JPS546875A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Vacuum deposition method
Assignee: NEC Corp
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Filing: 1977-06-17
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Granted: —
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Expires: 1997-06-17
Abstract
Abstract PURPOSE:To improve the controlling property of evaporating speed and quantity against the element having a high vapor pressure, by carrying out vacuum deposition making the alloy as evaporation source, composed of the element having a high vapor pressure and that of having a vapor pressure lower than the above element at evaporation temperature.
Inventors
- 👤 Yoshinari Matsumoto
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-05 10:30
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24
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