US4144066A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron bombardment method for making stained glass photomasks
Assignee: PPG Industries Inc
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Filing: 1977-11-30
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Granted: 1979-03-13
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Expires: 1997-11-30
Abstract
Abstract Glass photomasks having a stained pattern within the glass for use in photolithographic processes are made by injecting stain-producing ions, preferably silver and/or copper ions, into a glass substrate from a film by electron bombardment, which also serves to reduce the injected ions to their elemental state and to agglomerate the atoms to colloidal coloration centers. The stained areas of the glass are patterned by carrying out the electron bombardment through a developed photoresist, or by using a focused electron beam moving along a controlled locus.
Inventors
- 👤 Fred M. Ernsberger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:20
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/68; G03F1/76; G03F1/78; G03F1/54
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
137 words
A method for making stained glass photomasks comprising: placing a thin film source of stain-producing cations into contact with at least selected areas of a surface of a glass substrate; bombarding the film with electrons of sufficient energy to penetrate through the film and into the glass so as to inject stain-producing cations into the glass underlying said selected areas of the glass substrate surface, and to reduce the injected cations to their atomic state, while adjacent areas of said glass surface are maintained essentially free from injected cations; removing said thin film source from the surface of the glass; and heating the glass substrate to agglomerate the injected stain-producing atoms within the glass into colloidal coloration centers, thereby producing a contrasting pattern of stained radiation absorbing zones and non-stained essentially transparent zones within the glass substrate.
Claim 2
Independent Claim
137 words
A method for making stained glass photomasks comprising: placing a thin film source of stain-producing cations into contact with at least selected areas of a surface of a glass substrate; bombarding the film with electrons of sufficient energy to penetrate through the film and into the glass so as to inject stain-producing cations into the glass underlying said selected areas of the glass substrate surface, and to reduce the injected cations to their atomic state, while adjacent areas of said glass surface are maintained essentially free from injected cations; removing said thin film source from the surface of the glass; and heating the glass substrate to agglomerate the injected stain-producing atoms within the glass into colloidal coloration centers, thereby producing a contrasting pattern of stained radiation absorbing zones and non-stained essentially transparent zones within the glass substrate.
Claim 3
Dependent Claim
49 words
The method of claim 1, further including the steps of applying a layer of photoresist onto the surface of the glass substrate and photographically developing the photoresist to provide patterned openings through the photoresist which overlie said selected areas of the glass surface before depositing said cation source film.
Claim 4
Dependent Claim
53 words
The method of claim 1, wherein said cation source film is placed into contact with the whole of said glass surface and a layer of photoresist is applied over the cation source film and is photographically developed to provide patterned openings through the photoresist which overlie said selected areas of the glass surface.
Claim 5
Dependent Claim
37 words
The method of claim 1 wherein the electron bombardment is directed toward said film as a focused beam, the impingement of which is limited to portions of the film overlying said selected areas of the glass surface.
Claim 6
Dependent Claim
22 words
The method of claim 1, wherein said stain-producing cations are selected from the group consisting of silver, copper, gold, and thallium ions.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-03-12 | 1982-09-11 | 1983-03-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-03-12 | 1986-09-11 | 1987-03-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-03-12 | 1990-09-11 | 1991-03-13 | $7700.00 | Window Closed / Lapsed |