High aspect ratio P-N junctions by the thermal gradient zone melting technique

Claim 1

A semiconductor device comprising a body of single crystal semiconductor material having opposed major surfaces, a first type conductivity, a vertical axis and a selected resistivity; an array of columnar regions disposed in the body substantially parallel to each other and the vertical axis of the body and substantially perpendicular to the two opposed major surfaces, each region extending between and terminating in the two major opposed surfaces and the material of the region consists of recrystallized semiconductor material of the body; each region being formed in situ by the migration of a melt of a metal-rich semiconductor material through the body by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient substantially parallel with the vertical axis of the body and has a predetermined level of concentration of the metal of the melt therein as determined by the solid solubility limit of that metal in that semiconductor material at that predetermined elevated temperature of migration, the metal being distributed substantially uniformly throughout the entire region and comprising a dopant impurity material to impart a second and opposite conductivity thereto, and the metal is derived from a metal lead thermocompression bonded to the major surface from which migration is initiated; a P-N junction formed by the contiguous surfaces of each region and the body, and each region has a substantially equilateral triangular cross-section.