US4412739A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Hinged glass photomask assembly
Assignee: PPG Industries Inc
•
Filing: 1981-01-13
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Granted: 1983-11-01
•
Expires: 2001-01-13
Abstract
Abstract A method and article are disclosed for facilitating repeated use in a photolithographic imaging process of a photomask assembly comprising a pair of glass plates by means of a flexible polymeric hinge permanently joining said pair of glass plates.
Inventors
- 👤 James M. Freiberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 16:54
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7003; G03F9/7038; G03F1/00; G03F1/50; H; H05; H05K; H05K3/00; H05K3/0073; H05K3/0082; Y; Y10; Y10S; Y10S16/00; Y10S16/13
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
38 words
An article of manufacture for use in photolithograhic processes which comprises: a. two glass sheets; b. at least one photomask image; and c. a flexible polymeric hinge, wherein said polymeric hinge is directly bonded to both glass sheets.
Claim 2
Dependent Claim
38 words
An article of manufacture for use in photolithograhic processes which comprises: a. two glass sheets; b. at least one photomask image; and c. a flexible polymeric hinge, wherein said polymeric hinge is directly bonded to both glass sheets.
Claim 3
Dependent Claim
59 words
An article of manufacture for use in photolithographic processes which comprises: a. two glass sheets; b. at least one photomask image; c. a flexible polymeric hinge; and d. a hinge plate, wherein said polymeric hinge is directly bonded to one of said glass sheets and to said hinge plate which is affixed to the other of said glass sheets.
Claim 4
Dependent Claim
59 words
An article of manufacture for use in photolithographic processes which comprises: a. two glass sheets; b. at least one photomask image; c. a flexible polymeric hinge; and d. a hinge plate, wherein said polymeric hinge is directly bonded to one of said glass sheets and to said hinge plate which is affixed to the other of said glass sheets.
Claim 5
Dependent Claim
16 words
The article according to claim 1 or 2, wherein said polymeric hinge comprises a silicone rubber.
Claim 6
Dependent Claim
20 words
The article according to claim 3, wherein said silicone rubber has a Shore A hardness of about 25 to 70.
Claim 7
Dependent Claim
28 words
The article according to claim 1 or 2, wherein at least one of said glass sheets comprises a photomask image as a stain pattern within said glass sheet.
Claim 8
Independent Claim
51 words
A method for producing a hinged photomask assembly for use in a photolithographic process which comprises joining two glass plates with a flexible polymeric hinge, wherein one glass plate is a photomask plate and the other glass plate is a hinge plate which is affixed to a second glass photomask plate.
Claim 9
Independent Claim
51 words
A method for producing a hinged photomask assembly for use in a photolithographic process which comprises joining two glass plates with a flexible polymeric hinge, wherein one glass plate is a photomask plate and the other glass plate is a hinge plate which is affixed to a second glass photomask plate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-10-31 | 1987-05-02 | 1987-11-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-10-31 | 1991-05-02 | 1991-11-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-10-31 | 1995-05-02 | 1995-11-01 | $7700.00 | Window Closed / Lapsed |