Patent US4570173A successfully refreshed from Google Patents.
US4570173A
Expired / Lapsed
US
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High-aspect-ratio hollow diffused regions in a semiconductor body
Assignee: General Electric Co
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Filing: 1983-10-24
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Granted: 1986-02-11
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Expires: 2003-10-24
Abstract
Abstract A semiconductor device and a method for its preparation are disclosed, wherein a semiconductor body has at least one bore extending completely or partially therethrough, this bore being defined by a semiconducting region having a conductivity type opposite to, and resistivity lower than, the material of the body contiguous to the bore-defining semiconducting region, this bore having a substantially constant diameter of less than about 1.5 mils and an average length-to-diameter ratio of at least about 6:1.
Inventors
- 👤 Thomas R. Anthony
- 👤 Douglas E. Houston
- 👤 James A. Loughran
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 12:42
CPC Classifications
H; H10; H10P; H10P34/00; H10P34/40; H10P34/42; H10D; H10D62/00; H10D62/10; H10D62/117
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
138 words
In a semiconductor device wherein a semiconductor body has at least one clean, well-defined bore extending partially therethrough, said bore being defined by a first semiconducting region having a conductivity type opposite to, and resistivity lower than, the material of said body located contiguous with said first semiconducting region along an interface, the improvement wherein each said bore has a diameter of less than about 1.5 mils and an average length-to-diameter ratio of at least about 6:1, said first region defining said bore is free of dislocations and said bore extends to a predetermined depth such that the bottom of said bore is adjacent a major surface of said semiconductor body and is spaced therefrom a distance in the range of from a maximum distance of about one-fifth the hole diameter to a minimum distance of 6 microns.
Claim 2
Dependent Claim
138 words
In a semiconductor device wherein a semiconductor body has at least one clean, well-defined bore extending partially therethrough, said bore being defined by a first semiconducting region having a conductivity type opposite to, and resistivity lower than, the material of said body located contiguous with said first semiconducting region along an interface, the improvement wherein each said bore has a diameter of less than about 1.5 mils and an average length-to-diameter ratio of at least about 6:1, said first region defining said bore is free of dislocations and said bore extends to a predetermined depth such that the bottom of said bore is adjacent a major surface of said semiconductor body and is spaced therefrom a distance in the range of from a maximum distance of about one-fifth the hole diameter to a minimum distance of 6 microns.
Claim 3
Dependent Claim
35 words
The improved device of claim 1 wherein the first semiconducting region penetrates to the major surface and is present at said surface as a circularly shaped area having a diameter of at least one micron.
Claim 4
Dependent Claim
23 words
The improved device of claim 6 wherein the diameter is about 1 mil and the average length-to-diameter ratio is at least about 12:1.
Claim 5
Dependent Claim
31 words
The improved device of claim 6 wherein a plurality of bores are arranged in an array with the bores substantially parallel to each other and spaced about 5 mils apart center-to-center.
Claim 6
Dependent Claim
31 words
The improved device of claim 6 wherein a plurality of bores are arranged in an array with the bores substantially parallel to each other and spaced about 1.5 mils apart center-to-center.
Claim 7
Dependent Claim
22 words
The improved device of claim 1 wherein the average length-to-diameter ratio is in the range of from about 6:1 to about 50:1.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-02-10 | 1989-08-12 | 1990-02-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-02-10 | 1993-08-12 | 1994-02-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-02-10 | 1997-08-12 | 1998-02-11 | $7700.00 | Window Closed / Lapsed |