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Patent US4584216A successfully refreshed from Google Patents.
US4584216A
Expired / Lapsed
US
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Precured split hinge for photomask assembly
Assignee: PPG Industries Inc
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Filing: 1984-06-15
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Granted: 1986-04-22
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Expires: 2004-06-15
Abstract
Abstract Hinged glass photomask assemblies for photolithographic processes are disclosed wherein a flexible polymeric split hinge is used to join glass plates thereby providing for greater flexibility of the phototool.
Inventors
- 👤 James S. Kenworthy
- 👤 Victor Motyka
- 👤 Robert G. Spindler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 16:21
CPC Classifications
B; B32; B32B; B32B17/00; B32B17/06; B32B17/10; B32B17/10005; B32B17/10009; B32B17/10036; B32B17/10165; B32B17/10247; B32B17/1055; B32B17/10688; H; H05; H05K; H05K3/00; H05K3/0073; H05K3/0082; H05K2203/00; H05K2203/05; H05K2203/0548; H05K2203/056; H05K2203/15; H05K2203/1572; H05K3/0002; Y; Y10; Y10S; Y10S16/00; Y10S16/13; Y10T; Y10T428/00; Y10T428/24; Y10T428/24025; Y10T428/31504; Y10T428/31551; Y10T428/31609; Y10T428/31612
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
65 words
In a method for making a hinged photomask assembly by joining two rigid plates, at least one of which comprises a photomask image, by means of a flexible polymeric material, the improvement which comprises: a. forming the polymeric material into a cured split hinge configuration; and b. attaching the cured polymeric split hinge to each of said two rigid plates by means of an adhesive.
Claim 2
Dependent Claim
65 words
In a method for making a hinged photomask assembly by joining two rigid plates, at least one of which comprises a photomask image, by means of a flexible polymeric material, the improvement which comprises: a. forming the polymeric material into a cured split hinge configuration; and b. attaching the cured polymeric split hinge to each of said two rigid plates by means of an adhesive.
Claim 3
Dependent Claim
13 words
The method according to claim 1, wherein the two rigid plates are glass.
Claim 4
Dependent Claim
14 words
The method according to claim 2, wherein the polymeric material is a silicone composition.
Claim 5
Dependent Claim
14 words
The method according to claim 3, wherein the silicone composition comprises phenyl-methyl-vinyl siloxane polymer.
Claim 6
Dependent Claim
19 words
The method according to claim 4, wherein the silicone composition further comprises a curing agent and an adhesion promoter.
Claim 7
Dependent Claim
13 words
The method according to claim 5, wherein the curing agent is benzoyl peroxide.
Claim 8
Dependent Claim
12 words
The method according to claim 6, wherein the adhesion promoter is γ-glycidoxypropyltrimethoxysilane.
Claim 9
Dependent Claim
27 words
The method according to claim 7, wherein the silicone composition is cured by heating at about 300° F. (about 139° C.) for about 20 to 30 minutes.
Claim 10
Dependent Claim
21 words
The method according to claim 8, wherein the cured silicone hinge has a Shore A hardness of about 25 to 70.
Claim 11
Dependent Claim
22 words
The method according to claim 3, wherein the silicone composition is attached to the glass plates with a room temperature curing adhesive.
Claim 12
Dependent Claim
42 words
A hinged photomask assembly comprising: a. first and second rigid plates, at least one of which comprises a photomask image; and b. hinge means comprising a precured flexible polymeric split hinge joining said frist and second rigid by means of an adhesive
Claim 13
Dependent Claim
42 words
A hinged photomask assembly comprising: a. first and second rigid plates, at least one of which comprises a photomask image; and b. hinge means comprising a precured flexible polymeric split hinge joining said frist and second rigid by means of an adhesive
Claim 14
Dependent Claim
14 words
An article according to claim 11, wherein said first and second plates are glass.
Claim 15
Dependent Claim
29 words
An article according to claim 12, wherein at least one of said glass plates comprises a photomask image in the form of a stain pattern within said glass plates.
Claim 16
Dependent Claim
16 words
An article according to claim 12, wherein the flexible polymeric hinge is a cured silicone composition.
Claim 17
Dependent Claim
38 words
An article according to claim 11, wherein said plates are in parallel spaced facing relation and said hinge is attached along one pair of parallel adjacent edges of said plates perpendicular to the facing surfaces of said plates.
Claim 18
Dependent Claim
33 words
An article according to claim 11, wherein said plates are coplanar with adjacent edges in parallel spaced relation and said hinge is attached to adjacent parallel facing edge surface portions of the plates.
Claim 19
Dependent Claim
40 words
An article according to claim 16, wherein said first plate is a glass photomask and said second plate is a hinge plate which is affixed to a third plate in parallel spaced facing relation to said first and second plates.
Claim 20
Dependent Claim
14 words
An article according to claim 17, wherein said third plate is a glass photomask.
Claim 21
Dependent Claim
14 words
An article according to claim 18, wherein said polymeric hinge is a silicone composition.
Claim 22
Dependent Claim
22 words
An article according to claim 19, wherein said silicone hinge is attached to said glass plates using a room temperature curing adhesive.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-04-21 | 1989-10-21 | 1990-04-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-04-21 | 1993-10-21 | 1994-04-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-04-21 | 1997-10-21 | 1998-04-22 | $7700.00 | Window Closed / Lapsed |