
Claim 21
Dependent Claim
14 words
The optical data storage device of claim 14 comprising providing a chalcogen second source.
Claim 22
Dependent Claim
13 words
The optical data storage device of claim 19 wherein the chalcogen is tellurium.
Claim 23
Dependent Claim
20 words
The optical data storage device of claim 19 comprising providing an oxide containing third source in the vacuum deposition means.
Claim 24
Dependent Claim
17 words
The optical data storage device of claim 21 wherein the oxide containing third source comprises germanium oxide.
Claim 25
Dependent Claim
22 words
The optical data storage device of claim 14 wherein the layer of multicomponent, phase changeable, chalcognide material comprises tellurium, germanium, and tin.
Claim 26
Dependent Claim
21 words
The optical data storage device of claim 14 wherein the layer of multicomponent, phase changeable, chalcogenide material is a thin film.
Claim 27
Dependent Claim
28 words
The optical data storage device of claim 24 wherein the thin film layer of multicomponent, phase changeable, chalcogenide material is from about 50 to about 2,000 Angstroms thick.
References Cited (Backward Citations)
US3218203A
Cited
US3530441A
Cited
US3664866A
Cited
US3870558A
Cited
US3971874A
Cited
US4069356A
Cited
US4066481A
Cited
US4091171A
Cited
JPS546875A
Cited
US4207119A
Cited
JPS55163638A
Cited
US4447469A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-11-03 | 1990-05-05 | 1990-11-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-11-03 | 1994-05-05 | 1994-11-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-11-03 | 1998-05-05 | 1998-11-04 | $7700.00 | Window Closed / Lapsed |