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Patent US4559121A successfully refreshed from Google Patents.
US4559121A
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Method and apparatus for evaporation arc stabilization for permeable targets
Assignee: Hauzer Industries BV
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Filing: 1983-09-12
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Granted: 1985-12-17
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Expires: 2003-09-12
Abstract
Abstract Apparatus and method for evaporation arc stabilization including a permeable target having a surface of material to be evaporated; circuitry for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over the target surface; a confinement ring contacting and surrounding the target surface, the ring being composed of a material such as boron nitride and a permeable ring surrounding the target for effecting substantially uniform evaporation of the permeable target material from the target surface.
Inventors
- 👤 William M. Mularie
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 17:49
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/325
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
133 words
Apparatus for evaporation arc stabilization comprising a target having a surface of permeable material to be evaporated; means for evaporating the target material by establishing an arc on the target surface, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; a confinement ring contacting the target and surrounding the target surface, the ring being composed of a material having (a) a secondary emission ratio less than one at the mean energies of the charged particles of the arc and (b) a surface energy less than that of the evaproated target material to thereby confine the cathod spot to the target surface; and a permeable ring surrounding the target for effecting substantially uniform evaporation of the target material from the target surface.
Claim 2
Dependent Claim
133 words
Apparatus for evaporation arc stabilization comprising a target having a surface of permeable material to be evaporated; means for evaporating the target material by establishing an arc on the target surface, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; a confinement ring contacting the target and surrounding the target surface, the ring being composed of a material having (a) a secondary emission ratio less than one at the mean energies of the charged particles of the arc and (b) a surface energy less than that of the evaproated target material to thereby confine the cathod spot to the target surface; and a permeable ring surrounding the target for effecting substantially uniform evaporation of the target material from the target surface.
Claim 3
Dependent Claim
15 words
Apparatus as in claim 1 where said permeable ring and said target constitute separate members.
Claim 4
Dependent Claim
16 words
Apparatus as in claim 1 where permeable ring and said target are integrally connected to another.
Claim 5
Dependent Claim
20 words
Apparatus as in claim 2 or 3 where said permeable ring is made of the same material as said target.
Claim 6
Dependent Claim
17 words
Apparatus as in claims 2 or 3 where said permeable ring is made of iron or Permalloy.
Claim 7
Dependent Claim
21 words
Apparatus as in claim 1 where the secondary emission ratio of the confinement ring is less than that of the target.
Claim 8
Dependent Claim
15 words
Apparatus as in claims 1 or 6 where the confinement ring comprises a nitride compound.
Claim 9
Dependent Claim
21 words
Apparatus as in claim 7 where the nitride compound is selected from the group consisting of boron nitride and titanium nitride.
Claim 10
Dependent Claim
12 words
Apparatus as in claim 8 where the nitride compound is boron nitride.
Claim 11
Dependent Claim
18 words
Apparatus as in claim 1 where the mean charged particle energies of said arc are about 20-100 eV.
Claim 12
Dependent Claim
17 words
Apparatus as in claim 7 where the mean charged particle energies of said arc are 40-60 eV.
Claim 13
Dependent Claim
19 words
Apparatus as in claim 1 including a substrate upon which the evaporated target material is deposited as a coating.
Claim 14
Dependent Claim
14 words
Apparatus as in claim 12 where the anode and substrate are the same member.
Claim 15
Dependent Claim
22 words
Apparatus as in claim 1 where the means for establishing the arc on the target surface includes a cathode and an anode.
Claim 16
Dependent Claim
13 words
Apparatus as in claim 14 where said target is mounted on said cathode.
Claim 17
Dependent Claim
14 words
Apparatus as in claim 14 where said target and cathode are the same member.
Claim 18
Independent Claim
104 words
A method of evaporation arc stabilization comprising the steps of establishing an arc on a surface of a permeable target to evaporate the target, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; confining the arc to the target surface with a confinement ring which contacts and surrounds the target surface, the ring being composed of a material having (a) a secondary emission ratio less than one at the mean energies of the charged particles of the arc and (b) a surface energy less than that of the evaporated target material; and
Claim 19
Independent Claim
104 words
A method of evaporation arc stabilization comprising the steps of establishing an arc on a surface of a permeable target to evaporate the target, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; confining the arc to the target surface with a confinement ring which contacts and surrounds the target surface, the ring being composed of a material having (a) a secondary emission ratio less than one at the mean energies of the charged particles of the arc and (b) a surface energy less than that of the evaporated target material; and
Claim 20
Dependent Claim
21 words
surrounding the target with a permeable ring to thereby effect substantially uniform evaporation of the target material from the target surface.
Claim 21
Dependent Claim
21 words
surrounding the target with a permeable ring to thereby effect substantially uniform evaporation of the target material from the target surface.
Claim 22
Dependent Claim
16 words
A method as in claim 17 where said permeable ring and said target constitute separate members.
Claim 23
Dependent Claim
18 words
A method as in claim 17 where said permeable ring and said target are integrally connected to another.
Claim 24
Independent Claim
21 words
A method as in claims 18 or 19 where said permeable ring is made of the same material as said target.
Claim 25
Independent Claim
18 words
A method as in claims 18 or 19 where said permeable ring is made of iron or Permalloy.
Claim 26
Dependent Claim
22 words
A method as in claim 17 where the secondary emission ratio of the confinement ring is less than that of the target.
Claim 27
Dependent Claim
19 words
A method as in claim 17 where the mean charged particle energies of said arc are about 20-100 eV.
Claim 28
Dependent Claim
19 words
A method as in claim 17 where the mean charged particle energies of said arc are about 40-60 eV.
Claim 29
Dependent Claim
14 words
A method as in claim 17 where the confinement ring comprises a nitride compound.
Claim 30
Dependent Claim
22 words
A method as in claim 25 where the nitride compound is selected from the group consisting of boron nitride and titanium nitride.
Claim 31
Dependent Claim
13 words
A method as in claim 26 where the nitride compound is boron nitride.
Claim 32
Dependent Claim
18 words
A method as in claim 17 including depositing the evaporated target material on a substrate as a coating.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-12-16 | 1989-06-17 | 1989-12-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-12-16 | 1993-06-17 | 1993-12-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-12-16 | 1997-06-17 | 1997-12-17 | $7700.00 | Window Closed / Lapsed |